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  • 1.
    Bertilson, Michael C.
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Takman, Per A. C.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Vogt, Ulrich
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Hertz, Hans M.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Zone plate efficiency measurements with a laser-plasma source2007Inngår i: Advances in X-Ray/EUV Optics and Components II / [ed] Khounsary, AM; Morawe, C; Goto, S, 2007, Vol. 6705, s. F7050-F7050Konferansepaper (Fagfellevurdert)
    Abstract [en]

    We demonstrate a compact instrument for rapid and accurate measurements of the absolute and local efficiency of soft x-ray zone plates in the water window [M. Bertilson, et al, Rev. Sci. Instrum 78, 026103 (2007)]. The arrangement is based on a new single-line lambda = 2.88 nm liquid-nitrogen-jet laser-plasma source. The versatility of the instrument enables micro and condenser zone plates with focal lengths in the range from similar to 200 mu m to similar to 100 mm to be measured. We demonstrate an accurate local efficiency map of a in-house fabricated micro zone plate. Furthermore, we show how this compact instrument allows rapid feedback to the fabrication process which is important for future improvements.

  • 2.
    Bertilson, Michael
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    von Hofsten, Olof
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Vogt, Ulrich
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Experimentell biomolekylär fysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Hertz, Hans M.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    High-resolution computed tomography with a compact soft x-ray microscope2009Inngår i: Optics Express, ISSN 1094-4087, E-ISSN 1094-4087, Vol. 17, nr 13, s. 11057-11065Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    Computed tomography based on high-resolution soft x-ray microscopy utilizes the natural contrast for biological specimens provided by the water window (lambda = 2.4 - 4.4 nm) and the high resolving power of zone plate objectives. It is capable of revealing the 3D structure of biological specimens at sub-visible-microscopic resolution. To date, the technique has only been available at synchrotron-based microscopes, which limits the researchers access. In the present paper we demonstrate high-resolution soft x-ray tomography with a laboratory zone-plate-based soft x-ray microscope. The specimen, a diatom mounted on a glass capillary, was reconstructed from a tilt series of 53 images covering 180 using a filtered back projection algorithm. The resolution of the tomogram was estimated to a half period of 140 nm using a differential-phase-residual method. Cryo-fixation, increased source brightness and extended-depth-of-focus objectives are important for pushing the resolution of compact systems for biological samples.

  • 3.
    Bertilson, Michael
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    von Hofsten, Olov
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Thieme, J.
    Lindblom, Magnus
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Takman, Per
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Vogt, Ulrich
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Hertz, Hans
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    First application experiments with the Stockholm compact soft x-ray microscope2009Inngår i: Journal of Physics, Conference Series, ISSN 1742-6588, E-ISSN 1742-6596, Vol. 186Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    Most soft x-ray microscopes operating in the water window (lambda = 2.3 - 4.4 nm) rely on synchrotron radiation sources. In the future we believe scientists will use soft x-ray microscopes as one imaging tool among others in their own laboratory. For this purpose we have developed a full field soft x-ray microscope with a laser-plasma source compact enough to fit on an optical table. In this contribution we describe the current status of this microscope now featuring stable operation at lambda = 3.37 nm or lambda = 2.48 nm. In-house fabricated single element zone plates offering the possibility to perform phase contrast imaging have been implemented. We also report on the first application experiments for compact soft x-ray microscopy, including results from studies of clay minerals and colloids existing in nature and results from phase optics experiments. Planned upgrades of the microscope include increasing the source brightness, implementing more efficient condenser optics, and installing a cryo sample stage for tomography. These improvements will open up for further applications, especially in the field of biological imaging.

  • 4.
    Bertilson, Michael
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    von Hofsten, Olov
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Vogt, Ulrich
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Christakou, Athanasia E.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Hertz, Hans M.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Laboratory soft-x-ray microscope for cryotomography of biological specimens2011Inngår i: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 36, nr 14, s. 2728-2730Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    Soft-x-ray cryotomography allows quantitative and high-resolution three-dimensional imaging of intact unstained cells. To date, the method relies on synchrotron-radiation sources, which limits accessibility for researchers. Here we present a laboratory water-window microscope for cryotomography. It is based on a lambda = 2.48nm liquid-jet laser-plasma source, a normal-incidence multilayer condenser, a 30nm zone-plate objective, and a cryotilt sample holder. We demonstrate high-resolution imaging, as well as quantitative tomographic imaging, of frozen intact cells. The reconstructed tomogram of the intracellular local absorption coefficient shows details down to similar to 100nm.

  • 5.
    Bertilsson, Michael
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Takman, Per
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Vogt, Ulrich
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Hertz, Hans
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Laboratory arrangement for soft x-ray zone-plate efficiency measurements2007Inngår i: Review of Scientific Instruments, ISSN 0034-6748, E-ISSN 1089-7623, Vol. 78, nr 2, s. 026103-Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    We demonstrate a laboratory-scale arrangement for rapid and accurate measurements of the absolute and local efficiency of soft x-ray micro zone plates in the water window. This in-house instrument is based on a single-line lambda=2.88 nm liquid-jet laser-plasma source. Measurements are performed by a simultaneous comparison of first diffraction-order photon flux with the flux in a calibrated reference signal. This arrangement eliminates existing source emission fluctuations. The performance of the method is demonstrated by the result from measurements of two similar to 55 mu m diameter nickel micro zone plates, showing a groove efficiency of 12.9%+/- 1.1% and 11.7%+/- 1.0%. Furthermore, we show that spatially resolved efficiency mapping is an effective tool for a detailed characterization of local zone plate properties. Thus, this laboratory-scale instrument allows rapid feedback to the fabrication process which is important for future improvements.

  • 6.
    Chubarova, Elena
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Nilsson, Daniel
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Lindblom, Magnus
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Reinspach, Julia
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Birch, Jens
    Department of Physics, Chemistry, and Biology, Linköping University.
    Vogt, Ulrich
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Hertz, Hans M.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Platinum zone plates for hard X-ray applications2011Inngår i: Microelectronic Engineering, ISSN 0167-9317, E-ISSN 1873-5568, Vol. 88, nr 10, s. 3123-3126Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    We describe the fabrication and evaluation of platinum zone plates for 5–12 kV X-ray imaging and focusing. These nano-scale circular periodic structures are fabricated by filling an e-beam generated mold with Pt in an electroplating process. The plating recipe is described. The resulting zone plates, having outer zone widths of 100 and 50 nm, show good uniformity and high aspect ratio. Their diffraction efficiencies are 50–70% of the theoretical, as measured at the European Synchrotron Radiation Facility. Platinum shows promise to become an attractive alternative to present hard X-ray zone plate materials due to its nano-structuring properties and the potential for zone-plate operation at higher temperatures.

  • 7.
    Hertz, Hans
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Bertilson, Michael
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Chubarova, Elena
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    von Hofsten, Olof
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Lindblom, Magnus
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Reinspach, Julia
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Vogt, Ulrich
    Laboratory Water-Window X-Ray Microscopy2009Inngår i: 2009 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS: VOLS 1 AND 2, 2009, s. 48-48Konferansepaper (Fagfellevurdert)
    Abstract [en]

    We review recent progress in laboratory water-window microscopy including 250 W/0.8 ns/2 kHz laser-plasma liquid-jet sources, 13-nm zone width diffractive optics, diffractive optical elements for phase-contrast microscopy, <25-nm resolution microscopy using compound zone plates, tomography and applications in soil science.

