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Liquid-xenon-jet LPP source
KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.ORCID iD: 0000-0003-2723-6622
2006 (English)In: EUV Sources for Lithography, SPIE - International Society for Optical Engineering, 2006, 619-647 p.Chapter in book (Other academic)
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Place, publisher, year, edition, pages
SPIE - International Society for Optical Engineering, 2006. 619-647 p.
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Atom and Molecular Physics and Optics
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URN: urn:nbn:se:kth:diva-187618DOI: 10.1117/3.613774.Ch23Scopus ID: 2-s2.0-84960291158ISBN: 9780819480712 (print)OAI: oai:DiVA.org:kth-187618DiVA: diva2:930713
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QC 20160525

Available from: 2016-05-25 Created: 2016-05-25 Last updated: 2016-05-25Bibliographically approved

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CiteExportLink to record
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Citation style
  • apa
  • harvard1
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  • vancouver
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More styles
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