Change search
Refine search result
12 1 - 50 of 95
CiteExportLink to result list
Permanent link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Rows per page
  • 5
  • 10
  • 20
  • 50
  • 100
  • 250
Sort
  • Standard (Relevance)
  • Author A-Ö
  • Author Ö-A
  • Title A-Ö
  • Title Ö-A
  • Publication type A-Ö
  • Publication type Ö-A
  • Issued (Oldest first)
  • Issued (Newest first)
  • Created (Oldest first)
  • Created (Newest first)
  • Last updated (Oldest first)
  • Last updated (Newest first)
  • Disputation date (earliest first)
  • Disputation date (latest first)
  • Standard (Relevance)
  • Author A-Ö
  • Author Ö-A
  • Title A-Ö
  • Title Ö-A
  • Publication type A-Ö
  • Publication type Ö-A
  • Issued (Oldest first)
  • Issued (Newest first)
  • Created (Oldest first)
  • Created (Newest first)
  • Last updated (Oldest first)
  • Last updated (Newest first)
  • Disputation date (earliest first)
  • Disputation date (latest first)
Select
The maximal number of hits you can export is 250. When you want to export more records please use the Create feeds function.
  • 1. Abasahl, B.
    et al.
    Zand, I.
    Lerma Arce, C.
    Kumar, S.
    Quack, N.
    Jezzini, M. A.
    Hwang, H. Y.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Porcel, M. A. G.
    Bogaerts, W.
    Towards Low-Power Reconfigurable Photonic ICs Based on MEMS Technology2018Conference paper (Other academic)
    Abstract [en]

    With the progress and industrialization of photonic integrated circuits (PIC) in the past few decades, there is a strong urge towards design and prototyping in a fast, low-cost and reliable manner. In electronics, this demand is met through field programmable gate arrays (FPGA). In the Horizon 2020 MORPHIC (MEMS-based zerO-power Reconfigurable Photonic ICs) project, we are developing a reconfigurable PIC platform to address this demand in the field of photonics and to facilitate the path from idea towards realization for PIC designers and manufacturers.

  • 2. Agustsson, J. S.
    et al.
    Agustsson, B. V.
    Eriksson, A. K.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Olafsson, S.
    Johnsen, K.
    Gudmundsson, J. T.
    Hydrogen uptake in MgO thin films grown by reactive magnetron sputtering2006Conference paper (Other academic)
    Abstract
  • 3. Agustsson, J. S.
    et al.
    Arnalds, U. B.
    Ingason, A. S.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Johnsen, K.
    Olafsson, S.
    Gudmundsson, Jon Tomas
    University of Iceland, Iceland.
    Electrical resistivity and morphology of ultra thin Pt films grown by dc magnetron sputtering on SiO(2)2008In: Journal of Physics Conference Series, IOP Science , 2008, Vol. 100Conference paper (Refereed)
    Abstract [en]

    Ultra thin platinum films were grown by dc magnetron sputtering on thermally oxidized Si (100) substrates. The electrical resistance of the films was monitored in-situ during growth. The coalescence thickness was determined for various growth temperatures and found to increase from 1.3 nm for films grown at room temperature to 1.8 nm for films grown at 250 degrees C, while a continuous film was formed at a thickness of 3.9 nm at room temperature and 3.5 nm at 250 degrees C. The electrical resistivity increases with increased growth temperature, as well as the morphological grain size, and the surface roughness, measured with a scanning tunneling microscope (STM).

  • 4. Agustsson, J. S.
    et al.
    Arnalds, U. B.
    Ingason, A. S.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Johnsen, K.
    Olafsson, S.
    Gudmundsson, Jon Tomas
    University of Iceland, Iceland.
    Growth, coalescence, and electrical resistivity of thin Pt films grown by dc magnetron sputtering on SiO22008In: Applied Surface Science, ISSN 0169-4332, E-ISSN 1873-5584, Vol. 254, no 22, p. 7356-7360Article in journal (Refereed)
    Abstract [en]

    Ultra thin platinum films were grown by dc magnetron sputtering on thermally oxidized Si (100) substrates. The electrical resistance of the films was monitored in situ during growth. The coalescence thickness was determined for various growth temperatures and found to increase from 1.1 nm for films grown at room temperature to 3.3 nm for films grown at 400 degrees C. A continuous film was formed at a thickness of 2.9 nm at room temperature and 7.5 nm at 400 degrees C. The room temperature electrical resistivity decreases with increased growth temperature, while the in-plain grain size and the surface roughness, measured with a scanning tunneling microscope (STM), increase. Furthermore, the temperature dependence of the film electrical resistance was explored at various stages during growth.

  • 5. Agustsson, Jon S.
    et al.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Olafsson, Sveinn
    Johnsen, Kristinn
    Gudmundsson, Jon T
    Electrical properties of thin MgO films2005Conference paper (Other academic)
  • 6. Alvarez, Jesus
    et al.
    Sola, Laura
    Cretich, Marina
    Swan, Marcus
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Volden, Tormod
    Chiari, Marcella
    Hill, Daniel
    A Real Time Immunoassay in Alumina Membranes2014In: SENSORS, 2014 IEEE, IEEE conference proceedings, 2014, p. 1760-1763Conference paper (Refereed)
    Abstract [en]

    To date, photonic biosensing with porous membranes has produced slow responses and long sensing times, due to the narrow (less than 100 nm) closed end pores of the membranes used. Recently, polarimetry was used to demonstrate analyte flow through, and real time biosensing in, free-standing porous alumina membranes. Here, we demonstrate how an improved functionalization technology, has for the first time enabled a real-time immunoassay within a porous membrane with a total assay time below one hour. With the new approach, we show a noise floor for individual biosensing measurements of 3.7 ng/ml (25 pM), and a bulk refractive index detection limit of 5×10-6 RIU, with a standard deviation of less than 5%. The membranes, with their 200 nm pore diameter enabling targeted delivering of analytes to bioreceptors immobilized on the pore walls, therefore provide a route towards rapid and low cost real-time opto-fluidic biosensors for small sample volumes.