  • 8.
    Hertz, Hans M.
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Bertilson, Michael C.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Chubarova, Elena
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Hemberg, Oscar
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Hofsten, Olov Von
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Lindblom, Magnus
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Lundström, Ulf
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Nilsson, Daniel
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Otendal, Mikael
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Reinspach, Julia
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Skoglund, Peter
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Takman, Per
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Tuohimaa, Tomi
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Vogt, Ulrich
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Laboratory X-ray micro- and nano-imaging2009Inngår i: Frontiers in Optics (FiO) 2009, Optical Society of America, 2009Konferansepaper (Fagfellevurdert)
    Abstract [en]

    We summarize recent progress in laboratory x-ray imaging systems based on compact high-brightness liquid-jet sources, including <25 nm soft x-ray zone-plate microscopy and <10 μm (lens-free) hard x-ray phase-contrast imaging.

  • 9.
    Hertz, Hans M.
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Bertilson, Michael
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Chubarova, Elena
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Ewald, Johannes
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Gleber, S-C
    Hemberg, Oscar
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Henriksson, M.
    von Hofsten, Olov
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Lindblom, Magnus
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Mudry, Emeric
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Otendal, Mikael
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Reinspach, Julia
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Schlie, Moritz Gustav
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Skoglund, Peter
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Takman, Per
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Thieme, J.
    Sedlmair, J.
    Tjörnhammar, Richard
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Tuohimaa, Tomi
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Vita, M.
    Vogt, Ulrich
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Laboratory x-ray micro imaging: Sources, optics, systems and applications2009Inngår i: Journal of Physics, Conference Series, ISSN 1742-6588, E-ISSN 1742-6596, Vol. 186Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    We summarize the recent progress in laboratory-scale soft and hard x-ray micro imaging in Stockholm. Our soft x-ray work is based on liquid-jet laser-plasma sources which are combined with diffractive and multilayer optics to form laboratory x-ray microscopes. In the hard x-ray regime the imaging is based on a liquid-metal-jet electron-impact source which provides the necessary coherence to allow phase-contrast imaging with high fidelity.

  • 10.
    Hertz, Hans M.
    et al.
    KTH, Tidigare Institutioner                               , Fysik.
    Johansson, G. A.
    Stollberg, H.
    de Groot, J.
    Hemberg, O.
    Holmberg, Anders
    Rehbein, S.
    Jansson, P.
    Eriksson, F.
    Birch, J.
    Table-top X-ray microscopy: Sources, optics and applications2003Inngår i: Journal de Physique IV: Colloque, ISSN 1155-4339, E-ISSN 1764-7177, Vol. 104, s. 115-119Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    We have developed the first operative compact sub-visible-resolution x-ray microscope for the water-window region (lambda = 2.3 - 4.4 nm). The microscope is based on a 100 Hz liquid-jet-target laser-plasma x-ray source, normal-incidence multilayer condenser optics, diffractive zone plate optics and CCD detection. In the present article we emphasize the system's aspects and summarize the recent progress on the components, all aiming at the reduction of the exposure time of a few seconds, i.e., similar to bending-magnet based microscopes. This primarily includes improved laser-plasma source, improved condenser optics using Cr/Sc multilayers, and improved image handling capability using wavelet algorithms. Such compact short-exposure time microscopes would significantly increase the applicability of the technology.

  • 11.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Nanofabrication of Zone Plate Optics for Compact Soft X-Ray Microscopy2006Doktoravhandling, med artikler (Annet vitenskapelig)
    Abstract [en]

    This Thesis describes the development of the KTH/Stockholm nanofabrication process for diffractive soft x-ray optics. The effort is motivated by the need for and requirement of specially designed diffractive optics and test objects for compact x-ray microscopy as well as optics for other applications such as phase imaging. The optics have been fabricated in-house, in the KTH Nanofabrication Laboratory.

    The nanofabrication process is based on electron-beam lithography in combination with reactive ion etching (RIE) and nickel electroplating. This process has successfully been used for the fabrication of micro zone plates, condenser zone plates, diffractive optical elements for differential-interference microscopy, and different test structures. Optics with electroplated feature sizes down to 25 nm have been fabricated with high aspect-ratios. Special consideration has been given the reproducibility and optimization of the process parameters. This is essential for improving the yield and quality of the fabricated optics. The work includes, e.g., improved e-beam writing strategies and controlled electroplating. Furthermore, a high diffraction efficiency is necessary for our applications, which are based on compact low-power sources. This requires the fabrication of optics with a high and uniform aspect ratio. For this purpose the electroplating process step has been improved with an in-situ light-transmission-based thickness control method for optimum mold filling, and pulse and pulse-reverse techniques for uniform plating.

  • 12.
    Holmberg, Anders
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Lindblom, M
    Rehbein, Stefan
    Hertz,, H. M.
    Nickel Zone Plates for Compact Soft X-Ray Microscopy2006Inngår i: Proc. 8th Internat. Conference on X-Ray Microscopy, 2006Konferansepaper (Annet vitenskapelig)
  • 13.
    Holmberg, Anders
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Lindblom, Magnus
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Hertz, Hans M.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Controlled electroplating for high-aspect-ratio zone plate fabrication2006Inngår i: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 24, nr 6, s. 2592-2596Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    The authors report a method for monitoring, control, and end-point detection of electroplating in nanostructures. The method is demonstrated on nickel plating into polymer molds, which is an important process in the fabrication of soft x-ray zone-plate diffractive optics. The lack of reproducibility presently limits the achievable nickel aspect ratio and, thus, reduces the zone-plate diffraction efficiency. The reported method provides reproducible plating via real-time control of the plating rate. It combines in situ light transmission measurements with current measurements to determine the thickness of the growing layer. The accuracy of the thickness prediction was better than ±4% (1) for 100–300  nm nickel layers. Furthermore, a slight change in the light transmission signal indicates when a gratinglike zone-plate structure is slightly overplated and the plating should be stopped. This end-point detection provides the optimal filling of high-aspect-ratio molds for improved diffraction efficiency.

  • 14.
    Holmberg, Anders
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Lindblom, Magnus
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Reinspach, Julia
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Bertilson, Michael
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Hertz, Hans M.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Soft x-ray zone plate fabrication at KTH, Stockholm2009Inngår i: Journal of Physics, Conference Series, ISSN 1742-6588, E-ISSN 1742-6596, Vol. 186Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    We present the status of our zone plate and test object fabrication processes along with the latest fabricated components. With our nickel process, zone plates with outermost zone width of 20 nm and zone height of 90 nm have been fabricated. A gold electroplating process has recently been introduced for the fabrication of test objects. The first result for gold gratings with 70 nm period and 135 nm height is shown.

