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  • 1.
    Antelius, Mikael
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    An apodized SOI waveguide-to-fiber surface grating coupler for single lithography silicon photonics2011In: Optics Express, ISSN 1094-4087, E-ISSN 1094-4087, Vol. 19, no 4, p. 3592-3598Article in journal (Refereed)
    Abstract [en]

    We present the design, fabrication, and characterization of a grating for coupling between a single mode silica fiber and the TE mode in a silicon photonic waveguide on a silicon on insulator (SOI) substrate. The grating is etched completely through the silicon device layer, thus permitting the fabrication of through-etched surface coupled silicon nanophotonic circuits in a single lithography step. Furthermore, the grating is apodized to match the diffracted wave to the mode profile of the fiber. We experimentally demonstrate a coupling efficiency of 35% with a 1 dB bandwidth of 47 nm at 1536 nm on a standard SOI substrate. Furthermore, we show by simulation that with an optimized buried oxide thickness, a coupling efficiency of 72% and a 1 dB bandwidth of 38 nm at 1550 nm is achievable. This is, to our knowledge, the highest simulated coupling efficiency for single-etch TE-mode grating couplers. In particular, simulations show that apodizing a conventional periodic through-etched grating decreases the back-reflection into the waveguide from 21% to 0.1%.

  • 2.
    Antelius, Mikael
    et al.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    An apodized surface grating coupler enabling single lithography silicon photonic nanowire sensors2012Conference paper (Other academic)
  • 3.
    Antelius, Mikael
    et al.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Lapisa, Martin
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Niklaus, Frank
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Holgado, Miguel
    Universidad Politécnica de Madrid.
    Casquel, Rafael
    Universidad Politécnica de Madrid.
    Sanza, Francisco J.
    Universidad Politécnica de Madrid.
    Griol, Amadeu
    Universidad Politécnica de Valencia.
    Bernier, Damien
    Multitel.
    Dortu, Fabian
    Multitel.
    Cáceres, Santiago
    ETRA I+D.
    Aparicio, Francisco J.
    Instituto de Ciencia de Materiales de Sevilla CSIC-Universidad de Sevilla.
    Alcaire, María
    Instituto de Ciencia de Materiales de Sevilla CSIC-Universidad de Sevilla.
    González-Elipe, Agustín R.
    Instituto de Ciencia de Materiales de Sevilla CSIC-Universidad de Sevilla.
    Barranco, Angel
    Instituto de Ciencia de Materiales de Sevilla CSIC-Universidad de Sevilla.
    A photonic dye-based sensing system on a chip produced at wafer scaleArticle in journal (Other academic)
  • 4.
    Antelius, Mikael
    et al.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Lapisa, Martin
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Niklaus, Frank
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Holgado, Miguel
    Casquel, Rafael
    Sanza, Francisco J.
    Griol, Amadeu
    Bernier, Damien
    Dortu, Fabian
    Cáceres, Santiago
    Aparicio, Francisco J.
    Alcaire, Maria
    Gonzáles-Elipe, Agustin R.
    Barranco, Angel
    A wafer-scale, dye-based, photonic sensing systemManuscript (preprint) (Other academic)
  • 5.
    Aparicio, Francisco
    et al.
    Consejo Superior de Investigaciones Científicas (Spain).
    Holgado, Miguel
    Univ. Politécnica de Madrid.
    Blaszczyk-Lezak, Iwona
    Instituto de Ciencia de Materiales de Sevilla.
    Borras, Ana
    Instituto de Ciencia de Materiales de Sevilla.
    Griol, Amadeu
    Univ. Politécnica de Valencia.
    Barrios, Carlos Angulo
    Univ. Politécnica de Valencia.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Gonzalez-Elipe, Agustín R.
    Instituto de Ciencia de Materiales de Sevilla.
    Barranco, Angel
    Incorporation of luminescent nanometric films in photonic crystals and devices for the development of photonic sensors2010Conference paper (Refereed)
    Abstract [en]

