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Abrasion resistant low friction and ultra-hard magnetron sputtered AlMgB14 coatings
KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits. INMATECH Intelligent Materials Technology, Sweden; Petrozavodsk State University, Russia.ORCID iD: 0000-0002-4997-9032
2016 (English)In: Materials Research Express, ISSN 2053-1591, Vol. 3, no 4, 046402Article in journal (Refereed) Published
Abstract [en]

Hard aluminum magnesium boride films were fabricated by RF magnetron sputtering from a single stoichiometric AlMgB14 ceramic target. X-ray amorphous AlMgB14 films are very smooth. Their roughness does not exceed the roughness of Si wafer and Corning glass used as the substrates. Dispersion of refractive index and extinction coefficient were determined within 300 to 2500 nm range for the film deposited onto Corning glass. Stoichiometric in-depth compositionally homogeneous 2 μm thick films on the Si(100) wafer possess the peak values of nanohardness 88 GPa and Young’s modulus 517 GPa at the penetration depth of 26 nm and, respectively, 35 GPa and 275 GPa at 200 nm depth. Friction coefficient was found to be 0.06. The coating scratch adhesion strength of 14 N was obtained as the first chipping of the coating whereas its spallation failure happened at 21 N. These critical loads and the work of adhesion, estimated as high as 18.4 J m−2, surpass characteristics of diamond like carbon films deposited onto tungsten carbide–cobalt (WC– Co) substrates.

Place, publisher, year, edition, pages
Institute of Physics (IOP), 2016. Vol. 3, no 4, 046402
Keyword [en]
hardness, Young’s modulus, scratch test, friction coefficient, critical load, work of adhesion, refractive index and extinction coefficient
National Category
Materials Engineering
URN: urn:nbn:se:kth:diva-185585DOI: 10.1088/2053-1591/3/4/046402ISI: 000377811500040ScopusID: 2-s2.0-84965022491OAI: diva2:922621

QC 20160427

Available from: 2016-04-24 Created: 2016-04-24 Last updated: 2016-07-11Bibliographically approved

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Grishin, Alexander
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Integrated Devices and Circuits
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