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Radiofrequency-plasma-deposited hydrogenated fluorinated silicon-carbon alloy films
1989 (English)In: Physical Review B. Condensed Matter and Materials Physics, ISSN 1098-0121, E-ISSN 1550-235X, Vol. 40, no 6, 3830-3836 p.Article in journal (Refereed) Published
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1989. Vol. 40, no 6, 3830-3836 p.
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Nano Technology
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URN: urn:nbn:se:kth:diva-175314DOI: 10.1103/PhysRevB.40.3830ScopusID: 2-s2.0-4344596381OAI: oai:DiVA.org:kth-175314DiVA: diva2:918269
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NR 20160422

Available from: 2016-04-11 Created: 2015-10-10 Last updated: 2016-04-22Bibliographically approved

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