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  • 1.
    Bertilson, Michael
    et al.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    von Hofsten, Olov
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Lindblom, Magnus
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Wilhein, Thomas
    Hertz, Hans M.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Vogt, Ulrich
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Compact high-resolution differential interference contrast soft x-ray microscopy2008In: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Vol. 92, no 064104Article in journal (Refereed)
    Abstract [en]

    We demonstrate high-resolution x-ray differential interference contrast (DIC) in a compact soft x-ray microscope. Phase contrast imaging is enabled by the use of a diffractive optical element objective which is matched to the coherence conditions in the microscope setup. The performance of the diffractive optical element objective is evaluated in comparison with a normal zone plate by imaging of a nickel siemens star pattern and linear grating test objects. Images obtained with the DIC optic exhibit typical DIC enhancement in addition to the normal absorption contrast. Contrast transfer functions based on modulation measurements in the obtained images show that the DIC optic gives a significant increase in contrast without reducing the spatial resolution. The phase contrast operation mode now available for our compact soft x-ray microscope will be a useful tool for future studies of samples with low absorption contrast.

  • 2.
    Bertilson, Michael
    et al.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    von Hofsten, Olov
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Thieme, J.
    Lindblom, Magnus
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Holmberg, Anders
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Takman, Per
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Vogt, Ulrich
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Hertz, Hans
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    First application experiments with the Stockholm compact soft x-ray microscope2009In: Journal of Physics, Conference Series, ISSN 1742-6588, E-ISSN 1742-6596, Vol. 186Article in journal (Refereed)
    Abstract [en]

    Most soft x-ray microscopes operating in the water window (lambda = 2.3 - 4.4 nm) rely on synchrotron radiation sources. In the future we believe scientists will use soft x-ray microscopes as one imaging tool among others in their own laboratory. For this purpose we have developed a full field soft x-ray microscope with a laser-plasma source compact enough to fit on an optical table. In this contribution we describe the current status of this microscope now featuring stable operation at lambda = 3.37 nm or lambda = 2.48 nm. In-house fabricated single element zone plates offering the possibility to perform phase contrast imaging have been implemented. We also report on the first application experiments for compact soft x-ray microscopy, including results from studies of clay minerals and colloids existing in nature and results from phase optics experiments. Planned upgrades of the microscope include increasing the source brightness, implementing more efficient condenser optics, and installing a cryo sample stage for tomography. These improvements will open up for further applications, especially in the field of biological imaging.

  • 3.
    Chubarova, Elena
    et al.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Nilsson, Daniel
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Lindblom, Magnus
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Reinspach, Julia
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Birch, Jens
    Department of Physics, Chemistry, and Biology, Linköping University.
    Vogt, Ulrich
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Hertz, Hans M.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Holmberg, Anders
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Platinum zone plates for hard X-ray applications2011In: Microelectronic Engineering, ISSN 0167-9317, E-ISSN 1873-5568, Vol. 88, no 10, p. 3123-3126Article in journal (Refereed)
    Abstract [en]

    We describe the fabrication and evaluation of platinum zone plates for 5–12 kV X-ray imaging and focusing. These nano-scale circular periodic structures are fabricated by filling an e-beam generated mold with Pt in an electroplating process. The plating recipe is described. The resulting zone plates, having outer zone widths of 100 and 50 nm, show good uniformity and high aspect ratio. Their diffraction efficiencies are 50–70% of the theoretical, as measured at the European Synchrotron Radiation Facility. Platinum shows promise to become an attractive alternative to present hard X-ray zone plate materials due to its nano-structuring properties and the potential for zone-plate operation at higher temperatures.

