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Gas-assisted electron-beam-induced nanopatterning of high-quality titanium oxide
KTH, School of Industrial Engineering and Management (ITM), Materials Science and Engineering.
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2016 (English)In: Nanotechnology, ISSN 0957-4484, E-ISSN 1361-6528, Vol. 27, no 11, 115304Article in journal (Refereed) PublishedText
Abstract [en]

Electron-beam-induced deposition of titanium oxide nanopatterns is described. The precursor is titanium tetra-isopropoxide, delivered to the deposition point through a needle and mixed with oxygen at the same point via a flow through a separate needle. The depositions are free of residual carbon and have an EDX determined stoichiometry of TiO2.2. High resolution transmission electron microscopy and Raman spectroscopy studies reveal an amorphous structure of the fabricated titanium oxide. Ellipsometric characterization of the deposited material reveals a refractive index of 2.2-2.4 RIU in the spectral range of 500-1700 nm and a very low extinction coefficient (lower than 10(-6) in the range of 400-1700 nm), which is consistent with high quality titanium oxide. The electrical resistivity of the titanium oxide patterned with this new process is in the range of 10-40 G Omega cm and the measured breakdown field is in the range of 10-70 V mu m(-1). The fabricated nanopatterns are important for a variety of applications, including field-effect transistors, memory devices, MEMS, waveguide structures, bio-and chemical sensors.

Place, publisher, year, edition, pages
Institute of Physics Publishing (IOPP), 2016. Vol. 27, no 11, 115304
Keyword [en]
gas-assisted EBID, 3D nanopatterning, high-purity insulator, titanium tetra-isopropoxide (TTIP), purification
National Category
Nano Technology
Identifiers
URN: urn:nbn:se:kth:diva-183607DOI: 10.1088/0957-4484/27/11/115304ISI: 000370259800016PubMedID: 26878568ScopusID: 2-s2.0-84959010416OAI: oai:DiVA.org:kth-183607DiVA: diva2:913161
Funder
Swedish Research CouncilCarl Tryggers foundation
Note

QC 20160319

Available from: 2016-03-19 Created: 2016-03-18 Last updated: 2016-03-19Bibliographically approved

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Riazanova, Anastasiia V.Belova, Liubov M.
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