  • 15.
    Holmberg, Anders
    et al.
    KTH, Tidigare Institutioner, Fysik.
    Rehbein, Stefan
    KTH, Tidigare Institutioner, Fysik.
    Hertz, Hans M.
    KTH, Tidigare Institutioner, Fysik.
    Nano-fabrication of condenser and micro zone plates for compact X-ray microscopy2004Inngår i: Microelectronic Engineering, ISSN 0167-9317, E-ISSN 1873-5568, Vol. 73/74, s. 639-643Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    We demonstrate nano-fabrication of high-aspect ratio and high-spatial frequency diffractive X-ray optics with high uniformity for use in a laser-plasma-based compact water-window X-ray microscope. The structures are fabricated on 50 nm thin Si3N4-membranes using a three-layer resist scheme and 30 keV e-beam lithography in combination with reactive ion etching and nickel electroplating. The process is developed on solely commercially available resists and instruments. As examples, we demonstrate fabrication of micro-zone plates with outermost linewidths of 30 nm and an uniform zone height of 160 nm, and a 4.5 mm diameter condenser zone plate with 50-60 nm lines, fabricated by using stitched fields.

  • 16.
    Jansson, Per
    et al.
    KTH, Tidigare Institutioner, Fysik.
    Hansson, B. A. M.
    KTH, Tidigare Institutioner, Fysik.
    Hemberg, Oscar
    KTH, Tidigare Institutioner, Fysik.
    Otendal, Mikael
    KTH, Tidigare Institutioner, Fysik.
    Holmberg, Anders
    KTH, Tidigare Institutioner, Fysik.
    De Groot, Jaco
    KTH, Tidigare Institutioner, Fysik.
    Hertz, Hans
    KTH, Tidigare Institutioner, Fysik.
    Liquid-tin-jet laser-plasma extreme ultraviolet generation2004Inngår i: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Vol. 84, nr 13, s. 2556-2258Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    We demonstrate the applicability of liquid-metal jets in vacuum as regenerative targets for laser-plasma generation of extreme ultraviolet (EUV) and soft x-ray radiation. This extends the operation of liquid jet laser-plasma,sources to high-temperature, high-Z, high-density, low-vapor-pressure materials with new spectral signatures. The system is demonstrated using tin (Sn) as the target due to its strong emission around lambdaapproximate to13 nm, which makes the material suitable for EUV lithography. We show a conversion efficiency of 2.5% into (2% BW x 2pi x sr) and report quantitative measurements of the ionic/atomic as well as particulate debris emission.

  • 17. Johansson, G. A.
    et al.
    Holmberg, Anders
    KTH, Tidigare Institutioner                               , Fysik.
    Hertz, H. M.
    Berglund, M
    Design and performance of a laser-plasma based compact soft x-ray microscope2002Inngår i: Review of Scientific Instruments, ISSN 0034-6748, E-ISSN 1089-7623, Vol. 73, nr 3, s. 1193-1197Artikkel i tidsskrift (Fagfellevurdert)
  • 18.
    Lindblom, Magnus
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Hertz, Hans M.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Pulse reverse electroplating for uniform nickel height in zone plates2006Inngår i: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 24, s. 2848-Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    Nickelsoft x-ray zone plates are fabricated by through-mask electroplating. Theauthors report on how a uniform nickel thickness can beobtained over the entire zone plate using pulse and pulsereverse plating. If the plating is carried out at aconstant current the nickel thickness has been observed to decreasewith radius. This results in lower outer zones and reduceddiffraction efficiency in the outer parts of the zone plates.Here they show that the height profile can be controlledby adjusting the current density of the pulses. A highcurrent density is found to primarily affect the edges whilea low current density was observed to affect the centralparts of the structures. This is true for both cathodicand anodic currents, which means that local plating and dissolutionrates can be adjusted to obtain a uniform mass distribution.

  • 19.
    Lindblom, Magnus
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Hertz, Hans M.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    SU8 plating mold for high aspect-ratio nickel zone plates2007Inngår i: Microelectronic Engineering, ISSN 0167-9317, E-ISSN 1873-5568, Vol. 84, s. 1136-Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    Nickel zone plates are fabricated by electrodeposition into a mold with high aspect ratio and narrow line width. This process requires high-mechanical stability of the mold to avoid pattern collapse in the plating bath. In the present paper we demonstrate how SU-8 can be used as plating mold material in a tri-layer resist to fabricate 35-nm half-pitch nickel gratings with an aspect ratio exceeding 11:1. To attain sufficient stability of the mold the SU-8 was cured by e-beam exposure with a dose of 25 mC/cm2 at 5-keV electron energy.

  • 20.
    Lindblom, Magnus
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Reinspach, Julia
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Bertilson, Michael
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    von Hofsten, Olov
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Hertz, Hans
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Nickel-germanium soft x-ray zone plates2009Inngår i: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 27, nr 3, s. L5-L7Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    This article presents a fabrication process for soft x-ray zone plates in which nickel and germanium are combined to achieve high diffraction efficiency. A nickel zone plate is first fabricated on a germanium film and then used as a hardmask for a CHF3-plasma etch into the germanium. Zone plates with 50-60 nm nickel and 110-150 nm of germanium are presented. The measured diffraction efficiencies were 10%-11% at lambda=2.88 nm, which shows that high efficiency is possible even with thin nickel. Thus, the method has a potential for improving the efficiency of high-resolution zone plates for which the high-aspect-ratio structuring of nickel is difficult.

  • 21.
    Lindblom, Magnus
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Reinspach, Julia
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    von Hofsten, Olov
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Bertilson, Michael
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Hertz, Hans M.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik.
    High-aspect-ratio germanium zone plates fabricated by ractive ion etching in chlorine2009Inngår i: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 27, nr 2, s. L1-L3Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    This article describes the fabrication of soft x-ray germanium zone plates with a process based on reactive ion etching (RIE) in Cl-2. A high degree of anisotropy is achieved by sidewall passivation through cyclic exposure to air. This enables structuring of higher aspect ratios than with earlier reported fabrication processes for germanium zone plates. The results include a zone plate with a 30 nm outermost zone width and a germanium thickness of 310 tun having a first-order diffraction efficiency of 70% of the theoretical value. 25 nm half-pitch gratings were also etched into 310 nut of germanium. Compared to the electroplating process for the commonly used nickel zone plates, the RIE process with Cl-2, for germanium is a major improvement in terms of process reproducibility.

  • 22.
    Lindblom, Magnus
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Tuohimaa, Tomi
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Wilhein, Thomas
    Hertz, Hans M.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Vogt, Ulrich
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    High-resolution differential-interference-contrast x-ray zone plates: Design and Fabrication2007Inngår i: Spectrochimica Acta Part B - Atomic Spectroscopy, ISSN 0584-8547, E-ISSN 1873-3565, Vol. 62, nr 6-7, s. 539-543Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    Differential interference contrast is a potentially powerful technique for contrast enhancement in soft X-ray microscopy. We describe the design and fabrication of single-element diffractive optical elements suitable as objectives for high-resolution differential interference contrast microscopy in the water-window spectral range. A one-dimensional pattern calculation followed by an extension to two dimensions results in a pattern resolution of 1 nm, which is well below fabrication accuracy. The same fabrication process as for normal zone plates is applicable, but special care must be taken when converting the calculated pattern to a code for e-beam lithography.

