Micromachined Waveguide Integrated RF MEMS Phase Sifter Operating between 500-600 GHz
2015 (English)Conference paper (Refereed)
This paper presents a 500-600 GHz submillimeter- wave MEMS-reconfigurable phase shifter. It is the first ever RF MEMS component reported to be operating above 220 GHz. The phase shifter is based on a micromachined rectangular waveguide which is loaded by 9 E-plane stubs, which can be individually blocked by using MEMS–reconfigurable surfaces. The phase-shifter is composed of three metallized silicon chips which are assembled in H-plane cuts of the waveguide.
Place, publisher, year, edition, pages
Other Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-185179OAI: oai:DiVA.org:kth-185179DiVA: diva2:919029
16th edition of the International Symposium on RF-MEMS and RF-MICROSYSTEMS. 29 june -1 July
QC 201604182016-04-122016-04-122016-04-18Bibliographically approved