  • 7.
    Antelius, Mikael
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    An apodized SOI waveguide-to-fiber surface grating coupler for single lithography silicon photonics2011In: Optics Express, ISSN 1094-4087, E-ISSN 1094-4087, Vol. 19, no 4, p. 3592-3598Article in journal (Refereed)
    Abstract [en]

    We present the design, fabrication, and characterization of a grating for coupling between a single mode silica fiber and the TE mode in a silicon photonic waveguide on a silicon on insulator (SOI) substrate. The grating is etched completely through the silicon device layer, thus permitting the fabrication of through-etched surface coupled silicon nanophotonic circuits in a single lithography step. Furthermore, the grating is apodized to match the diffracted wave to the mode profile of the fiber. We experimentally demonstrate a coupling efficiency of 35% with a 1 dB bandwidth of 47 nm at 1536 nm on a standard SOI substrate. Furthermore, we show by simulation that with an optimized buried oxide thickness, a coupling efficiency of 72% and a 1 dB bandwidth of 38 nm at 1550 nm is achievable. This is, to our knowledge, the highest simulated coupling efficiency for single-etch TE-mode grating couplers. In particular, simulations show that apodizing a conventional periodic through-etched grating decreases the back-reflection into the waveguide from 21% to 0.1%.

  • 8.
    Antelius, Mikael
    et al.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    An apodized surface grating coupler enabling single lithography silicon photonic nanowire sensors2012Conference paper (Other academic)
  • 9. Arnalds, U. B.
    et al.
    Agustsson, J. S.
    Ingason, A. S.
    Eriksson, A. K.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Gudmundsson, J. T.
    Olafsson, S.
    A magnetron sputtering system for the preparation of patterned thin films and in situ thin film electrical resistance measurements2007In: Review of Scientific Instruments, ISSN 0034-6748, E-ISSN 1089-7623, Vol. 78, no 10, p. 103901-Article in journal (Refereed)
    Abstract [en]

    We describe a versatile three gun magnetron sputtering system with a custom made sample holder for in situ electrical resistance measurements, both during film growth and ambient changes on film electrical properties. The sample holder allows for the preparation of patterned thin film structures, using up to five different shadow masks without breaking vacuum. We show how the system is used to monitor the electrical resistance of thin metallic films during growth and to study the thermodynamics of hydrogen uptake in metallic thin films. Furthermore, we demonstrate the growth of thin film capacitors, where patterned films are created using shadow masks.

  • 10.
    Baghban, Mohammad Amin
    et al.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Quantum Electronics and Quantum Optics, QEO.
    Schollhammer, Jean
    KTH, School of Engineering Sciences (SCI), Applied Physics, Quantum Electronics and Quantum Optics, QEO.
    Errando-Herranz, Carlos
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Gallo, Katia
    KTH, School of Engineering Sciences (SCI), Applied Physics, Quantum Electronics and Quantum Optics, QEO.
    Waveguide Gratings in Thin-Film Lithium Niobate on Insulator2017In: CLEO: 2017, OSA Technical Digest, Optical Society of America, 2017Conference paper (Refereed)
  • 11. Barrios, C. A.
    et al.
    Holgado, M.
    Guarneros, O.
    Gylfason, Kristinn Björgvin
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Sanchez, B.
    Casquel, R.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Reconfiguration of microring resonators by liquid adhesion2008In: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Vol. 93, no 20, article id 203114Article in journal (Refereed)
    Abstract [en]

    We present a procedure to reconfigure microring resonators based on liquid surface adhesion. Droplets of organic solvents were deposited over Si3N4/SiO2 strip- and slot-waveguide ring resonators, and the transmission spectra were measured several hours after the evaporation of the droplets at room temperature. Our measurements show that the optical properties of the microrings are significantly modified by liquid adhered to the waveguides, persisting even 96 h after bulk evaporation. Liquid-solid interfacial forces slow down liquid evaporation at the nanoscale, enabling permanent photonic configurations. Rewriteability is achieved by removing the adhered liquid with heat.

  • 12.
    Barrios, Carlos A.
    et al.
    Univ Politecn Madrid, ETSI Telecomunicac, ISOM, E-28040 Madrid, Spain..
    Gylfason, Kristinn
    KTH, School of Electrical Engineering (EES).
    Sanchez, Benito
    Univ Politecn Valencia, NTC, Valencia 46022, Spain..
    Griol, Amadeu
    Univ Politecn Valencia, NTC, Valencia 46022, Spain..
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES).
    Holgado, M.
    Univ Politecn Madrid, Ctr Laser, Madrid 28031, Spain..
    Casquel, R.
    Univ Politecn Madrid, Ctr Laser, Madrid 28031, Spain..
    Slot-waveguide biochemical sensor (vol 32, pg 2080, 2007)2008In: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 33, no 21, p. 2554-2555Article in journal (Refereed)
    Abstract [en]

    The group index, instead of the effective index, is used to analyze the performance of a Si(3)N(4)-SiO(2) slot-waveguide microring refractive index sensor [Opt. Lett. 32, 3080 (2007)]. Assuming that the slot is fully filled with liquid, excellent agreement is found between experimental results and calculations.