  • 23.
    Lundqvist, Magnus
    et al.
    KTH, Skolan för bioteknologi (BIO), Proteomik och nanobioteknologi.
    Edfors, Fredrik
    KTH, Skolan för bioteknologi (BIO), Proteomik och nanobioteknologi.
    Sivertsson, Åsa
    KTH, Skolan för bioteknologi (BIO), Proteomik och nanobioteknologi.
    Hallström, Björn M
    KTH, Skolan för bioteknologi (BIO), Proteomik och nanobioteknologi.
    Hudson, Elton P.
    KTH, Skolan för bioteknologi (BIO), Proteomik och nanobioteknologi. KTH, Centra, Science for Life Laboratory, SciLifeLab.
    Tegel, Hanna
    KTH, Skolan för bioteknologi (BIO), Proteomik och nanobioteknologi.
    Holmberg, Anders
    Uhlén, Mathias
    KTH, Skolan för bioteknologi (BIO), Proteomik och nanobioteknologi. KTH, Centra, Science for Life Laboratory, SciLifeLab.
    Rockberg, Johan
    KTH, Skolan för bioteknologi (BIO), Proteomik och nanobioteknologi.
    Solid-phase cloning for high-throughput assembly of single and multiple DNA parts2015Inngår i: Nucleic Acids Research, ISSN 0305-1048, E-ISSN 1362-4962, Vol. 43, nr 7, artikkel-id e49Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    We describe solid-phase cloning (SPC) for high-throughput assembly of expression plasmids. Our method allows PCR products to be put directly into a liquid handler for capture and purification using paramagnetic streptavidin beads and conversion into constructs by subsequent cloning reactions. We present a robust automated protocol for restriction enzyme based SPC and its performance for the cloning of >60 000 unique human gene fragments into expression vectors. In addition, we report on SPC-based single-strand assembly for applications where exact control of the sequence between fragments is needed or where multiple inserts are to be assembled. In this approach, the solid support allows for head-to-tail assembly of DNA fragments based on hybridization and polymerase fill-in. The usefulness of head-to-tail SPC was demonstrated by assembly of >150 constructs with up to four DNA parts at an average success rate above 80%. We report on several applications for SPC and we suggest it to be particularly suitable for high-throughput efforts using laboratory workstations.

  • 24.
    Martz, Dale H.
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Selin, Mårten
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    von Hofsten, Olov
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Fogelqvist, Emelie
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Vogt, Ulrich
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Legall, H.
    Blobel, G.
    Seim, C.
    Stiel, H.
    Hertz, Hans M.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    High average brightness water window source for short-exposure cryomicroscopy2012Inngår i: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 37, nr 21, s. 4425-4427Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    Laboratory water window cryomicroscopy has recently demonstrated similar image quality as synchrotron-based microscopy but still with much longer exposure times, prohibiting the spread to a wider scientific community. Here we demonstrate high-resolution laboratory water window imaging of cryofrozen cells with 10 s range exposure times. The major improvement is the operation of a lambda = 2.48 nm, 2 kHz liquid nitrogen jet laser plasma source with high spatial and temporal stability at high average brightness >1.5 x 10(12) ph/(s x sr x mu m(2) x line), i.e., close to that of early synchrotrons. Thus, this source enables not only biological x-ray microscopy in the home laboratory but potentially other applications previously only accessible at synchrotron facilities.

  • 25.
    Mi, Wujun
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Fysik, Medicinsk bildfysik.
    Karlsson, Staffan
    KTH, Skolan för teknikvetenskap (SCI), Fysik, Medicinsk bildfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Danielsson, Mats
    KTH, Skolan för teknikvetenskap (SCI), Fysik, Medicinsk bildfysik.
    Nillius, Peter
    KTH, Skolan för teknikvetenskap (SCI), Fysik, Medicinsk bildfysik.
    Fabrication of circular sawtooth gratings using focused UV lithography2016Inngår i: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 26, nr 3, artikkel-id 035001Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    AbstractThis paper presents a novel micro-fabrication method using focused ultraviolet (UV) light to manufacture three-dimensional sawtooth structures in ultra-thick negative photoresist to fabricate a novel multi-prism x-ray lens. The method uses a lens to shape the UV beam instead of the photomask conventionally used in UV lithography. Benefits of this method include the ability to manufacture sawtooth structures in free form, for example in circular shapes as well as arrays of these shapes, and in resist that is up to 76 μm thick.To verify the method, initially a simple simulation based on Fourier optics was done to predict the exposure energy distribution in the photoresist. Furthermore, circular sawtooth gratings were manufactured in a 76 μm SU-8 resist. The UV lens was fabricated using electron beam lithography and then used to expose the SU-8 with UV light. This paper details the complete developed process, including pre-exposure with an e-beam and cold development, which creates stable sawtooth structures. The measured profile was compared to the ideal sawtooth and the simulation. The main discrepancy was in the smallest feature size, the sawtooth tips, which were wider than the desired structures, as would be expected by simulation.

  • 26. Nachtrab, F.
    et al.
    Firsching, M.
    Speier, C.
    Uhlmann, N.
    Takman, P.
    Tuohimaa, T.
    Heinzl, C.
    Kastner, J.
    Larsson, Daniel
    KTH, Skolan för teknik och hälsa (STH), Medicinsk teknik, Medicinsk bildteknik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Berti, G.
    Krumm, M.
    Sauerwein, C.
    NanoXCT: Development of a laboratory nano-CT system2014Inngår i: Proceedings of SPIE - The International Society for Optical Engineering, 2014Konferansepaper (Fagfellevurdert)
    Abstract [en]

    The NanoXCT project aims at developing a laboratory nano-CT system for non-destructive testing applications in the micro- and nano-technology sector. The system concept omits the use of X-ray optics, to be able to provide up to 1 mm FOV (at 285 nm voxel size) and down to 50 nm voxel size (at 0.175 mm FOV) while preserving the flexibility of state-of-the-art micro-CT systems. Within the project a suitable X-ray source, detector and manipulation system are being developed. To cover the demand for elemental analysis, the project will additionally include X-ray spectroscopic techniques. These will be reported elsewhere while this paper is focused on the imaging part of the project. We introduce the system concept including design goals and constraints, and the individual components. We present the current state of the prototype development including first results.

  • 27. Nachtrab, F.
    et al.
    Hofmann, T.
    Speier, C.
    Lucic, J.
    Firsching, M.
    Uhlmann, N.
    Takman, P.
    Heinzl, C.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Krumm, M.
    Sauerwein, C.
    Development of a Timepix based detector for the NanoXCT project2015Inngår i: Journal of Instrumentation, ISSN 1748-0221, E-ISSN 1748-0221, Vol. 10, artikkel-id C11009Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    The NanoXCT EU FP7 project [1] aims at developing a laboratory, i.e. bench top sized X-ray nano-CT system with a large field-of-view (FOV) for non-destructive testing needs in the micro- and nano-technology sector. The targeted voxel size is 50 nm at 0.175 mm FOV, the maximum FOV is 1 mm at 285 nm voxel size. Within the project a suitable X-ray source, detector and manipulation system have been developed. The system concept [2] omits the use of X-ray optics, to be able to provide a large FOV of up to 1 mm and to preserve the flexibility of state-of-the-art micro-CT systems. The targeted resolution will be reached via direct geometric magnification made possible by the development of a specialized high-flux nano-focus transmission X-ray tube. The end-user's demand for elemental analysis will be covered by energy-resolved measurement techniques, in particular a K-edge imaging method. Timepix [3] modules were chosen as the basis for the detector system, since a photon counting detector is advantageous for the long exposure times that come with very small focal spot sizes. Additional advantages are the small pixel size and adjustable energy threshold. To fulfill the requirements on field-of-view, a detector width > 3000 pixels was needed. The NanoXCT detector consists of four Hexa modules with 500 mu m silicon sensors supplied by X-ray Imaging Europe. An adapter board was developed to connect all four modules to one Fitpix3 readout. The final detector has an active area of 3072 x 512 pixels or approximately 17 x 3 cm(2). In this contribution we present the development of the Timepix based NanoXCT detector, it's application in the NanoXCT project for CT and material specific measurements and the current status of results.

