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Fabrication of circular sawtooth gratings using focused UV lithography
KTH, School of Engineering Sciences (SCI), Physics, Physics of Medical Imaging.
KTH, School of Engineering Sciences (SCI), Physics, Physics of Medical Imaging.
KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.ORCID iD: 0000-0003-2745-6289
KTH, School of Engineering Sciences (SCI), Physics, Physics of Medical Imaging.
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2016 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 26, no 3, 035001Article in journal (Refereed) PublishedText
Abstract [en]

AbstractThis paper presents a novel micro-fabrication method using focused ultraviolet (UV) light to manufacture three-dimensional sawtooth structures in ultra-thick negative photoresist to fabricate a novel multi-prism x-ray lens. The method uses a lens to shape the UV beam instead of the photomask conventionally used in UV lithography. Benefits of this method include the ability to manufacture sawtooth structures in free form, for example in circular shapes as well as arrays of these shapes, and in resist that is up to 76 μm thick.To verify the method, initially a simple simulation based on Fourier optics was done to predict the exposure energy distribution in the photoresist. Furthermore, circular sawtooth gratings were manufactured in a 76 μm SU-8 resist. The UV lens was fabricated using electron beam lithography and then used to expose the SU-8 with UV light. This paper details the complete developed process, including pre-exposure with an e-beam and cold development, which creates stable sawtooth structures. The measured profile was compared to the ideal sawtooth and the simulation. The main discrepancy was in the smallest feature size, the sawtooth tips, which were wider than the desired structures, as would be expected by simulation.

Place, publisher, year, edition, pages
Institute of Physics Publishing (IOPP), 2016. Vol. 26, no 3, 035001
Keyword [en]
focused UV lithography, three-dimensional sawtooth structures, SU-8, UV lens, Fourier optics
National Category
Medical Engineering
Research subject
Medical Technology; Physics; Applied Medical Technology
Identifiers
URN: urn:nbn:se:kth:diva-185957DOI: 10.1088/0960-1317/26/3/035001ISI: 000375230700001ScopusID: 2-s2.0-84959432882OAI: oai:DiVA.org:kth-185957DiVA: diva2:924946
Projects
Medical Imaging Project
Funder
Stiftelsen Olle Engkvist Byggmästare
Note

QC 20160509

Available from: 2016-04-29 Created: 2016-04-29 Last updated: 2016-05-30Bibliographically approved

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