  • 4.
    Ergül, Adem
    et al.
    KTH, School of Engineering Sciences (SCI), Applied Physics.
    Schaeffer, David
    KTH.
    Lindblom, Magnus
    KTH, School of Engineering Sciences (SCI), Applied Physics.
    Haviland, David B.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Nanostructure Physics.
    Lidmar, Jack
    KTH, School of Engineering Sciences (SCI), Theoretical Physics, Statistical Physics.
    Johansson, Jan
    Phase sticking in one-dimensional Josephson junction chains2013In: Physical Review B. Condensed Matter and Materials Physics, ISSN 1098-0121, E-ISSN 1550-235X, Vol. 88, no 10, p. 104501-Article in journal (Refereed)
    Abstract [en]

    We studied current-voltage characteristics of long one-dimensional Josephson junction chains with Josephson energy much larger than charging energy, E-J >> E-C. In this regime, typical I-V curves of the samples consist of a supercurrent-like branch at low-bias voltages followed by a voltage-independent chain current branch, I-chain at high bias. Our experiments showed that I-chain is not only voltage-independent but it is also practically temperature-independent up to T = 0.7T(C). We have successfully model the transport properties in these chains using a capacitively shunted junction model with nonlinear damping.

  • 5.
    Hertz, Hans
    et al.
    KTH, School of Engineering Sciences (SCI), Applied Physics.
    Bertilson, Michael
    KTH, School of Engineering Sciences (SCI), Applied Physics.
    Chubarova, Elena
    KTH, School of Engineering Sciences (SCI), Applied Physics.
    von Hofsten, Olof
    KTH, School of Engineering Sciences (SCI), Applied Physics.
    Holmberg, Anders
    KTH, School of Engineering Sciences (SCI), Applied Physics.
    Lindblom, Magnus
    KTH, School of Engineering Sciences (SCI), Applied Physics.
    Reinspach, Julia
    KTH, School of Engineering Sciences (SCI), Applied Physics.
    Vogt, Ulrich
    Laboratory Water-Window X-Ray Microscopy2009In: 2009 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS: VOLS 1 AND 2, 2009, p. 48-48Conference paper (Refereed)
    Abstract [en]

    We review recent progress in laboratory water-window microscopy including 250 W/0.8 ns/2 kHz laser-plasma liquid-jet sources, 13-nm zone width diffractive optics, diffractive optical elements for phase-contrast microscopy, <25-nm resolution microscopy using compound zone plates, tomography and applications in soil science.

  • 6.
    Hertz, Hans M.
    et al.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Bertilson, Michael C.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Chubarova, Elena
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Hemberg, Oscar
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Hofsten, Olov Von
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Holmberg, Anders
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Lindblom, Magnus
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Lundström, Ulf
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Nilsson, Daniel
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Otendal, Mikael
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Reinspach, Julia
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Skoglund, Peter
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Takman, Per
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Tuohimaa, Tomi
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Vogt, Ulrich
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Laboratory X-ray micro- and nano-imaging2009In: Frontiers in Optics (FiO) 2009, Optical Society of America, 2009Conference paper (Refereed)
    Abstract [en]

    We summarize recent progress in laboratory x-ray imaging systems based on compact high-brightness liquid-jet sources, including <25 nm soft x-ray zone-plate microscopy and <10 μm (lens-free) hard x-ray phase-contrast imaging.

  • 7.
    Hertz, Hans M.
    et al.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Bertilson, Michael
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Chubarova, Elena
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Ewald, Johannes
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Gleber, S-C
    Hemberg, Oscar
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Henriksson, M.
    von Hofsten, Olov
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Holmberg, Anders
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Lindblom, Magnus
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Mudry, Emeric
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Otendal, Mikael
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Reinspach, Julia
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Schlie, Moritz Gustav
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Skoglund, Peter
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Takman, Per
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Thieme, J.
    Sedlmair, J.
    Tjörnhammar, Richard
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Tuohimaa, Tomi
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Vita, M.
    Vogt, Ulrich
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Laboratory x-ray micro imaging: Sources, optics, systems and applications2009In: Journal of Physics, Conference Series, ISSN 1742-6588, E-ISSN 1742-6596, Vol. 186Article in journal (Refereed)
    Abstract [en]

    We summarize the recent progress in laboratory-scale soft and hard x-ray micro imaging in Stockholm. Our soft x-ray work is based on liquid-jet laser-plasma sources which are combined with diffractive and multilayer optics to form laboratory x-ray microscopes. In the hard x-ray regime the imaging is based on a liquid-metal-jet electron-impact source which provides the necessary coherence to allow phase-contrast imaging with high fidelity.