  • 28.
    Nilsson, Daniel
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Anders, Holmberg
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Sinn, H.
    Vogt, Ulrich
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Computer simulation of heat transfer in zone plate optics exposed to X-ray FEL radiation2011Inngår i: Proceedings of SPIE, the International Society for Optical Engineering, ISSN 0277-786X, E-ISSN 1996-756X, Vol. 8077Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    Zone plates are circular diffraction gratings that can provide diffraction-limited nano-focusing of x-ray radiation. When designing zone plates for X-ray Free Electron Laser (XFEL) sources special attention has to be made concerning the high intensity of the sources. Absorption of x-rays in the zone material can lead to significant temperature increases in a single pulse and potentially destroy the zone plate. The zone plate might also be damaged as a result of temperature build up and/or temperature fluctuations on longer time scales. In this work we simulate the heat transfer in a zone plate on a substrate as it is exposed to XFEL radiation. This is done in a Finite Element Method model where each new x-ray pulse is treated as an instantaneous heat source and the temperature evolution between pulses is calculated by solving the heat equation. We use this model to simulate different zone plate and substrate designs and source parameters. Results for both the 8 keV source at LCLS and the 12.4 keV source at the European XFEL are presented. We simulate zone plates made of high Z metals such as gold, tungsten and iridium as well as zone plates made of low Z materials such as diamond. In the case of metal zone plates we investigate the influence of substrate material by comparing silicon and diamond substrates. We also study the effect of different cooling temperatures and cooling schemes. The results give valuable indications on the temperature behavior to expect and can serve as a basis for future experimental investigations of zone plates exposed to XFEL radiation.

  • 29.
    Nilsson, Daniel
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Sinn, H.
    Vogt, Ulrich
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Simulation of heat transfer in zone plate optics irradiated by X-ray free electron laser radiation2010Inngår i: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, ISSN 0168-9002, E-ISSN 1872-9576, Vol. 621, nr 1-3, s. 620-626Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    Zone plates are high quality optics that have the potential to provide diffraction-limited nano-focusing of hard X-ray free electron laser radiation. The present publication investigates theoretically the temperature behavior of metal zone plates on a diamond substrate irradiated by 0.1 nm X-rays from the European X-ray Free Electron Laser. The heat transfer in the optic is simulated by solving the transient heat equation with the finite element method. Two different zone plate designs are considered, one small zone plate placed in the direct beam and one larger zone plate after the monochromator. The main result is that for all investigated cases the maximum temperature in the metal zone plate layer is at least a factor 2 below the melting point of the respective material, proving the efficiency of the proposed cooling scheme. However, zone plates in the direct beam experience large and rapid temperature fluctuations of several hundred Kelvin that might prove fatal to the optic. The situation is different for optics behind the monochromator with fluctuations in the 20 K range and maximum temperatures well below room temperature. The simulation results give valuable indications on the temperature behavior to be expected and are a basis for future experimental heat transfer and mechanical stability investigations of fabricated nanostructures.

  • 30.
    Nilsson, Daniel
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Sinn, H.
    Vogt, Ulrich
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Zone Plates for Hard X-Ray FEL Radiation2011Inngår i: 10TH INTERNATIONAL CONFERENCE ON X-RAY MICROSCOPY / [ed] McNulty, I; Eyberger, C; Lai, B, American Institute of Physics (AIP), 2011, Vol. 1365, s. 120-123Konferansepaper (Fagfellevurdert)
    Abstract [en]

    We investigated theoretically the use of zone plates for the focusing of the European X-ray Free Electron Laser (XFEL). In a finite-element simulation the heat load on zone plates placed in the high intensity x-ray beam was simulated for four different zone plate materials: gold, iridium, tungsten, and CVD diamond. The main result of the calculations is that all zone plates remain below the melting temperature throughout a full XFEL pulse train of 3000 pulses. However, if the zone plate is placed in the direct beam it will experience large and rapid temperature fluctuations on the order of 300 K. The situation is relaxed if the optic is placed behind a monochromator and the fluctuations are reduced to around 20 K. Besides heat load, the maximization of the total efficiency of the complete optical system is an important issue. We calculated the efficiency of different zone plates and monochromator systems and found that the final beam size of the XFEL in combination with its monochromaticity will be important parameters.

  • 31.
    Nilsson, Daniel
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Uhlén, Fredrik
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Hertz, Hans M.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Schropp, A.
    Patommel, J.
    Hoppe, R.
    Seiboth, F.
    Meier, V.
    Schroer, C. G.
    Galtier, E.
    Nagler, B.
    Lee, H. J.
    Vogt, Ulrich
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Ronchi test for characterization of nanofocusing optics at a hard x-ray free-electron laser2012Inngår i: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 37, nr 24, s. 5046-5048Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    We demonstrate the use of the classical Ronchi test to characterize aberrations in focusing optics at a hard x-ray free-electron laser. A grating is placed close to the focus and the interference between the different orders after the grating is observed in the far field. Any aberrations in the beam or the optics will distort the interference fringes. The methodis simple to implement and can provide single-shot information about the focusing quality. We used the Ronchi test to measure the aberrations in a nanofocusing Fresnel zone plate at the Linac Coherent Light Source at 8.194 keV.

  • 32.
    Nilsson, Daniel
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Uhlén, Fredrik
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Reinspach, Julia
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Hertz, Hans M.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Sinn, H.
    Vogt, Ulrich
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Thermal stability of tungsten zone plates for focusing hard x-ray free-electron laser radiation2012Inngår i: New Journal of Physics, ISSN 1367-2630, E-ISSN 1367-2630, Vol. 14, s. 043010-Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    Diffractive Fresnel zone plates made of tungsten show great promise for focusing hard x-ray free-electron laser (XFEL) radiation to very small spot sizes. However, they have to withstand the high-intensity pulses of the beam without being damaged. This might be problematic since each XFEL pulse will create a significant temperature increase in the zone plate nanostructures and it is therefore crucial that the optics are thermally stable, even for a large number of pulses. Here we have studied the thermal stability of tungsten zone-platelike nanostructures on diamond substrates using a pulsed Nd:YAG laser which creates temperature profiles similar to those expected from XFEL pulses. We found that the structures remained intact up to a laser fluence of 100 mJ cm(-2), corresponding to a 6 keV x-ray fluence of 590 mJ cm-2, which is above typical fluence levels in an unfocused XFEL beam. We have also performed an initial damage experiment at the LCLS hard XFEL facility at SLAC National Accelerator Laboratory, where a tungsten zone plate on a diamond substrate was exposed to 105 pulses of 6 keV x-rays with a pulse fluence of 350 mJ cm-2 without any damage occurring.