  • 13. Barrios, Carlos Angulo
    et al.
    Banuls, Maria Jose
    Gonzalez-Pedro, Victoria
    Gylfason, Kristinn Björgvin
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Sanchez, Benito
    Griol, Amadeu
    Maquieira, Angel
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Holgado, Miquel
    Calquel, Raphael
    Label-free optical biosensing with slot-waveguides2008In: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 33, no 7, p. 708-710Article in journal (Refereed)
    Abstract [en]

    We demonstrate label-free molecule detection by using an integrated biosensor based on a Si3N4/SiO2 Slot-waveguide microring resonator. Bovine serum albumin (BSA) and anti-BSA molecular binding events on the sensor surface are monitored through the measurement of resonant wavelength shifts with varying biomolecule concentrations. The biosensor exhibited sensitivities of 1.8 and 3.2 nm/(ng/mm(2)) for the detection of anti-BSA and BSA, respectively. The estimated detection limits are 28 and 16 pg/mm(2) for anti-BSA and BSA, respectively, limited by wavelength resolution.

  • 14.
    Barrios, Carlos Angulo
    et al.
    Univ. Politécnica de Valencia.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Sanchez, Benito
    Griol, Amadeu
    Univ. Politécnica de Valencia.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Holgado, Miguel
    Univ. Politécnica de Madrid.
    Casquel, Rafael
    Integrated slot-waveguide microresonator for biochemical sensing2008In: Proceedings Europtrode IX, 2008Conference paper (Refereed)
  • 15. Barrios, Carlos Angulo
    et al.
    Gylfason, Kristinn Björgvin
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Sanchez, Benito
    Griol, Amadeu
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Holgado, Miquel
    Casquel, Raphael
    Slot-waveguide biochemical sensor2007In: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 32, no 21, p. 3080-3082Article in journal (Refereed)
    Abstract [en]

    We report an experimental demonstration of an integrated biochemical sensor based on a slot-waveguidemicroring resonator. The microresonator is fabricated on a Si3N4-SiO2 platform and operates at a wavelength of 1.3 mu m. The transmission spectrum of the sensor is measured with different ambient refractive indices ranging from n = 1. 33 to 1.42. A linear shift of the resonant wavelength with increasing ambient refractive index of 212 nm/refractive index units (RIU) is observed. The sensor detects a minimal refractive index variation of 2 X 10(-4) RIU.

  • 16. Barrios, Carlos Angulo
    et al.
    Sanchez, Benito
    Gylfason, Kristinn Björgvin
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Griol, Amadeu
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Holgado, Miquel
    Casquel, Raphael
    Demonstration of slot-waveguide structures on silicon nitride / silicon oxide platform2007In: Optics Express, ISSN 1094-4087, E-ISSN 1094-4087, Vol. 15, no 11, p. 6846-6856Article in journal (Refereed)
    Abstract [en]

    We report on the first demonstration of guiding light in vertical slot-waveguides on silicon nitride/silicon oxide material system. Integrated ring resonators and Fabry-Perot cavities have been fabricated and characterized in order to determine optical features of the slot-waveguides. Group index behavior evidences guiding and confinement in the low-index slot region at O-band (1260-1370nm) telecommunication wavelengths. Propagation losses of < 20 dB/cm have been measured for the transverse-electric mode of the slot-waveguides.

  • 17. Barrios, Carlos
    et al.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Sánches, Benito
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Griol, Amadeu
    Casquel, Rafael
    Holgado, Miguel
    Integrated Si3N4/SiO2 Slot-Waveguide Microresonators2007Conference paper (Refereed)
    Abstract [en]

    We demonstrate slot-waveguide microring resonators and Fabry-Perot microcavities on Si3N4/SiO2. Characterization indicates guiding and confinement in the waveguide nanometric-size low-index slot region at O-band (1260-1370nm) wavelengths. We measured propagation losses <20 dB/cm.

  • 18.
    Bleiker, Simon J.
    et al.
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    Dubois, Valentin J.
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    Schröder, Stephan
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    Ottonello Briano, Floria
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    Stemme, Göran
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    Niklaus, Frank
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    Adhesive Wafer Bonding for Heterogeneous System Integration2018In: ECS Meeting Abstracts / [ed] The Electrochemical Society, 2018Conference paper (Refereed)
  • 19.
    Carlborg, Carl Fredrik
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Wijngaart, Wouter van der
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Hill, Daniel
    Sanchez, Benito
    Griol, Amadeu
    Maire, Guillaume
    Dortu, Fabian
    Viviena, Laurent
    Stragier, Anne-Sophie
    Marris-Morini, Delphine
    Cassan, Eric
    Kazmierczak, Andrzej
    Giannone, Domenico
    Banuls, Mari­a José
    Gonzalez-Pedro, Victoria
    Maquieira, Angel
    Barrios, Carlos A.
    Holgado, Miguel
    Casquel, Rafael
    Ultrahigh sensitivity slot-waveguide biosensor on a highly integrated chip for simultaneous diagnosis of multiple diseases2008In: Medicinteknikdagarna, Gothenburg, 2008, 2008Conference paper (Other academic)
  • 20.
    Carlborg, Carl Fredrik
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Gylfason, Kristinn Björgvin
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Kazmierczak, Andrzej
    Dortu, Fabian
    Banuls Polo, Maria Jose
    Maquieira Catala, Angel
    Kresbach, Gerhard
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Moh, Thomas
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Vivien, Laurent
    Popplewell, Jon
    Ronan, Gerry
    Barrios, Carlos Angulo
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    van der Wijngaart, Wouter
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips2010In: Lab on a Chip, ISSN 1473-0197, E-ISSN 1473-0189, Vol. 10, no 3, p. 281-290Article in journal (Refereed)
    Abstract [en]