  • 8.
    Holmberg, Anders
    et al.
    KTH, School of Engineering Sciences (SCI), Applied Physics.
    Lindblom, Magnus
    KTH, School of Engineering Sciences (SCI), Applied Physics.
    Hertz, Hans M.
    KTH, School of Engineering Sciences (SCI), Applied Physics.
    Controlled electroplating for high-aspect-ratio zone plate fabrication2006In: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 24, no 6, p. 2592-2596Article in journal (Refereed)
    Abstract [en]

    The authors report a method for monitoring, control, and end-point detection of electroplating in nanostructures. The method is demonstrated on nickel plating into polymer molds, which is an important process in the fabrication of soft x-ray zone-plate diffractive optics. The lack of reproducibility presently limits the achievable nickel aspect ratio and, thus, reduces the zone-plate diffraction efficiency. The reported method provides reproducible plating via real-time control of the plating rate. It combines in situ light transmission measurements with current measurements to determine the thickness of the growing layer. The accuracy of the thickness prediction was better than ±4% (1) for 100–300  nm nickel layers. Furthermore, a slight change in the light transmission signal indicates when a gratinglike zone-plate structure is slightly overplated and the plating should be stopped. This end-point detection provides the optimal filling of high-aspect-ratio molds for improved diffraction efficiency.

  • 9.
    Holmberg, Anders
    et al.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Lindblom, Magnus
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Reinspach, Julia
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Bertilson, Michael
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Hertz, Hans M.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Soft x-ray zone plate fabrication at KTH, Stockholm2009In: Journal of Physics, Conference Series, ISSN 1742-6588, E-ISSN 1742-6596, Vol. 186Article in journal (Refereed)
    Abstract [en]

    We present the status of our zone plate and test object fabrication processes along with the latest fabricated components. With our nickel process, zone plates with outermost zone width of 20 nm and zone height of 90 nm have been fabricated. A gold electroplating process has recently been introduced for the fabrication of test objects. The first result for gold gratings with 70 nm period and 135 nm height is shown.

  • 10.
    Holmberg, Anders
    et al.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Reinspach, Julia
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Lindblom, Magnus
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Chubarova, Elena
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Bertilson, Michael
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    von Hofsten, Olov
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Nilsson, Daniel
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Selin, Mårten
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Larsson, Daniel
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Skoglund Lindberg, Peter
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Lundstrom, Ulf
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Takman, Per
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Vogt, Ulrich
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Hertz, Hans
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Towards 10-nm Soft X-Ray Zone Plate Fabrication2011Conference paper (Refereed)
    Abstract [en]

    In this paper the latest efforts to improve our nanofabrication process for soft x‐ray zone plates is presented. The resolving power, which is proportional to the smallest outermost zone width of the zone plate, is increased by introducing cold development of the electron beam resist that is used for the patterning. With this process we have fabricated Ni zone plates with 13‐nm outermost zone and shown potential for making 11‐nm half‐pitch lines in the electron beam resist. Maintaining the diffraction efficiency of the zone plate is a great concern when the outermost zone width is decreased. To resolve this problem we have developed the so‐called Ni‐Ge zone plate in which the zone plate is build up by Ni and Ge, resulting in an increase of the diffraction efficiency. In a proof‐of‐principle experiment with 25‐nm Ni‐Ge zone plates, we have shown a doubling of the diffraction efficiency. When combined with cold development, the Ni‐Ge process has been shown to work down to 16‐nm half‐pitch. It is plausible that further refinement of the process will make it possible to go to 10‐nm outermost zone widths.