    Dye molecules embedded in different matrices in the form of thin films are the basis of specific materials used for laser cavities, optical filters, optical gas sensors, etc. In the present communication we discuss a new methodology based on the remote microwave plasma assisted deposition of dye containing thin films that circumvent the above mentioned problems. It permits a tailored synthesis of optically active nanometric thin films containing dye molecules which are active as fluorescence emitters (i.e., coloured and fluorescent films). The principle of this new procedure is the partial polymerization of dye molecules that are evaporated over a substrate while exposed to a remote microwave Ar plasma. As a result of this process a polymeric thin film is produced in one step where some dye molecules keep intact their optical activity (although eventually, their optical response can be slightly modified by matrix effects). This methodology has been recently used for the deposition of novel plasma nanocomposites containing non-aggregated laser dyes to maximize the fluorescent emission of the materials and for the fabrication of optical NO2 sensing nanocomposites. To illustrate the possibilities of the technique we present here results for different fluorescent dye molecules, as perylene dyes, and several xanthene and oxazine derivative cationic dyes which are typically used as gain media in tuneable laser dyes. The luminescent, optical and sensing properties of these dye containing nanocomposites will be presented. These active optical layers are being developed for the fabrication of photonic sensor devices, optical filters and photonic chips (PHODYE EU Project). This is due to the full compatibility of the synthetic methodology with the present integrated microelectronic and optoelectronic technology. The possibilities for the fabrication of photonic devices integrating these active optical layers will be demonstrated. Especial attention will be paid to recent results about the incorporation of the luminescent films in photonic crystals and about the conformal growth of luminescent planar defects within artificial opals.

  • 6. Aparicio, Francisco J.
    et al.
    Alcaire, Maria
    Gonzalez-Elipe, Agustin R.
    Barranco, Angel
    Holgado, Miguel
    Casquel, Rafael
    Sanza, Francisco J.
    Griol, Amadeu
    Bernier, Damien
    Dortu, Fabian
    Caceres, Santiago
    Antelius, Mikael
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems. APR Technol AB, Sweden.
    Lapisa, Martin
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems. Bosch Automot Elect, Germany.
    Sohlstrom, Hans
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Niklaus, Frank
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Dye-based photonic sensing systems2016In: Sensors and actuators. B, Chemical, ISSN 0925-4005, E-ISSN 1873-3077, Vol. 228, p. 649-657Article in journal (Refereed)
    Abstract [en]

    We report on dye-based photonic sensing systems which are fabricated and packaged at wafer scale. For the first time luminescent organic nanocomposite thin-films deposited by plasma technology are integrated in photonic sensing systems as active sensing elements. The realized dye-based photonic sensors include an environmental NO2 sensor and a sunlight ultraviolet light (UV) A+B sensor. The luminescent signal from the nanocomposite thin-films responds to changes in the environment and is selectively filtered by a photonic structure consisting of a Fabry-Perot cavity. The sensors are fabricated and packaged at wafer-scale, which makes the technology viable for volume manufacturing. Prototype photonic sensor systems have been tested in real-world scenarios. (C) 2016 Elsevier B.V. All rights reserved.

  • 7. Aparicio, Francisco J.
    et al.
    Holgado, Miguel
    Borras, Ana
    Blaszczyk-Lezak, Iwona
    Griol, Amadeu
    Barrios, Carlos A.
    Casquel, Rafael
    Sanza, Francisco J.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Antelius, Mikael
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Gonzalez-Elipe, Agustin R.
    Barranco, Angel
    Transparent Nanometric Organic Luminescent Films as UV-Active Components in Photonic Structures2011In: Advanced Materials, ISSN 0935-9648, E-ISSN 1521-4095, Vol. 23, no 6, p. 761-765Article in journal (Refereed)
    Abstract [en]

    A new kind of visible-blind organic thin-film material, consisting of a polymeric matrix with a high concentration of embedded 3-hydroxyflavone (3HF) dye molecules, that absorbs UV light and emits green light is presented. The thin films can be grown on sensitive substrates, including flexible polymers and paper. Their suitability as photonic active components in photonic devices is demonstrated.

  • 8. Barrios, C. A.
    et al.
    Holgado, M.
    Guarneros, O.
    Gylfason, Kristinn Björgvin
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Sanchez, B.
    Casquel, R.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Reconfiguration of microring resonators by liquid adhesion2008In: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Vol. 93, no 20, article id 203114Article in journal (Refereed)
    Abstract [en]

    We present a procedure to reconfigure microring resonators based on liquid surface adhesion. Droplets of organic solvents were deposited over Si3N4/SiO2 strip- and slot-waveguide ring resonators, and the transmission spectra were measured several hours after the evaporation of the droplets at room temperature. Our measurements show that the optical properties of the microrings are significantly modified by liquid adhered to the waveguides, persisting even 96 h after bulk evaporation. Liquid-solid interfacial forces slow down liquid evaporation at the nanoscale, enabling permanent photonic configurations. Rewriteability is achieved by removing the adhered liquid with heat.

