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Leak-tight vertical membrane microvalves
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-8531-5607
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0002-0441-6893
KTH, School of Electrical Engineering (EES), Micro and Nanosystems.ORCID iD: 0000-0001-8248-6670
2016 (English)In: Lab on a Chip, ISSN 1473-0197, E-ISSN 1473-0189, Vol. 16, no 8, 1439-1446 p.Article in journal (Refereed) PublishedText
Abstract [en]

Pneumatic microvalves are fundamental control components in a large range of microfluidic applications. Their key performance parameters are small size, i.e. occupying a minimum of microfluidic real estate, low flow resistance in the open state, and leak-tight closing at limited control pressures. In this work we present the successful design, realization and evaluation of the first leak-tight, vertical membrane, pneumatic microvalves. The realization of the vertical membrane microvalves is enabled by a novel dual-sided molding method for microstructuring monolithic 3D microfluidic networks in PDMS in a single step, eliminating the need for layer-to-layer alignment during bonding. We demonstrate minimum lateral device features down to 20-30 mu m in size, and vertical via density of similar to 30000 per cm(2), which provides significant gains in chip real estate compared to previously reported PDMS manufacturing methods. In contrast to horizontal membrane microvalves, there are no manufacturing restrictions on the cross-sectional geometry of the flow channel of the vertical membrane microvalves. This allows tuning the design towards lower closing pressure or lower open state flow resistance compared to those of horizontal membrane microvalves.

Place, publisher, year, edition, pages
Royal Society of Chemistry, 2016. Vol. 16, no 8, 1439-1446 p.
National Category
Chemical Sciences
Identifiers
URN: urn:nbn:se:kth:diva-186573DOI: 10.1039/c5lc01457cISI: 000374224900017PubMedID: 26983557OAI: oai:DiVA.org:kth-186573DiVA: diva2:927961
Note

QC 20160513

Available from: 2016-05-13 Created: 2016-05-13 Last updated: 2016-05-13Bibliographically approved

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Hansson, JonasHillmering, MikaelHaraldsson, Tommyvan der Wijngaart, Wouter
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