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Mechanical Gas Flow Sensors based on silicon micromachining
KTH, Superseded Departments, Signals, Sensors and Systems.
2003 (English)Doctoral thesis, comprehensive summary (Other scientific)
Place, publisher, year, edition, pages
Stockholm: Signaler, sensorer och system , 2003. , iv, 52 p.
Trita-ILA, ISSN 0281-2878 ; 0309
URN: urn:nbn:se:kth:diva-3603ISBN: OAI: diva2:9432
Public defence
NR 20140805Available from: 2003-09-19 Created: 2003-09-19Bibliographically approved

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