  • 9.
    Barrios, Carlos A.
    et al.
    Univ Politecn Madrid, ETSI Telecomunicac, ISOM, E-28040 Madrid, Spain..
    Gylfason, Kristinn
    KTH, School of Electrical Engineering (EES).
    Sanchez, Benito
    Univ Politecn Valencia, NTC, Valencia 46022, Spain..
    Griol, Amadeu
    Univ Politecn Valencia, NTC, Valencia 46022, Spain..
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES).
    Holgado, M.
    Univ Politecn Madrid, Ctr Laser, Madrid 28031, Spain..
    Casquel, R.
    Univ Politecn Madrid, Ctr Laser, Madrid 28031, Spain..
    Slot-waveguide biochemical sensor (vol 32, pg 2080, 2007)2008In: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 33, no 21, p. 2554-2555Article in journal (Refereed)
    Abstract [en]

    The group index, instead of the effective index, is used to analyze the performance of a Si(3)N(4)-SiO(2) slot-waveguide microring refractive index sensor [Opt. Lett. 32, 3080 (2007)]. Assuming that the slot is fully filled with liquid, excellent agreement is found between experimental results and calculations.

  • 10. Barrios, Carlos Angulo
    et al.
    Banuls, Maria Jose
    Gonzalez-Pedro, Victoria
    Gylfason, Kristinn Björgvin
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Sanchez, Benito
    Griol, Amadeu
    Maquieira, Angel
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Holgado, Miquel
    Calquel, Raphael
    Label-free optical biosensing with slot-waveguides2008In: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 33, no 7, p. 708-710Article in journal (Refereed)
    Abstract [en]

    We demonstrate label-free molecule detection by using an integrated biosensor based on a Si3N4/SiO2 Slot-waveguide microring resonator. Bovine serum albumin (BSA) and anti-BSA molecular binding events on the sensor surface are monitored through the measurement of resonant wavelength shifts with varying biomolecule concentrations. The biosensor exhibited sensitivities of 1.8 and 3.2 nm/(ng/mm(2)) for the detection of anti-BSA and BSA, respectively. The estimated detection limits are 28 and 16 pg/mm(2) for anti-BSA and BSA, respectively, limited by wavelength resolution.

  • 11.
    Barrios, Carlos Angulo
    et al.
    Univ. Politécnica de Valencia.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Sanchez, Benito
    Griol, Amadeu
    Univ. Politécnica de Valencia.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Holgado, Miguel
    Univ. Politécnica de Madrid.
    Casquel, Rafael
    Integrated slot-waveguide microresonator for biochemical sensing2008In: Proceedings Europtrode IX, 2008Conference paper (Refereed)
  • 12. Barrios, Carlos Angulo
    et al.
    Gylfason, Kristinn Björgvin
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Sanchez, Benito
    Griol, Amadeu
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Holgado, Miquel
    Casquel, Raphael
    Slot-waveguide biochemical sensor2007In: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 32, no 21, p. 3080-3082Article in journal (Refereed)
    Abstract [en]

    We report an experimental demonstration of an integrated biochemical sensor based on a slot-waveguidemicroring resonator. The microresonator is fabricated on a Si3N4-SiO2 platform and operates at a wavelength of 1.3 mu m. The transmission spectrum of the sensor is measured with different ambient refractive indices ranging from n = 1. 33 to 1.42. A linear shift of the resonant wavelength with increasing ambient refractive index of 212 nm/refractive index units (RIU) is observed. The sensor detects a minimal refractive index variation of 2 X 10(-4) RIU.

  • 13. Barrios, Carlos Angulo
    et al.
    Sanchez, Benito
    Gylfason, Kristinn Björgvin
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Griol, Amadeu
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Holgado, Miquel
    Casquel, Raphael
    Demonstration of slot-waveguide structures on silicon nitride / silicon oxide platform2007In: Optics Express, ISSN 1094-4087, E-ISSN 1094-4087, Vol. 15, no 11, p. 6846-6856Article in journal (Refereed)
    Abstract [en]

    We report on the first demonstration of guiding light in vertical slot-waveguides on silicon nitride/silicon oxide material system. Integrated ring resonators and Fabry-Perot cavities have been fabricated and characterized in order to determine optical features of the slot-waveguides. Group index behavior evidences guiding and confinement in the low-index slot region at O-band (1260-1370nm) telecommunication wavelengths. Propagation losses of < 20 dB/cm have been measured for the transverse-electric mode of the slot-waveguides.