    We present the design, fabrication, and characterisation of an array of optical slot-waveguide ring resonator sensors, integrated with microfluidic sample handling in a compact cartridge, for multiplexed real-time label-free biosensing. Multiplexing not only enables high throughput, but also provides reference channels for drift compensation and control experiments. Our use of alignment tolerant surface gratings to couple light into the optical chip enables quick replacement of cartridges in the read-out instrument. Furthermore, our novel use of a dual surface-energy adhesive film to bond a hard plastic shell directly to the PDMS microfluidic network allows for fast and leak-tight assembly of compact cartridges with tightly spaced fluidic interconnects. The high sensitivity of the slot-waveguide resonators, combined with on-chip referencing and physical modelling, yields a volume refractive index detection limit of 5 x 10(-6) refractive index units (RIUs) and a surface mass density detection limit of 0.9 pg mm(-2), to our knowledge the best reported values for integrated planar ring resonators.

  • 21.
    Dubois, Valentin J.
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Antelius, Mikael
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    A single-lithography SOI rib waveguide sensing circuit with apodized low back-reflection surface grating fiber coupling2012In: SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS III / [ed] Laurent Vivien, Seppo K. Honkanen, Lorenzo Pavesi, Stefano Pelli, SPIE - International Society for Optical Engineering, 2012, Vol. 8431, p. 84311-84311Conference paper (Refereed)
    Abstract [en]

    We present a single-lithography Mach-Zehnder interferometer sensor circuit, with integrated low back-reflection input and output grating couplers. The low back-reflection is accomplished by a duty cycle apodization optimized for coupling light between single-mode silica fibers and the nanometric silicon-on-insulator (SOI) rib-waveguides. We discuss the design, fabrication, and characterization of the circuit. The apodization profile of the gratings is algorithmically generated using eigenmode expansion based simulations and the integrated waveguides, splitters, and combiners are designed using finite element simulations. The maximum simulated coupling efficiencies of the gratings are 70% and the multimode interference splitters and combiners have a footprint of only 19.2ᅵ4.5 ᅵm2. The devices are fabricated on an SOI wafer with a 220 nmdevice layer and 2 ᅵm buried oxide, by a single electron beam lithography and plasma etching. We characterize the devices in the wavelength range from 1460-1580 nm and show a grating pass-band ripple of only 0.06 dB and grating coupling efficiency of 40% at 1530 nm. The integrated Mach-Zehnder interferometer has an extinction ratio of -18 dB at 1530 nm and between -13 and -19 dB over the whole 1460-1580 nm range.

  • 22.
    Edinger, Pierre
    et al.
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    Errando-Herranz, Carlos
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    Gylfason, Kristinn
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    Low-loss MEMS phase shifter for large scale reconfigurable silicon photonics2019Conference paper (Refereed)
    Abstract [en]

    We experimentally demonstrate a silicon MEMS phase shifter achieving more than π phase shift with sub-dB insertion loss (IL).  The phase is tuned by reducing the gap between a static suspended waveguide and a free silicon beam, via comb-drive actuation.  Our device reaches 1.2π phase shift at only 20 V, with only 0.3 dB insertion loss – an order of magnitude improvement over previously reported MEMS devices.  The device has a small footprint of 50×70 µm2 and its power consumption is 5 orders of magnitude lower than that of traditional thermal phase shifters.  Our new phase shifter is a fundamental building block of the next-generation large scale reconfigurable photonic circuits which will find applications in datacenter interconnects, artificial intelligence (AI), and quantum computing.

  • 23.
    Edinger, Pierre
    et al.
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    Errando-Herranz, Carlos
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    Gylfason, Kristinn
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    Reducing Actuation Nonlinearity of MEMS Phase Shifters for Reconfigurable Photonic Circuits2019In: 2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), IEEE , 2019Conference paper (Refereed)
    Abstract [en]

    The low power consumption of MEMS actuators enables large-scale reconfigurable photonic circuits. However, insertion loss and actuation linearity need improvement. By simulations and experiments, we analyze the dominating design parameters affecting linearity and suggest improvements.

  • 24.
    Errando-Herranz, Carlos
    et al.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Colangelo, Marco
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Ahmed, Samy
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Björk, Joel
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    MEMS tunable silicon photonic grating coupler for post-assembly optimization of fiber-to-chip coupling2017In: Micro Electro Mechanical Systems (MEMS), 2017 30th IEEE International Conference on / [ed] Institute of Electrical and Electronics Engineers (IEEE), Institute of Electrical and Electronics Engineers (IEEE), 2017, p. 293-296Conference paper (Refereed)
    Abstract [en]

    We experimentally demonstrate the first MEMS tunable photonic fiber-to-waveguide grating coupler, and apply it to electrostatically optimize the light coupling between an optical fiber and an on-chip silicon photonic waveguide. Efficient and stable fiber-to-chip coupling is vital for combining the high optical quality of silica fibers with the integration density of silicon photonics. Our device has the potential to lower assembly cost and extend device lifetime, by enabling electrical post-assembly adjustments.

  • 25.
    Errando-Herranz, Carlos
    et al.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Das, Sandipan
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Gylfason, Kristinn
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Suspended polarization beam splitter on silicon-on-insulator2018In: Optics Express, ISSN 1094-4087, E-ISSN 1094-4087, Vol. 26, no 3, p. 2675-2681Article in journal (Refereed)
    Abstract [en]

    Polarization handling in suspended silicon photonics has the potential to enable new applications in fields such as optomechanics, photonic microelectromechanical systems, and mid-infrared photonics. In this work, we experimentally demonstrate a suspended polarization beam splitter on a silicon-on-insulator waveguide platform, based on an asymmetric directional coupler. Our device presents polarization extinction ratios above 10 and 15 dB, and insertion losses below 5 and 1 dB, for TM and TE polarized input, respectively, across a 40 nm wavelength range at 1550 nm, with a device length below 8 µm. These results make our suspended polarization beam splitter a promising building block for future systems based on polarization diversity suspended photonics.

  • 26.
    Errando-Herranz, Carlos
    et al.
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    Edinger, Pierre
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    Colangelo, Marco
    KTH.
    Björk, Joel
    KTH.
    Ahmed, Samy
    KTH.
    Stemme, Göran
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    Niklaus, Frank
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    New dynamic silicon photonic components enabled by MEMS technology2018In: Proceedings Volume 10537, Silicon Photonics XIII, SPIE - International Society for Optical Engineering, 2018, Vol. 10537, article id 1053711Conference paper (Refereed)
    Abstract [en]

    Silicon photonics is the study and application of integrated optical systems which use silicon as an optical medium, usually by confining light in optical waveguides etched into the surface of silicon-on-insulator (SOI) wafers. The term microelectromechanical systems (MEMS) refers to the technology of mechanics on the microscale actuated by electrostatic actuators. Due to the low power requirements of electrostatic actuation, MEMS components are very power efficient, making them well suited for dense integration and mobile operation. MEMS components are conventionally also implemented in silicon, and MEMS sensors such as accelerometers, gyros, and microphones are now standard in every smartphone. By combining these two successful technologies, new active photonic components with extremely low power consumption can be made. We discuss our recent experimental work on tunable filters, tunable fiber-to-chip couplers, and dynamic waveguide dispersion tuning, enabled by the marriage of silicon MEMS and silicon photonics.

  • 27.
    Errando-Herranz, Carlos
    et al.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Edinger, Pierre
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems. Grenoble Institute of Technology - INP Phelma.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Dynamic dispersion tuning of silicon photonicwaveguides by microelectromechanical actuation2017Conference paper (Refereed)
    Abstract [en]

    Efficient nonlinear silicon photonics rely on phase-matching through finewaveguide dispersion engineering. We experimentally demonstrate dynamic dispersion tuningof 800 ps/nm/km in a silicon waveguide ring resonator, by using microelectromechanicalactuation of an adjacent suspended waveguide rim.

  • 28.
    Errando-Herranz, Carlos
    et al.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Photonic ring resonators for biosensing2016In: Nanodevices for Photonics and Electronics: Advances and Applications, Pan Stanford Publishing, 2016, p. 385-424Chapter in book (Refereed)
  • 29.
    Errando-Herranz, Carlos
    et al.
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    Le Thomas, Nicolas
    Univ Ghent, Photon Res Grp, INTEC Dept, Imec, Technol Pk Zwijnaarde 15, B-9052 Ghent, Belgium.;Univ Ghent, Ctr Nano & Biophoton, Technol Pk Zwijnaarde 15, B-9052 Ghent, Belgium..
    Gylfason, Kristinn
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    Low-power optical beam steering by microelectromechanical waveguide gratings2019In: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 44, no 4, p. 855-858Article in journal (Refereed)
    Abstract [en]

    Optical beam steering is key for optical communications, laser mapping (lidar), and medical imaging. For these applications, integrated photonics is an enabling technology that can provide miniaturized, lighter, lower-cost, and more power-efficient systems. However, common integrated photonic devices are too power demanding. Here, we experimentally demonstrate, for the first time, to the best of our knowledge, beam steering by microelectromechanical (MEMS) actuation of a suspended silicon photonic waveguide grating. Our device shows up to 5.6 degrees beam steering with 20 V actuation and power consumption below the mu W level, i.e., more than five orders of magnitude lower power consumption than previous thermo-optic tuning methods. The novel combination of MEMS with integrated photonics presented in this work lays ground for the next generation of power-efficient optical beam steering systems.

  • 30.
    Errando-Herranz, Carlos
    et al.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Le Thomas, Nicolas
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Low-power optical beam steering by microelectromechanical waveguide gratingsIn: Article in journal (Other academic)
    Abstract [en]

    Optical beam steering is key for optical communications, laser mapping (LIDAR), and medical imaging. For these applications, integrated photonicsis an enabling technology that can provide miniaturized, lighter, lower cost, and more power efficient systems. However, common integrated photonic devices are too power demanding. Here, we experimentally demonstrate, for the first time, beam steering by microelectromechanical (MEMS)actuation of a suspended silicon photonic waveguide grating. Our device shows up to 5.6° beamsteering with 20 V actuation and a power consumption below the μW level, i.e. more than 5 orders of magnitude lower power consumption than previous thermo-optic tuning methods. The novel combination of MEMS with integrated photonics presented in this work lays ground for the next generation of power-efficient optical beam steering systems.

