Optical fiber-based sensor for in situ monitoring of cadmium sulfide thin-film growth
2013 (English)In: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 38, no 24, 5385-5388 p.Article in journal (Refereed) Published
This work presents a scheme for in situ monitoring of thin-film growth. A fiber-optic sensor based on Fabry-Perot interferometric technique has been established for the first time to monitor in situ growth of thin films. This was applied for determining thickness of cadmium sulfide (CdS) thin films during growth. The fabrication process of CdS film was carried out in 30mMcadmiumacetate and thioacetamide solution at 60°C temperature. The estimated thickness determined during the growth was verified by scanning electron microscopy. This study shows that in situ measurement of the thickness of thin films is feasible by this new technique, and a close match of the estimated thickness was achieved.
Place, publisher, year, edition, pages
Optical Society of America, 2013. Vol. 38, no 24, 5385-5388 p.
IdentifiersURN: urn:nbn:se:kth:diva-175190DOI: 10.1364/OL.38.005385ISI: 000328702100048ScopusID: 2-s2.0-84890456465OAI: oai:DiVA.org:kth-175190DiVA: diva2:914346
QC 201603292016-03-232015-10-102016-03-29Bibliographically approved