Heterogeneously Integrated InGaAs and Si Membrane Four-Color Photodetector Arrays
2016 (English)In: IEEE Photonics Journal, ISSN 1097-5764, E-ISSN 1943-0655, Vol. 8, no 2, 7445929Article in journal (Refereed) PublishedText
We report the design and fabrication of heterogeneously integrated silicon and InGaAs membrane photodetector arrays. Visible and near-infrared (NIR) detection can be achieved by transfer printing a silicon membrane on InGaAs substrate. Based on the penetration-depth-dependent absorption of different wavelengths, filter-free visible color detection can be obtained via three-junction photocurrent measurement for silicon, and NIR can be detected by InGaAs. The measurements show good agreement with the optical behavior predicted by the design and simulation.
Place, publisher, year, edition, pages
Institute of Electrical and Electronics Engineers (IEEE), 2016. Vol. 8, no 2, 7445929
Heterogeneous, imager, near-infrared (NIR), photodetector arrays, visible.
Other Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:kth:diva-187202DOI: 10.1109/JPHOT.2016.2544545ScopusID: 2-s2.0-84964339359OAI: oai:DiVA.org:kth-187202DiVA: diva2:929474
QC 201605182016-05-182016-05-182016-05-18Bibliographically approved