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Mechanical Gas Flow Sensors based on silicon micromachining
KTH, Superseded Departments, Signals, Sensors and Systems.
2003 (English)Doctoral thesis, comprehensive summary (Other scientific)
Place, publisher, year, edition, pages
Stockholm: Signaler, sensorer och system , 2003. , iv, 52 p.
Series
Trita-ILA, ISSN 0281-2878 ; 0309
Identifiers
URN: urn:nbn:se:kth:diva-3603ISBN: OAI: oai:DiVA.org:kth-3603DiVA: diva2:9432
Public defence
2003-09-26
Note
NR 20140805Available from: 2003-09-19 Created: 2003-09-19Bibliographically approved

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CiteExportLink to record
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  • apa
  • harvard1
  • ieee
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