  • 33.
    Rehbein, Stefan
    et al.
    KTH, Tidigare Institutioner, Fysik.
    Holmberg, Anders
    KTH, Tidigare Institutioner, Fysik.
    Johansson, Göran A.
    KTH, Tidigare Institutioner, Fysik.
    Jansson, Per
    KTH, Tidigare Institutioner, Fysik.
    Hertz, Hans
    KTH, Tidigare Institutioner, Fysik.
    Fabrication and characterization of a condenser zone plate for compact x-ray microscopy2004Inngår i: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 22, nr 3, s. 1118-1122Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    We describe the in-house fabrication and characterization of a condenser zone plate for a compact laser-plasma-based soft x-ray microscope operating at 2.478 nm wavelength. The fabricated condenser has a diameter of 4.53 mm and an outermost zone width of 49 nm. The pattern is generated by a small-write-field e-beam lithography system and 656 single, 100 mum wide write fields are stitched together to obtain the whole pattern. An in-house method based on a laser-plasma source was developed to characterize the condenser zone plate with regards to diffraction efficiency and imaging properties. The measured groove efficiency of the fabricated condenser zone plate was determined to 11%+/-2% and the imaging properties were found to follow the expectations concerning the object field illumination purpose in the x-ray microscope. The in-house characterization method allows faster process improvement in the small-scale laboratory compared to presently used synchrotron-based methods.

  • 34.
    Reinspach, Julia
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Lindblom, Magnus
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Bertilson, Michael
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    von Hofsten, Olov
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Hertz, Hans M.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    13 nm high-efficiency nickel-germanium soft x-ray zone plates2011Inngår i: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 29, nr 1, s. 011012-Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    Zone plates are used as objectives for high-resolution x-ray microscopy. Both high resolution and high diffraction efficiency are crucial parameters for the performance of the lens. In this article, the authors demonstrate the fabrication of high-resolution soft x-ray zone plates with improved diffraction efficiency by combining a nanofabrication process for high resolution with a process for high diffraction efficiency. High-resolution Ni zone plates are fabricated by applying cold development of electron-beam-patterned ZEP 7000 in a trilayer-resist process combined with Ni-electroplating. High-diffraction-efficiency Ni-Ge zone plates are realized by fabricating the Ni zone plate on a Ge film and then using the finished zone plate as etch mask for anisotropic CHF3 reactive ion etching into the underlying Ge, resulting in a Ni-Ge zone plate with improved aspect ratio and zone plate efficiency. Ni-Ge zone plates with 13 nm outermost zone width composed of 35 nm Ni on top of 45 nm Ge were fabricated. For comparable Ni and Ni-Ge zone plates with an outermost zone width of 15 nm, the diffraction efficiency was measured to be 2.4% and 4.3%, respectively, i.e., an enhancement of a factor of 2.

  • 35.
    Reinspach, Julia
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Lindblom, Magnus
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    von Hofsten, Olof
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Bertilson, Michael
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Hertz, Hans M.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Process development for improved soft X-ray zone plates2010Inngår i: Microelectronic Engineering, ISSN 0167-9317, E-ISSN 1873-5568, Vol. 87, nr 5-8, s. 1583-1586Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    We demonstrate two nanofabrication methods which improve the diffraction efficiency of high-resolution soft X-ray nickel zone plates. First, pulse electroplating is shown to result in uniform diffraction efficiency over the entire zone-plate area. A resulting enhancement of the total efficiency of 20% compared to conventional DC plating was measured. Second, we demonstrate that a high-resolution cold development process can be combined with efficiency-enhancing dry etching into an underlying germanium film. We present 16 nm half-pitch gratings composed of 50 nm nickel on top of 50 nm germanium.

  • 36.
    Reinspach, Julia
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Lindblom, Magnus
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    von Hofsten, Olov
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Bertilson, Michael
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Hertz, Hans M.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Cold-developed electron-beam-patterned ZEP 7000 for fabrication of 13 nm nickel zone plates2009Inngår i: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 27, nr 6, s. 2593-2596Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    Cold development was applied to improve the resolution in a trilayer resist that is used for the fabrication of state-of-the-art soft x-ray microscopy zone plates. By decreasing the temperature of the hexyl acetate developer to -50 degrees C, 11 nm half-pitch gratings have been resolved in the electron-beam resist ZEP 7000. 12 nm half-pitch gratings have been successfully transferred, via the intermediate SiO2 hardmask, into the bottom polyimide layer by CHF3 and O-2 reactive ion etching. The trilayer resist, including optimized cold development, has finally been used in an electroplating-based process for the fabrication of nickel zone plates. Zone plates with down to 13 nm outermost zone width have been fabricated and 2.4% average groove diffraction efficiency has been measured for zone plates with 15 nm outermost zone width and a nickel height of 55 nm.

  • 37.
    Reinspach, Julia
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Uhlén, Fredrik
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Hertz, Hans M.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Twelve nanometer half-pitch W–Cr–HSQ trilayer process for soft x-ray tungsten zone plates2011Inngår i: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 29, nr 6, s. 06FG02-1-06FG02-4Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    The authors describe a new W–Cr–HSQ trilayer nanofabrication process for high-resolution and high-diffraction-efficiency soft x-ray W zone-plate lenses. High-resolution HSQ gratings were first fabricated by electron-beam lithography and high-contrast development in a NaCl/NaOH solution. The HSQ pattern was then transferred to the Cr layer by RIE with Cl2/O2, and subsequently to the W layer by cryogenic RIE with SF6/O2. The anisotropy of the W etch as a function of substrate temperature was investigated, and the best etch profile was achieved at −50 °C. Using this optimized process, W gratings with half-pitches down to 12 nm and a height of 90 nm were fabricated. For a zone plate with corresponding parameters, this would result in a theoretical diffraction efficiency of 9.6% (at λ = 2.48 nm), twice as high as has been reported previously.

  • 38.
    Savolainen, Peter
    et al.
    KTH, Tidigare Institutioner                               , Biokemi och biokemisk teknologi.
    Rosen, B
    Holmberg, Anders
    KTH, Tidigare Institutioner                               , Biokemi och biokemisk teknologi.
    Leitner, T
    Uhlen, Mathias
    Lundeberg, Joachim
    Sequence analysis of domestic dog mitochondrial DNA for forensic use1997Inngår i: Journal of Forensic Sciences, ISSN 0022-1198, E-ISSN 1556-4029, Vol. 42, nr 4, s. 593-600Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    A method has been developed for the direct sequencing of hypervariable region 1 (HV1) of domestic dog (Canis familiaris) and wolf (Canis lupus) mitochondrial DNA (mtDNA) using single hairs as template. The method uses a robotic work-station and an automated sequencer to allow for robust routine analysis. A population data base was created in order to investigate the forensic and population-genetic informativeness of domestic dog HV1. Sequence variation, partitioning of dog breeds among sequence variants and phylogenetic relations between the variants were determined. Samples from 102 domestic dogs of 52 different breeds and two captive wolves were analyzed. Nineteen dog sequence variants were found and the frequencies of the variants ranged from 1 to 21%. The calculated discrimination power of the region, i.e., the exclusion capacity, implied that nine out of ten disputed individuals can be excluded by this analysis. The sequence variants were found to cluster into four phylogenetic groups.

