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Surface-Micromachined Vertical-Cavity Micro-Opto-Electro-Mechanical Devices on InP
KTH, Superseded Departments, Microelectronics and Information Technology, IMIT.
2003 (English)Doctoral thesis, comprehensive summary (Other scientific)
Place, publisher, year, edition, pages
Kista: Mikroelektronik och informationsteknik , 2003. , 111 p.
Trita-HMA, ISSN 1404-0379 ; 2003:3
Keyword [en]
MOEMS, Optical MEMS, InP, GaInAsP, VCSEL, MOVPE, surface micromachining, tunable devices, vertical cavity devices, air-gap reflectors, III-V micromechanics
URN: urn:nbn:se:kth:diva-3633ISBN: 91-7283-603-2OAI: diva2:9465
Public defence
NR 20140805Available from: 2003-11-04 Created: 2003-11-04Bibliographically approved

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