  • 14. Barrios, Carlos
    et al.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Sánches, Benito
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Griol, Amadeu
    Casquel, Rafael
    Holgado, Miguel
    Integrated Si3N4/SiO2 Slot-Waveguide Microresonators2007Conference paper (Refereed)
    Abstract [en]

    We demonstrate slot-waveguide microring resonators and Fabry-Perot microcavities on Si3N4/SiO2. Characterization indicates guiding and confinement in the waveguide nanometric-size low-index slot region at O-band (1260-1370nm) wavelengths. We measured propagation losses <20 dB/cm.

  • 15.
    Bengtsson, Mats
    et al.
    KTH, School of Electrical Engineering (EES), Signal Processing.
    Lilliesköld, Joakim
    KTH, School of Electrical Engineering (EES), Industrial Information and Control Systems.
    Norgren, Martin
    KTH, School of Electrical Engineering (EES), Electromagnetic Engineering.
    Skog, Isaac
    KTH, School of Electrical Engineering (EES), Signal Processing.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Developing and Implementing a Program Interfacing Project Course in Electrical Engineering2012Conference paper (Refereed)
    Abstract [en]

    In this paper, we describe the ideas behind a second-year Design-Build course in Electrical Engineering. Electrical Engineering is a theoretical subject, and in such it is difficult to maintain the theoretical level in project courses introduced too early in the program, especially when core subjects like electromagnetic field theory are involved. This issue is addressed and we also describe our approach for the assessment of the students. We also discuss the different goals that were set up prior to the course from a program perspective; how we reasoned when designing the course, the assessment structure, and the output once the course was implemented

  • 16.
    Carlborg, Carl Fredrik
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Wijngaart, Wouter van der
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Hill, Daniel
    Sanchez, Benito
    Griol, Amadeu
    Maire, Guillaume
    Dortu, Fabian
    Viviena, Laurent
    Stragier, Anne-Sophie
    Marris-Morini, Delphine
    Cassan, Eric
    Kazmierczak, Andrzej
    Giannone, Domenico
    Banuls, Mari­a José
    Gonzalez-Pedro, Victoria
    Maquieira, Angel
    Barrios, Carlos A.
    Holgado, Miguel
    Casquel, Rafael
    Ultrahigh sensitivity slot-waveguide biosensor on a highly integrated chip for simultaneous diagnosis of multiple diseases2008In: Medicinteknikdagarna, Gothenburg, 2008, 2008Conference paper (Other academic)
  • 17.
    Carlborg, Carl Fredrik
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Gylfason, Kristinn Björgvin
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Kazmierczak, Andrzej
    Dortu, Fabian
    Banuls Polo, Maria Jose
    Maquieira Catala, Angel
    Kresbach, Gerhard
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Moh, Thomas
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Vivien, Laurent
    Popplewell, Jon
    Ronan, Gerry
    Barrios, Carlos Angulo
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    van der Wijngaart, Wouter
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips2010In: Lab on a Chip, ISSN 1473-0197, E-ISSN 1473-0189, Vol. 10, no 3, p. 281-290Article in journal (Refereed)
    Abstract [en]

    We present the design, fabrication, and characterisation of an array of optical slot-waveguide ring resonator sensors, integrated with microfluidic sample handling in a compact cartridge, for multiplexed real-time label-free biosensing. Multiplexing not only enables high throughput, but also provides reference channels for drift compensation and control experiments. Our use of alignment tolerant surface gratings to couple light into the optical chip enables quick replacement of cartridges in the read-out instrument. Furthermore, our novel use of a dual surface-energy adhesive film to bond a hard plastic shell directly to the PDMS microfluidic network allows for fast and leak-tight assembly of compact cartridges with tightly spaced fluidic interconnects. The high sensitivity of the slot-waveguide resonators, combined with on-chip referencing and physical modelling, yields a volume refractive index detection limit of 5 x 10(-6) refractive index units (RIUs) and a surface mass density detection limit of 0.9 pg mm(-2), to our knowledge the best reported values for integrated planar ring resonators.