  • 39.
    Selin, Mårten
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Fogelqvist, Emelie
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Guttmann, Peter
    Vogt, Ulrich
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Hertz, Hans M.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    3D simulation of the image formation in soft x-ray microscopes2014Inngår i: Optics Express, ISSN 1094-4087, E-ISSN 1094-4087, Vol. 22, nr 25, s. 30756-30768Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    In water-window soft x-ray microscopy the studied object is typically larger than the depth of focus and the sample illumination is often partially coherent. This blurs out-of-focus features and may introduce considerable fringing. Understanding the influence of these phenomena on the image formation is therefore important when interpreting experimental data. Here we present a wave-propagation model operating in 3D for simulating the image formation of thick objects in partially coherent soft x-ray microscopes. The model is compared with present simulation methods as well as with experiments. The results show that our model predicts the image formation of transmission soft x-ray microscopes more accurately than previous models.

  • 40.
    Sterky, Fredrik
    et al.
    KTH, Tidigare Institutioner                               , Bioteknologi.
    Holmberg, Anders
    Alexandersson, G
    Lundeberg, Joakim
    KTH, Tidigare Institutioner                               , Bioteknologi.
    Uhlen, Mathias
    KTH, Tidigare Institutioner                               , Bioteknologi.
    Direct sequencing of bacterial artificial chromosomes (BACs) and prokaryotic genomes by biotin-capture PCR1998Inngår i: Journal of Biotechnology, ISSN 0168-1656, E-ISSN 1873-4863, Vol. 60, nr 1-2, s. 119-129Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    Determination of unknown DNA sequences adjacent to known segments is an important task in genome-related research. We have applied the methodology of biotin-capture PCR for direct sequencing of bacterial artificial chromosomes (BACs) and bacterial genomes. The strategy involves extension of a biotinylated primer from a known locus into unknown regions of the template to yield single-stranded DNA, which is immobilised onto paramagnetic beads. An arbitrary primer initiates extension from the unknown region and back towards the known locus. The arbitrary primer contains a universal primer 'handle', which is utilised for subsequent amplification. The PCR products are then directly sequenced by solid-phase or cycle sequencing. The fact that BACs or bacterial chromosomes can be sequenced without prior purification or subcloning might be useful in numerous applications, such as gap-filling, sequencing of regulatory regions upstream known genes and determination of intron/exon-boundaries.

  • 41.
    Sterky, Fredrik
    et al.
    KTH, Tidigare Institutioner                               , Bioteknologi.
    Holmberg, Anders
    KTH, Tidigare Institutioner                               , Bioteknologi.
    Pettersson, B
    Uhlen, Mathias
    KTH, Tidigare Institutioner                               , Bioteknologi.
    The sequence of a 30 kb fragment on the left arm of chromosome XV from Saccharomyces cerevisiae reveals 15 open reading frames, five of which correspond to previously identified genes1996Inngår i: Yeast, ISSN 0749-503X, E-ISSN 1097-0061, Vol. 12, nr 10B, s. 1091-1095Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    We report the sequence of a 30 469 bp long DNA fragment on the left arm of chromosome XV of Saccharomyces cerevisiae. The fragment contains 15 open reading frames (ORFs) of al least 300 bp. Five previously sequenced yeast genes, PHO80, TIR2, SLG1, the gene encoding the subtilisin-like protease III precursor and the gene coding for ATP-dependent permease, are found among these ORFs. By DNA sequence comparison, two ORFs identified previously reported expressed sequence tags from yeast. Of the proteins encoded by the remaining eight ORFs, six show similarities to proteins from different organisms and two lack detectable similarity with any amino acid sequence described in public data banks. The DNA sequence has been deposited in GenBank under Accession Number U43491.

  • 42. Sterky, Fredrik
    et al.
    Regan, S
    Karlsson, J
    Hertzberg, M
    Rohde, A
    Holmberg, Anders
    Mohammad Amini, Amini Bahram
    KTH, Tidigare Institutioner                               , Bioteknologi.
    Bhalerao, R
    Larsson, M
    Villarroel, R
    Van Montagu, M
    Sandberg, G
    Olsson, O
    Teeri, T
    Boerjan, W
    Gustafsson, P
    Uhlen, Mathias
    KTH, Tidigare Institutioner                               , Bioteknologi.
    Sundberg, B
    Lundeberg, Joakim
    KTH, Tidigare Institutioner                               , Bioteknologi.
    Gene discovery in the wood-forming tissues of poplar: Analysis of 5,692 expressed sequence tags1998Inngår i: Proceedings of the National Academy of Sciences of the United States of America, ISSN 0027-8424, E-ISSN 1091-6490, Vol. 95, nr 22, s. 13330-13335Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    A rapidly growing area of genome research is the generation of expressed sequence tags (ESTs) in which large numbers of randomly selected cDNA clones are partially sequenced. The collection of ESTs reflects the level and complexity of gene expression in the sampled tissue, To date, the majority of plant ESTs are from nonwoody plants such as Arabidopsis, Brassica, maize, and rice. Here, we present a large-scale production of ESTs from the wood-forming tissues of two poplars, Populus tremula L, x tremuloides Michx, and Populus trichocarpa 'Trichobel.' The 5,692 ESTs analyzed represented a total of 3,719 unique transcripts for the two cDNA libraries, Putative functions could be assigned to 2,245 of these transcripts that corresponded to 820 protein functions. Of specific interest to forest biotechnology are the 4% of ESTs involved in various processes of cell wall formation, such as lignin and cellulose synthesis, 5% similar to developmental regulators and members of known signal transduction pathways, and 2% involved in hormone biosynthesis. An additional 12% of the ESTs show ed no significant similarity to any other DNA or protein sequences in existing databases. The absence of these sequences from public databases may indicate a specific role for these proteins in wood formation. The cDNA libraries and the accompanying database are valuable resources for forest research directed toward understanding the genetic control of wood formation and future endeavors to modify wood and fiber properties for industrial use.

  • 43.
    Stollberg, Heide
    et al.
    KTH, Tidigare Institutioner                               , Fysik.
    Boutet de Monvel, Jacques
    Holmberg, Anders
    KTH, Tidigare Institutioner                               , Fysik.
    Hertz, Hans M.
    KTH, Tidigare Institutioner                               , Fysik.
    Wavelet-based image restoration for compact x-ray microscopy2003Inngår i: Journal of Microscopy, ISSN 0022-2720, E-ISSN 1365-2818, Vol. 211, nr 2, s. 154-160Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    Compact water-window X-ray microscopy with short exposure times will always be limited on photons owing to sources of limited power in combination with low-efficency X-ray optics. Thus, it is important to investigate methods for improving the signal-to-noise ratio in the images. We show that a wavelet-based denoising procedure significantly improves the quality and contrast in compact X-ray microscopy images. A non-decimated, discrete wavelet transform (DWT) is applied to original, noisy images. After applying a thresholding procedure to the finest scales of the DWT, by setting to zero all wavelet coefficients of magnitude below a prescribed value, the inverse DWT to the thresholded DWT produces denoised images. It is concluded that the denoising procedure has potential to reduce the exposure time by a factor of 2 without loss of relevant image information.