  • 11.
    Lindblom, Magnus
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Nanofabrication of Diffractive Soft X-ray Optics2009Doctoral thesis, comprehensive summary (Other academic)
    Abstract [en]

    This thesis summarizes the present status of the nanofabrication of diffractive optics, i.e. zone plates, and test objects for soft x-ray microscopy at KTH. The emphasis is on new and improved fabrication processes for nickel and germanium zone plates. A new concept in which nickel and germanium are combined in a zone plate is also presented. The main techniques used in the fabrication are electron beam lithography for the patterning, followed by plasma etching and electroplating for the structuring of the optical materials. The process for fabricating nickel zone plates has been significantly improved. The reproducibility of the electroplating step has been increased by the implementation of an in-situ rate measurement and an end-point detection method. We have also shown that pulse plating can be used to obtain zone plates with a uniform height profile. New plating mold materials have been introduced and electron-beam curing of the molds has been investigated and implemented to increase their mechanical stability so that pattern collapse in the electroplating step can be avoided. The introduction of cold development has improved the achievable resolution of the process. This has enabled the fabrication of zone plates with outermost zone widths down to 16 nm. The nickel process has also recently been adapted to fabrication of gold structures intended for test objects and hard x-ray zone plates. For the fabrication of germanium zone plates we developed a highly anisotropic plasma-etch process using Cl2 feed and sidewall passivation. Germanium zone plates have been fabricated with zone widths down to 30 nm. The diffraction efficiency is comparable to that of nickel zone plates, but the process does not involve electroplating and thus has for potential for highyield fabrication. The combination of nickel and germanium is a new fabrication concept that provides a means to achieve high diffraction efficiency even for thin nickel. The idea is to fabricate a nickel zone plate on a germanium film. The nickel zone plate itself is then used as etch mask for a highly selective CHF3- plasma etch into the germanium layer. Proof of principle experiments showed an efficiency increase of about a factor of two for nickel zone plates with a 50- nm nickel thickness.

  • 12.
    Lindblom, Magnus
    et al.
    KTH, School of Engineering Sciences (SCI), Applied Physics.
    Hertz, Hans M.
    KTH, School of Engineering Sciences (SCI), Applied Physics.
    Holmberg, Anders
    KTH, School of Engineering Sciences (SCI), Applied Physics.
    Pulse reverse electroplating for uniform nickel height in zone plates2006In: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 24, p. 2848-Article in journal (Refereed)
    Abstract [en]

    Nickelsoft x-ray zone plates are fabricated by through-mask electroplating. Theauthors report on how a uniform nickel thickness can beobtained over the entire zone plate using pulse and pulsereverse plating. If the plating is carried out at aconstant current the nickel thickness has been observed to decreasewith radius. This results in lower outer zones and reduceddiffraction efficiency in the outer parts of the zone plates.Here they show that the height profile can be controlledby adjusting the current density of the pulses. A highcurrent density is found to primarily affect the edges whilea low current density was observed to affect the centralparts of the structures. This is true for both cathodicand anodic currents, which means that local plating and dissolutionrates can be adjusted to obtain a uniform mass distribution.

  • 13.
    Lindblom, Magnus
    et al.
    KTH, School of Engineering Sciences (SCI), Applied Physics.
    Hertz, Hans M.
    KTH, School of Engineering Sciences (SCI), Applied Physics.
    Holmberg, Anders
    KTH, School of Engineering Sciences (SCI), Applied Physics.
    SU8 plating mold for high aspect-ratio nickel zone plates2007In: Microelectronic Engineering, ISSN 0167-9317, E-ISSN 1873-5568, Vol. 84, p. 1136-Article in journal (Refereed)
    Abstract [en]

    Nickel zone plates are fabricated by electrodeposition into a mold with high aspect ratio and narrow line width. This process requires high-mechanical stability of the mold to avoid pattern collapse in the plating bath. In the present paper we demonstrate how SU-8 can be used as plating mold material in a tri-layer resist to fabricate 35-nm half-pitch nickel gratings with an aspect ratio exceeding 11:1. To attain sufficient stability of the mold the SU-8 was cured by e-beam exposure with a dose of 25 mC/cm2 at 5-keV electron energy.

