Development of integrated microfluidic device for optical flow rate sensing
2013 (English)In: Journal of Circuits, Systems and Computers, Vol. 22, no 9Article in journal (Refereed) Published
The design, fabrication and characterization of an optics based integrated flow rate sensor is presented where the light-fluid interaction is maximized by allowing the liquid and light to propagate along the same direction. The flow rate sensor consists of a 10 mu m deep microchannel placed between two waveguides. The optical waveguides were tapered to fit the channel width, to guide light in and out of the microchannel. A tapering mechanism is proposed to minimize the coupling and propagation losses. The power of the output signal from the designed device was calculate through simulation and it was compared with the actual output signal detected by a fast receiver (higher than 1 MHz). The dynamic change of the light intensity when fluid flows through the channel can also be recorded by this receiver. This scheme allows for a direct measurement of the liquid flow rate with higher interaction length between fluid and light with a dynamic range of up to 0.18. An integrated microfluidic device with high precision and sufficient coupling between the light source and the microfluidic channel is proposed.
Place, publisher, year, edition, pages
World Scientific, 2013. Vol. 22, no 9
IdentifiersURN: urn:nbn:se:kth:diva-175193DOI: 10.1142/S0218126613400161ISI: 000327669200017ScopusID: 2-s2.0-84888857038OAI: oai:DiVA.org:kth-175193DiVA: diva2:914341
QC 201603312016-03-232015-10-102016-03-31Bibliographically approved