  • 44.
    Takman, Per A. C.
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Stollberg, Heide
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Johansson, Göran A.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Lindblom, Magnus
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Hertz, Hans M.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Sub 30-nm resolution compact x-ray microscopy2006Inngår i: Journal of Microscopy, ISSN 0022-2720, E-ISSN 1365-2818Artikkel i tidsskrift (Annet vitenskapelig)
  • 45.
    Takman, Per
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Stollberg, Heide
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Johansson, Göran A.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Lindblom, Magnus
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Hertz, Hans M.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    High-resolution compact x-ray microscopy2007Inngår i: Journal of Microscopy, ISSN 0022-2720, E-ISSN 1365-2818, Vol. 226, nr 2, s. 175-181Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    We demonstrate compact full-field soft X-ray transmission microscopy with sub 60-nm resolution operating at λ= 2.48 nm. The microscope is based on a 100-Hz regenerative liquid-nitrogen-jet laser-plasma source in combination with a condenser zone plate and a micro-zone plate objective for high-resolution imaging onto a 2048 × 2048 pixel CCD detector. The sample holder is mounted in a helium atmosphere and allows imaging of both dry and wet specimens. The microscope design enables fast sample switching and the sample can be pre-aligned using a visible-light microscope. High-quality images can be acquired with exposure times of less than 5 min. We demonstrate the performance of the microscope using both dry and wet samples.

  • 46.
    Uhlén, Fredrik
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Lindqvist, Sandra
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Nilsson, Daniel
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Reinspach, Julia
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Vogt, Ulrich
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Hertz, Hans M.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    New diamond nanofabrication process for hard x-ray zone plates2011Inngår i: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 29, nr 6, s. 06FG03-1-06FG03-4Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    The authors report on a new tungsten-hardmask-based diamond dry-etch process for fabricating diamond zone plate lenses with a high aspect ratio. The tungsten hardmask is structured by electron-beam lithography, together with Cl2/O2 and SF6/O2 reactive ion etching in a trilayer resist-chromium-tungsten stack. The underlying diamond is then etched in an O2 plasma. The authors demonstrate excellent-quality diamond gratings with half-pitch down to 80 nm and a height of 2.6 μm, as well as zone plates with a 75 μm diameter and 100 nm outermost zone width. The diffraction efficiency of the zone plates is measured to 14.5% at an 8 keV x-ray energy, and the imaging properties were investigated in a scanning microscope arrangement showing sub-100-nm resolution. The imaging and thermal properties of these lenses make them suitable for use with high-brightness x-ray free-electron laser sources.

  • 47.
    Uhlén, Fredrik
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Nilsson, Daniel
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Hertz, Hans M.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Schroer, C. G.
    Seiboth, F.
    Patommel, J.
    Meier, V.
    Hoppe, R.
    Schropp, A.
    Lee, H. J.
    Nagler, B.
    Galtier, E.
    Krzywinski, J.
    Sinn, H.
    Vogt, Ulrich
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Damage investigation on tungsten and diamond diffractive optics at a hard x-ray free-electron laser2013Inngår i: Optics Express, ISSN 1094-4087, E-ISSN 1094-4087, Vol. 21, nr 7, s. 8051-8061Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    Focusing hard x-ray free-electron laser radiation with extremely high fluence sets stringent demands on the x-ray optics. Any material placed in an intense x-ray beam is at risk of being damaged. Therefore, it is crucial to find the damage thresholds for focusing optics. In this paper we report experimental results of exposing tungsten and diamond diffractive optics to a prefocused 8.2 keV free-electron laser beam in order to find damage threshold fluence levels. Tungsten nanostructures were damaged at fluence levels above 500 mJ/cm(2). The damage was of mechanical character, caused by thermal stress variations. Diamond nanostructures were affected at a fluence of 59 000 mJ/cm(2). For fluence levels above this, a significant graphitization process was initiated. Scanning Electron Microscopy (SEM) and mu-Raman analysis were used to analyze exposed nanostructures.

  • 48.
    Uhlén, Fredrik
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Nilsson, Daniel
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Rahomäki, Jussi
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Belova, Liubov
    KTH, Skolan för industriell teknik och management (ITM), Materialvetenskap, Teknisk materialfysik.
    Schroer, Christian G.
    Seiboth, Frank
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Hertz, Hans M.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Vogt, Ulrich
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Nanofabrication of tungsten zone plates with integrated platinum central stop for hard X-ray applications2014Inngår i: Microelectronic Engineering, ISSN 0167-9317, E-ISSN 1873-5568, Vol. 116, s. 40-43Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    We present a nanofabrication process for producing tungsten zone plates used in hard X-ray applications including a method of integrating a high-energy absorbing central stop with the optic. Tungsten zone plates are structured with electron-beam lithography and subsequent reactive ion etching. The central stop originates from a platinum wire. It is cut to dimension by focused ion beam etching, and afterwards attached to the zone plate center using ion beam induced deposition of platinum. A zone plate with integrated central stop will simplify alignment in hard X-ray scanning microscope arrangements where the 0th order light must be eliminated. The focusing performance of the zone plate device was investigated by scanning coherent diffraction imaging (ptychography) at 8 keV photon energy. We could demonstrate a diffraction-limited focus size of 53 nm diameter full-width-at-half-maximum. Tungsten zone plates with integrated central stops show promising results for use in hard X-ray microscopes at high-brightness facilities.

  • 49.
    Vogt, Ulrich
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Lindblom, Magnus
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Jansson, Per A. C.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Tuohimaa, Tomi T.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Hertz, Hans
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Wieland, M.
    Wilhein, M.
    Towards Soft X-Ray Phase-Sensitive Imaging with Diffractive Optical Elements2006Inngår i: Proc. 8th International Conference X-ray Microscopy, 2006, s. 91-93Konferansepaper (Fagfellevurdert)
    Abstract [en]

    In this contribution we present the first diffractive optical elements for soft x-ray differential interference contrast microscopy.Due to an improved calculation method the nanofabrication accuracy of these optics is the same as for comparable normal zoneplate optics with the same outermost zone width. Different diffractive optical elements were fabricated with outermost zone widthof 100 nm, different spot separation directions and different phase relations between the two spots. The optics were successfullyused in experiments both at the synchrotron radiation based TWINMIC microscope and at the Stockholm compact liquid-nitrogenlaser-plasma source based microscope.

  • 50.
    Vogt, Ulrich
    et al.
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Lindblom, Magnus
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Jansson, Per
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Tuohimaa, Tomi
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Holmberg, Anders
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Hertz, Hans
    KTH, Skolan för teknikvetenskap (SCI), Tillämpad fysik, Biomedicinsk fysik och röntgenfysik.
    Wieland, M.
    University of Applied Sciences Koblenz, Rhein Ahr Campus Remagen.
    Wilhein, Thomas
    University of Applied Sciences Koblenz, Rhein Ahr Campus Remagen.
    Single-optical-element soft-x-ray interferometry with a laser-plasma x-ray source2005Inngår i: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 30, nr 15, s. 2167-Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    We report on a compact interferometer for the water-window soft-x-ray range that is suitable for operation with laser-plasma sources. The interferometer consists of a single diffractive optical element that focuses impinging x rays to two focal spots. The light from these two secondary sources forms the interference pattern. The interferometer was operated with a liquid-nitrogen jet laser-plasma source at lambda = 2.88 nm. Scalar wave-field propagation was used to simulate the interference pattern, showing good correspondence between theoretical and experimental results. The diffractive optical element can simultaneously be used as an imaging optic, and we demonstrate soft-x-ray microscopy with interferometric contrast enhancement of a phase object.

12 1 - 50 of 56
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