  • 14.
    Lindblom, Magnus
    et al.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Reinspach, Julia
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Bertilson, Michael
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    von Hofsten, Olov
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Hertz, Hans
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Holmberg, Anders
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Nickel-germanium soft x-ray zone plates2009In: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 27, no 3, p. L5-L7Article in journal (Refereed)
    Abstract [en]

    This article presents a fabrication process for soft x-ray zone plates in which nickel and germanium are combined to achieve high diffraction efficiency. A nickel zone plate is first fabricated on a germanium film and then used as a hardmask for a CHF3-plasma etch into the germanium. Zone plates with 50-60 nm nickel and 110-150 nm of germanium are presented. The measured diffraction efficiencies were 10%-11% at lambda=2.88 nm, which shows that high efficiency is possible even with thin nickel. Thus, the method has a potential for improving the efficiency of high-resolution zone plates for which the high-aspect-ratio structuring of nickel is difficult.

  • 15.
    Lindblom, Magnus
    et al.
    KTH, School of Engineering Sciences (SCI), Applied Physics.
    Reinspach, Julia
    KTH, School of Engineering Sciences (SCI), Applied Physics.
    von Hofsten, Olov
    KTH, School of Engineering Sciences (SCI), Applied Physics.
    Bertilson, Michael
    KTH, School of Engineering Sciences (SCI), Applied Physics.
    Hertz, Hans M.
    KTH, School of Engineering Sciences (SCI), Applied Physics.
    Holmberg, Anders
    KTH, School of Engineering Sciences (SCI), Applied Physics.
    High-aspect-ratio germanium zone plates fabricated by ractive ion etching in chlorine2009In: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 27, no 2, p. L1-L3Article in journal (Refereed)
    Abstract [en]

    This article describes the fabrication of soft x-ray germanium zone plates with a process based on reactive ion etching (RIE) in Cl-2. A high degree of anisotropy is achieved by sidewall passivation through cyclic exposure to air. This enables structuring of higher aspect ratios than with earlier reported fabrication processes for germanium zone plates. The results include a zone plate with a 30 nm outermost zone width and a germanium thickness of 310 tun having a first-order diffraction efficiency of 70% of the theoretical value. 25 nm half-pitch gratings were also etched into 310 nut of germanium. Compared to the electroplating process for the commonly used nickel zone plates, the RIE process with Cl-2, for germanium is a major improvement in terms of process reproducibility.

  • 16.
    Lindblom, Magnus
    et al.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Tuohimaa, Tomi
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Holmberg, Anders
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Wilhein, Thomas
    Hertz, Hans M.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Vogt, Ulrich
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    High-resolution differential-interference-contrast x-ray zone plates: Design and Fabrication2007In: Spectrochimica Acta Part B - Atomic Spectroscopy, ISSN 0584-8547, E-ISSN 1873-3565, Vol. 62, no 6-7, p. 539-543Article in journal (Refereed)
    Abstract [en]

    Differential interference contrast is a potentially powerful technique for contrast enhancement in soft X-ray microscopy. We describe the design and fabrication of single-element diffractive optical elements suitable as objectives for high-resolution differential interference contrast microscopy in the water-window spectral range. A one-dimensional pattern calculation followed by an extension to two dimensions results in a pattern resolution of 1 nm, which is well below fabrication accuracy. The same fabrication process as for normal zone plates is applicable, but special care must be taken when converting the calculated pattern to a code for e-beam lithography.