  • 18.
    Dubois, Valentin J.
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Antelius, Mikael
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    A single-lithography SOI rib waveguide sensing circuit with apodized low back-reflection surface grating fiber coupling2012In: SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS III / [ed] Laurent Vivien, Seppo K. Honkanen, Lorenzo Pavesi, Stefano Pelli, SPIE - International Society for Optical Engineering, 2012, Vol. 8431, p. 84311-84311Conference paper (Refereed)
    Abstract [en]

    We present a single-lithography Mach-Zehnder interferometer sensor circuit, with integrated low back-reflection input and output grating couplers. The low back-reflection is accomplished by a duty cycle apodization optimized for coupling light between single-mode silica fibers and the nanometric silicon-on-insulator (SOI) rib-waveguides. We discuss the design, fabrication, and characterization of the circuit. The apodization profile of the gratings is algorithmically generated using eigenmode expansion based simulations and the integrated waveguides, splitters, and combiners are designed using finite element simulations. The maximum simulated coupling efficiencies of the gratings are 70% and the multimode interference splitters and combiners have a footprint of only 19.2ᅵ4.5 ᅵm2. The devices are fabricated on an SOI wafer with a 220 nmdevice layer and 2 ᅵm buried oxide, by a single electron beam lithography and plasma etching. We characterize the devices in the wavelength range from 1460-1580 nm and show a grating pass-band ripple of only 0.06 dB and grating coupling efficiency of 40% at 1530 nm. The integrated Mach-Zehnder interferometer has an extinction ratio of -18 dB at 1530 nm and between -13 and -19 dB over the whole 1460-1580 nm range.

  • 19. Giannone, Domenico
    et al.
    Kazmierczak, Andrzej
    Dortu, Fabian
    Vivien, Laurent
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    High Performance Multichannel Photonic Biochip Sensors for Future Point of Care Diagnostics: an Overview on Two EU-Sponsored Projects2010In: SPIE Proc. 7715 BIOPHOTONICS - PHOTONIC SOLUTIONS FOR BETTER HEALTH CARE II / [ed] Jürgen Popp; Wolfgang Drexler; Valery V. Tuchin; Dennis L. Matthews, 2010, Vol. 7715, p. 77150U-1-77150U-12Conference paper (Refereed)
    Abstract [en]

    We present here research work on two optical biosensors which have been developed within two separate European projects (6(th) and 7(th) EU Framework Programmes). The biosensors are based on the idea of a disposable biochip, integrating photonics and microfluidics, optically interrogated by a multichannel interrogation platform. The objective is to develop versatile tools, suitable for performing screening tests at Point of Care or for example, at schools or in the field. The two projects explore different options in terms of optical design and different materials. While SABIO used Si(3)N(4)/SiO(2) ring resonators structures, P3SENS aims at the use of photonic crystal devices based on polymers, potentially a much more economical option. We discuss both approaches to show how they enable high sensitivity and multiple channel detection. The medium term objective is to develop a new detection system that has low cost and is portable but at the same time offering high sensitivity, selectivity and multiparametric detection from a sample containing various components (e. g. blood, serum, saliva, etc.). Most biological sensing devices already present on the market suffer from limitations in multichannel operation capability (either the detection of multiple analytes indicating a given pathology or the simultaneous detection of multiple pathologies). In other words, the number of different analytes that can be detected on a single chip is very limited. This limitation is a main issue addressed by the two projects. The excessive cost per test of conventional bio sensing devices is a second issue that is addressed.

  • 20.
    Gylfason, Kristinn B.
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Antelius, Mikael
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    An apodized surface grating coupler enabling the fabrication of silicon photonic nanowire sensor circuits in one lithography step2011In: Proceedings IEEE International Conference on Solid-State Sensors, Actuators,and Microsystems (Transducers), Beijing, China: IEEE , 2011, p. 1539-1541Conference paper (Other academic)
    Abstract [en]

    We present the design, fabrication, and experimental characterization of a silicon surface grating coupler that enables the creation of complete photonic nanowire sensor circuits in a single lithography step on a standard SOI wafer. This advance is achieved without sacrifices in the coupling efficiency through the use of an apodization algorithm that tunes the width of each gap and bar in the grating. This design optimization provides a high light coupling efficiency and a low back reflection with a grating etched fully through the SOI device layer. We experimentally demonstrate a coupling efficiency of 35% on a standard SOI substrate at a wavelength of 1536 nm, and show that with an optimized buried oxide (BOX) thickness, a coupling efficiency of 72% could be achieved.

  • 21.
    Gylfason, Kristinn B.
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Carlborg, Carl Fredrik
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Kazmierczak, Andrzej
    Dortu, Fabian
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Vivien, Laurent
    Barrios, Carlos A.
    Wijngaart, Wouter van der
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Athermal Optical Slot-Waveguides for Temperature Insensitive Biosensing2010Conference paper (Other academic)
  • 22.
    Gylfason, Kristinn B.
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Carlborg, