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Diagnostics of particle genesis and growth in RF silane plasmas by ion mass spectrometry and light scattering
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1994 (English)In: Plasma sources science & technology (Print), ISSN 0963-0252, E-ISSN 1361-6595, Vol. 3, no 3, 278-285 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1994. Vol. 3, no 3, 278-285 p.
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Nano Technology
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URN: urn:nbn:se:kth:diva-175305DOI: 10.1088/0963-0252/3/3/007Scopus ID: 2-s2.0-0001127041OAI: oai:DiVA.org:kth-175305DiVA: diva2:918278
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NR 20160422

Available from: 2016-04-11 Created: 2015-10-10 Last updated: 2016-04-22Bibliographically approved

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