  • 17.
    Reinspach, Julia
    et al.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Lindblom, Magnus
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Bertilson, Michael
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    von Hofsten, Olov
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Hertz, Hans M.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Holmberg, Anders
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    13 nm high-efficiency nickel-germanium soft x-ray zone plates2011In: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 29, no 1, p. 011012-Article in journal (Refereed)
    Abstract [en]

    Zone plates are used as objectives for high-resolution x-ray microscopy. Both high resolution and high diffraction efficiency are crucial parameters for the performance of the lens. In this article, the authors demonstrate the fabrication of high-resolution soft x-ray zone plates with improved diffraction efficiency by combining a nanofabrication process for high resolution with a process for high diffraction efficiency. High-resolution Ni zone plates are fabricated by applying cold development of electron-beam-patterned ZEP 7000 in a trilayer-resist process combined with Ni-electroplating. High-diffraction-efficiency Ni-Ge zone plates are realized by fabricating the Ni zone plate on a Ge film and then using the finished zone plate as etch mask for anisotropic CHF3 reactive ion etching into the underlying Ge, resulting in a Ni-Ge zone plate with improved aspect ratio and zone plate efficiency. Ni-Ge zone plates with 13 nm outermost zone width composed of 35 nm Ni on top of 45 nm Ge were fabricated. For comparable Ni and Ni-Ge zone plates with an outermost zone width of 15 nm, the diffraction efficiency was measured to be 2.4% and 4.3%, respectively, i.e., an enhancement of a factor of 2.

  • 18.
    Reinspach, Julia
    et al.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Lindblom, Magnus
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    von Hofsten, Olof
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Bertilson, Michael
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Hertz, Hans M.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Holmberg, Anders
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Process development for improved soft X-ray zone plates2010In: Microelectronic Engineering, ISSN 0167-9317, E-ISSN 1873-5568, Vol. 87, no 5-8, p. 1583-1586Article in journal (Refereed)
    Abstract [en]

    We demonstrate two nanofabrication methods which improve the diffraction efficiency of high-resolution soft X-ray nickel zone plates. First, pulse electroplating is shown to result in uniform diffraction efficiency over the entire zone-plate area. A resulting enhancement of the total efficiency of 20% compared to conventional DC plating was measured. Second, we demonstrate that a high-resolution cold development process can be combined with efficiency-enhancing dry etching into an underlying germanium film. We present 16 nm half-pitch gratings composed of 50 nm nickel on top of 50 nm germanium.

  • 19.
    Reinspach, Julia
    et al.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Lindblom, Magnus
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    von Hofsten, Olov
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Bertilson, Michael
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Hertz, Hans M.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Holmberg, Anders
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Cold-developed electron-beam-patterned ZEP 7000 for fabrication of 13 nm nickel zone plates2009In: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 27, no 6, p. 2593-2596Article in journal (Refereed)
    Abstract [en]

    Cold development was applied to improve the resolution in a trilayer resist that is used for the fabrication of state-of-the-art soft x-ray microscopy zone plates. By decreasing the temperature of the hexyl acetate developer to -50 degrees C, 11 nm half-pitch gratings have been resolved in the electron-beam resist ZEP 7000. 12 nm half-pitch gratings have been successfully transferred, via the intermediate SiO2 hardmask, into the bottom polyimide layer by CHF3 and O-2 reactive ion etching. The trilayer resist, including optimized cold development, has finally been used in an electroplating-based process for the fabrication of nickel zone plates. Zone plates with down to 13 nm outermost zone width have been fabricated and 2.4% average groove diffraction efficiency has been measured for zone plates with 15 nm outermost zone width and a nickel height of 55 nm.

  • 20.
    Takman, Per A. C.
    et al.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Stollberg, Heide
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Johansson, Göran A.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Holmberg, Anders
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Lindblom, Magnus
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Hertz, Hans M.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Sub 30-nm resolution compact x-ray microscopy2006In: Journal of Microscopy, ISSN 0022-2720, E-ISSN 1365-2818Article in journal (Other academic)
  • 21.
    Takman, Per
    et al.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Stollberg, Heide
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Johansson, Göran A.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Holmberg, Anders
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Lindblom, Magnus
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Hertz, Hans M.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    High-resolution compact x-ray microscopy2007In: Journal of Microscopy, ISSN 0022-2720, E-ISSN 1365-2818, Vol. 226, no 2, p. 175-181Article in journal (Refereed)
    Abstract [en]

    We demonstrate compact full-field soft X-ray transmission microscopy with sub 60-nm resolution operating at λ= 2.48 nm. The microscope is based on a 100-Hz regenerative liquid-nitrogen-jet laser-plasma source in combination with a condenser zone plate and a micro-zone plate objective for high-resolution imaging onto a 2048 × 2048 pixel CCD detector. The sample holder is mounted in a helium atmosphere and allows imaging of both dry and wet specimens. The microscope design enables fast sample switching and the sample can be pre-aligned using a visible-light microscope. High-quality images can be acquired with exposure times of less than 5 min. We demonstrate the performance of the microscope using both dry and wet samples.

  • 22.
    Vogt, Ulrich
    et al.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Lindblom, Magnus
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Jansson, Per A. C.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Tuohimaa, Tomi T.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Holmberg, Anders
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Hertz, Hans
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Wieland, M.
    Wilhein, M.
    Towards Soft X-Ray Phase-Sensitive Imaging with Diffractive Optical Elements2006In: Proc. 8th International Conference X-ray Microscopy, 2006, p. 91-93Conference paper (Refereed)
    Abstract [en]

    In this contribution we present the first diffractive optical elements for soft x-ray differential interference contrast microscopy.Due to an improved calculation method the nanofabrication accuracy of these optics is the same as for comparable normal zoneplate optics with the same outermost zone width. Different diffractive optical elements were fabricated with outermost zone widthof 100 nm, different spot separation directions and different phase relations between the two spots. The optics were successfullyused in experiments both at the synchrotron radiation based TWINMIC microscope and at the Stockholm compact liquid-nitrogenlaser-plasma source based microscope.

  • 23.
    Vogt, Ulrich
    et al.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Lindblom, Magnus
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Jansson, Per
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Tuohimaa, Tomi
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Holmberg, Anders
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Hertz, Hans
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Wieland, M.
    University of Applied Sciences Koblenz, Rhein Ahr Campus Remagen.
    Wilhein, Thomas
    University of Applied Sciences Koblenz, Rhein Ahr Campus Remagen.
    Single-optical-element soft-x-ray interferometry with a laser-plasma x-ray source2005In: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 30, no 15, p. 2167-Article in journal (Refereed)
    Abstract [en]

    We report on a compact interferometer for the water-window soft-x-ray range that is suitable for operation with laser-plasma sources. The interferometer consists of a single diffractive optical element that focuses impinging x rays to two focal spots. The light from these two secondary sources forms the interference pattern. The interferometer was operated with a liquid-nitrogen jet laser-plasma source at lambda = 2.88 nm. Scalar wave-field propagation was used to simulate the interference pattern, showing good correspondence between theoretical and experimental results. The diffractive optical element can simultaneously be used as an imaging optic, and we demonstrate soft-x-ray microscopy with interferometric contrast enhancement of a phase object.

  • 24.
    von Hofsten, Olov
    et al.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Bertilson, Michael
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Lindblom, Magnus
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Holmberg, Anders
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Hertz, Hans M.
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Vogt, Ulrich
    KTH, School of Engineering Sciences (SCI), Applied Physics, Biomedical and X-ray Physics.
    Compact phase-contrast soft X-ray microscopy2009In: Journal of Physics, Conference Series, ISSN 1742-6588, E-ISSN 1742-6596, Vol. 186Article in journal (Refereed)
    Abstract [en]

    For nearly all elements, the real part, delta, of the complex index of refraction n (n = 1 - delta + i beta) is larger than the imaginary part, beta, in the x-ray region. Since only beta is used in absorption contrast, phase-contrast imaging techniques which give access to delta are very important. In this paper we present two different implementations of phase contrast in our compact soft x-ray microscope, differential-interference contrast and Zemike phase contrast.

1 - 24 of 24
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