  • 31.
    Errando-Herranz, Carlos
    et al.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Niklaus, Frank
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    A Low-power MEMS Tunable Photonic Ring Resonator for Reconfigurable Optical Networks2015In: Proceedings of The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Estoril, Portugal. Jan 2015, IEEE conference proceedings, 2015, p. 53-56Conference paper (Refereed)
    Abstract [en]

    We experimentally demonstrate a low-power MEMS tunable photonic ring resonator with 10 selectable channels for wavelength selection in reconfigurable optical networks operating in the C band. The tuning is achieved by changing the geometry of the slot of a silicon slot-waveguide ring resonator, by means of vertical electrostatic parallel-plate actuation. Our device provides static power dissipation below 0.1 μW, a wavelength tuning range of 1 nm, and a narrow bandwidth of 0.1 nm, i.e. 10 nW static power dissipation per selectable channel for TE mode tuning.

  • 32.
    Errando-Herranz, Carlos
    et al.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Niklaus, Frank
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    A MEMS tunable photonic ring resonator with small footprint and large free spectral range2015In: Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on, IEEE conference proceedings, 2015, p. 1001-1004Conference paper (Refereed)
    Abstract [en]

    We demonstrate a MEMS tunable silicon photonic ringresonator with a 20 μm radius and a 5 nm free spectral range (FSR) for wavelength selection in reconfigurable optical networks. The device shows a loaded Q of 12000, and 300 pm tuning at a wavelength of 1544 nm.

  • 33.
    Errando-Herranz, Carlos
    et al.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Niklaus, Frank
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Low-power microelectromechanically tunable silicon photonic ring resonator add-drop filter2015In: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 40, no 15, p. 3556-3559Article in journal (Refereed)
    Abstract [en]

    We experimentally demonstrate a microelectromechanically (MEMS) tunable photonic ring resonator add-€“drop filter, fabricated in a simple silicon-on-insulator (SOI) based process. The device uses electrostatic parallel plate actuation to perturb the evanescent field of a silicon waveguide, and achieves a 530 pm resonance wavelength tuning, i.e., more than a fourfold improvement compared to previous MEMS tunable ring resonator add-€“drop filters. Moreover, our device has a static power consumption below 100 nW, and a tuning rate of -ˆ’62 €€‰pm/V, i.e., the highest reported rate for electrostatic tuning of ring resonator add-€“drop filters.

  • 34.
    Errando-Herranz, Carlos
    et al.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems. UPV Polytechnic University of Valencia, Valencia, Spain.
    Saharil, Farizah
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Mola Romero, Albert
    Sandström, Niklas
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Shafagh, Reza Z.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    van der Wijngaart, Wouter
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Haraldsson, Tommy
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Integration of polymer microfluidics with silicon photonic biosensors by one-step combined photopatterning and molding of OSTE2013Conference paper (Refereed)
    Abstract [en]

    We demonstrate a method for the fast and simple packaging of silicon sensors into a microfluidic package consisting of the recently introduced {OSTE} polymer. The microfluidic layer is first microstructured and thereafter dry-bonded to a silicon photonic sensor, in a process compatible with wafer-level production, and with the entire packaging process lasting only 10 minutes. The fluidic layer combines molded microchannels and fluidic (Luer) connectors with photopatterned through-holes (vias) for optical fiber probing and fluid connections. All the features are fabricated in a single photocuring step. We report measurements with an integrated silicon photonic {Mach-Zehnder} interferometer refractive index sensor packaged by these means.

  • 35.
    Errando-Herranz, Carlos
    et al.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Saharil, Farizah
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Mola Romero, Albert
    Sandström, Niklas
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Shafagh, Reza Z.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Wijngaart, Wouter van der
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Haraldsson, Tommy
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Integration Of Polymer Microfluidic Channels, Vias, And Connectors With Silicon Photonic Sensors By One-Step Combined Photopatterning And Molding Of OSTE2013In: Proceedings of the 2013 17th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers), IEEE conference proceedings, 2013, p. 1613-1616Conference paper (Refereed)
    Abstract [en]

    We demonstrate a method for the fast and simple packaging of silicon sensors into a microfluidic package consisting of the recently introduced {OSTE} polymer. The microfluidic layer is first microstructured and thereafter dry-bonded to a silicon photonic sensor, in a process compatible with wafer-level production, and with the entire packaging process lasting only 10 minutes. The fluidic layer combines molded microchannels and fluidic (Luer) connectors with photopatterned through-holes (vias) for optical fiber probing and fluid connections. All the features are fabricated in a single photocuring step. We report measurements with an integrated silicon photonic {Mach-Zehnder} interferometer refractive index sensor packaged by these means.

  • 36.
    Errando-Herranz, Carlos
    et al.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Saharil, Farizah
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Romero, Albert Mola
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Sandström, Niklas
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Shafagh, Reza Z.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Wijngaart, Wouter van der
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Haraldsson, Tommy
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Integration of microfluidics with grating coupled silicon photonic sensors by one-step combined photopatterning and molding of OSTE2013In: Optics Express, ISSN 1094-4087, E-ISSN 1094-4087, Vol. 21, no 18, p. 21293-21298Article in journal (Refereed)
    Abstract [en]

    We present a novel integration method for packaging silicon photonic sensors with polymer microfluidics, designed to be suitable for wafer-level production methods. The method addresses the previously unmet manufacturing challenges of matching the microfluidic footprint area to that of the photonics, and of robust bonding of microfluidic layers to biofunctionalized surfaces. We demonstrate the fabrication, in a single step, of a microfluidic layer in the recently introduced OSTE polymer, and the subsequent unassisted dry bonding of the microfluidic layer to a grating coupled silicon photonic ring resonator sensor chip. The microfluidic layer features photopatterned through holes (vias) for optical fiber probing and fluid connections, as well as molded microchannels and tube connectors, and is manufactured and subsequently bonded to a silicon sensor chip in less than 10 minutes. Combining this new microfluidic packaging method with photonic waveguide surface gratings for light coupling allows matching the size scale of microfluidics to that of current silicon photonic biosensors. To demonstrate the new method, we performed successful refractive index measurements of liquid ethanol and methanol samples, using the fabricated device. The minimum required sample volume for refractive index measurement is below one nanoliter.

  • 37.
    Errando-Herranz, Carlos
    et al.
    KTH, School of Electrical Engineering and Computer Science (EECS), Intelligenta system, Micro and Nanosystems.
    Takabayashi, A. Y.
    Edinger, Pierre
    KTH, School of Electrical Engineering and Computer Science (EECS), Intelligenta system, Micro and Nanosystems.
    Sattari, H.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering and Computer Science (EECS), Intelligenta system, Micro and Nanosystems.
    Quack, N.
    MEMS for Photonic Integrated Circuits2020In: IEEE Journal of Selected Topics in Quantum Electronics, ISSN 1077-260X, E-ISSN 1558-4542, Vol. 26, no 2, p. 1-16Article in journal (Refereed)
    Abstract [en]

    The field of microelectromechanical systems (MEMS) for photonic integrated circuits (PICs) is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve existing components and introduce novel functionalities in PICs. This review covers the MEMS actuation principles and the mechanical tuning mechanisms for integrated photonics. The state of the art of MEMS tunable components in PICs is quantitatively reviewed and critically assessed with respect to suitability for large-scale integration in existing PIC technology platforms. MEMS provide a powerful approach to overcome current limitations in PIC technologies and to enable a new design dimension with a wide range of applications.

  • 38.
    Errando-Herranz, Carlos
    et al.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Vastesson, Alexander
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Zelenina, Marina
    KTH, School of Engineering Sciences (SCI), Applied Physics, Cell Physics.
    Pardon, Gaspard
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Bergström, Gunnar
    Wijngaart, Wouter van der
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Haraldsson, Tommy
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Brismar, Hjalmar
    KTH, School of Engineering Sciences (SCI), Applied Physics, Cell Physics.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Biocompatibility of OSTE polymers studied by cell growth experiments2013In: Proceedings of the 17th Int. Conf. on Miniaturized Systems for Chemistry  and Life Sciences (microTAS), Freiburg, Germany, 2013Conference paper (Refereed)
    Abstract [en]

    The recently introduced OSTE polymer technology has shown very useful features for microfluidics for lab-on-a-chip applications. However, no data has yet been published on cell viability on OSTE. In this work, we study the biocompatibility of three OSTE formulations by cell growth experiments. Moreover, we investigate the effect of varying thiol excess on cell viability on OSTE surfaces. The results show poor cell viability on one OSTE formulation, and viability comparable with polystyrene on a second formulation with thiol excess below 60%. In the third formulation, we observe cell proliferation. These results are promising for cell-based assays in OSTE microfluidic devices.

  • 39.
    Fischer, Andreas C.
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Belova, Lyubov M.
    KTH, School of Industrial Engineering and Management (ITM), Materials Science and Engineering, Engineering Material Physics.
    Malm, Gunnar B.
    KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.
    Kolahdouz, Mohammadreza
    KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.
    Radamson, Henry
    KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Niklaus, Frank
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    3D Free-Form Patterning of Silicon by Ion Implantation, Silicon Deposition, and Selective Silicon Etching2012In: Advanced Functional Materials, ISSN 1616-301X, E-ISSN 1616-3028, Vol. 22, no 19, p. 4004-4008Article in journal (Refereed)
    Abstract [en]

    A method for additive layer-by-layer fabrication of arbitrarily shaped 3D silicon micro- and nanostructures is reported. The fabrication is based on alternating steps of chemical vapor deposition of silicon and local implantation of gallium ions by focused ion beam (FIB) writing. In a final step, the defined 3D structures are formed by etching the silicon in potassium hydroxide (KOH), in which the local ion implantation provides the etching selectivity. The method is demonstrated by fabricating 3D structures made of two and three silicon layers, including suspended beams that are 40 nm thick, 500 nm wide, and 4 μm long, and patterned lines that are 33 nm wide.

  • 40.
    Fischer, Andreas C.
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Belova, Liubov M.
    KTH, School of Industrial Engineering and Management (ITM), Materials Science and Engineering, Applied Material Physics.
    Malm, Gunnar B.
    KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.
    Kolahdouz, Mohammadreza
    KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.
    Rikers, Yuri G.M.
    FEI Electron Optics.
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Niklaus, Frank
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    3D Patterning of Si Micro and Nano Structures by Focused Ion Beam Implantation, Si Deposition and Selective Si Etching2012Conference paper (Other academic)
  • 41.
    Fischer, Andreas C.
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Belova, Lyubov M.
    Malm, Gunnar B.
    KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.
    Radamson, Henry H.
    KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.
    Kolahdouz, M.
    KTH, School of Information and Communication Technology (ICT), Integrated Devices and Circuits.
    Rikers, Y. G. M.
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Niklaus, Frank
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Layer-by-layer 3D printing of Si micro- and nanostructures by Si deposition, ion implantation and selective Si etching2012In: 12th IEEE Conference on Nanotechnology (IEEE-NANO), 2012, IEEE conference proceedings, 2012, p. 1-4Conference paper (Refereed)
    Abstract [en]

    In this paper we report a method for layer-by-layer printing of three-dimensional (3D) silicon (Si) micro- and nanostructures. This fabrication method is based on a sequence of alternating steps of chemical vapor deposition of Si and local implantation of gallium (Ga+) ions by focused ion beam (FIB) writing. The defined 3D structures are formed in a final step by selectively wet etching the non-implanted Si in potassium hydroxide (KOH). We demonstrate the viability of the method by fabricating 2 and 3-layer 3D Si structures, including suspended beams and patterned lines with dimensions on the nm-scale.

  • 42.
    Fischer, Andreas C.
    et al.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Niklaus, Frank
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Gylfason, Kristinn Björgvin
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    3D printing of silicon micro and nano structures by ion implantation, silicon deposition, and selective silicon etching2013In: Technical Paper - Society of Manufacturing Engineers, 2013Conference paper (Refereed)
    Abstract [en]

    A method for additive layer-by-layer fabrication of arbitrarily shaped 3D silicon micro and nano structures is reported. The fabrication is based on alternating steps of chemical vapor deposition of silicon and local implantation of gallium ions by focused ion beam (FIB) writing. In a final step, the defined 3D structures are formed by etching the silicon in potassium hydroxide (KOH), in which the local ion implantation provides the etching selectivity. The proposed technology could change and greatly simplify the fabrication of many MEMS, NEMS, and silicon photonic devices without requiring a fully equipped semiconductor cleanroom. This layer-by-layer fabrication method is in principle also viable for the implementation of 3D structures in semiconductors other than silicon.

  • 43.
    Gudmundsson, J. T.
    et al.
    KTH, Superseded Departments, Solid Mechanics.
    Alami, J.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Bohlmark, J.
    Helmersson, U.
    Plasma Dynamics in an Unipolar Pulsed Magnetron Sputtering Discharge2004Conference paper (Refereed)
  • 44.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Nanophotonic biosensors for point of care diagnostics2011Conference paper (Refereed)
  • 45.
    Gylfason, Kristinn B.
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Agustsson, J. S.
    Olafsson, S.
    Meyvantsson, I.
    Johnsen, K.
    Gudmundsson, J. T.
    Ultra-thin Lattice Matched Cr_xMo_1-x/MgO Multilayers2004Conference paper (Refereed)
    Abstract
  • 46.
    Gylfason, Kristinn B.
    et al.
    University of Iceland.
    Alami, J.
    Helmersson, U.
    Gudmundsson, J. T.
    Ion-acoustic solitary waves in a high power pulsed magnetron sputtering discharge2005In: Journal of Physics D: Applied Physics, ISSN 0022-3727, E-ISSN 1361-6463, Vol. 38, no 18, p. 3417-3421Article in journal (Refereed)
    Abstract [en]

    We report on the creation and propagation of ion-acoustic solitary waves in a high power pulsed magnetron sputtering discharge. A dense localized plasma is created by applying high energy pulses (4-12 J) of length; approximate to 70 mu s, at a repetition frequency of 50 pulses per second, to a planar magnetron sputtering source. The temporal behaviour of the electron density, measured by a Langmuir probe, shows solitary waves travelling away from the magnetron target. The velocity of the waves depends on the gas pressure but is roughly independent of the pulse energy.

  • 47.
    Gylfason, Kristinn B.
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Antelius, Mikael
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    An apodized surface grating coupler enabling the fabrication of silicon photonic nanowire sensor circuits in one lithography step2011In: Proceedings IEEE International Conference on Solid-State Sensors, Actuators,and Microsystems (Transducers), Beijing, China: IEEE , 2011, p. 1539-1541Conference paper (Other academic)
    Abstract [en]

    We present the design, fabrication, and experimental characterization of a silicon surface grating coupler that enables the creation of complete photonic nanowire sensor circuits in a single lithography step on a standard SOI wafer. This advance is achieved without sacrifices in the coupling efficiency through the use of an apodization algorithm that tunes the width of each gap and bar in the grating. This design optimization provides a high light coupling efficiency and a low back reflection with a grating etched fully through the SOI device layer. We experimentally demonstrate a coupling efficiency of 35% on a standard SOI substrate at a wavelength of 1536 nm, and show that with an optimized buried oxide (BOX) thickness, a coupling efficiency of 72% could be achieved.

  • 48.
    Gylfason, Kristinn B.
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Carlborg, Carl Fredrik
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Kazmierczak, Andrzej
    Dortu, Fabian
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Vivien, Laurent
    Barrios, Carlos A.
    Wijngaart, Wouter van der
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Athermal Optical Slot-Waveguides for Temperature Insensitive Biosensing2010Conference paper (Other academic)
  • 49.
    Gylfason, Kristinn B.
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Carlborg, Carl Fredrik
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Kazmierczak, Andrzej
    Dortu, Fabian
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Vivien, Laurent
    Ronan, Gerry
    Barrios, Carlos A.
    Wijngaart, Wouter van der
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    A packaged optical slot-waveguide ring resonator sensor array for multiplex assays in Labs-on-Chip2010Conference paper (Refereed)
  • 50.
    Gylfason, Kristinn B.
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Carlborg, Carl Fredrik
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Kazmierczak, Andrzej
    Dortu, Fabian
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Vivien, Laurent
    Ronan, Gerry
    Barrios, Carlos A.
    Wijngaart, Wouter van der
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    A packaged optical slot-waveguide ring resonator sensor array for multiplex assays in Labs-on-Chip2010In: 8th Micronano System Workshop, 2010Conference paper (Other academic)
12 1 - 50 of 95
CiteExportLink to result list
Permanent link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf