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Two-dimensional designed fabrication of subwavelength grating HCG mirror on Silicon-on-insulator
KTH, School of Electrical Engineering (EES), Electromagnetic Engineering.
2016 (English)In: HIGH CONTRAST METASTRUCTURES V, SPIE - International Society for Optical Engineering, 2016, 97570CConference paper, Published paper (Refereed)
Abstract [en]

We designed and fabricated a two dimensional high contrast subwavelength grating (HCG) mirrors. The computer-aided software was employed to verify the structural parameters including grating periods and filling factors. From the optimized simulation results, the designed HCG structure has a wide reflection stopband (reflectivity (R) >90%) of over 200 nm, which centered at telecommunication wavelength. The optimized HCG mirrors were fabricated by electron-beam lithography and inductively coupled plasma process technique. The experimental result was almost consistent with calculated data. This achievement should have an impact on numerous photonic devices helpful attribution to the integrated HCG VCSELs in the future.

Place, publisher, year, edition, pages
SPIE - International Society for Optical Engineering, 2016. 97570C
Series
Proceedings of SPIE, ISSN 0277-786X ; 9757
Keyword [en]
subwavelength grating, HCG, silicon-on-insulator
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-192979DOI: 10.1117/12.2212390ISI: 000381698900005Scopus ID: 2-s2.0-84984963154ISBN: 978-1-62841-992-4 (print)OAI: oai:DiVA.org:kth-192979DiVA: diva2:974616
Conference
Conference on High Contrast Metastructures V, FEB 17-18, 2016, San Francisco, CA
Note

QC 20160927

Available from: 2016-09-27 Created: 2016-09-23 Last updated: 2016-09-27Bibliographically approved

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CiteExportLink to record
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Citation style
  • apa
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  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
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  • asciidoc
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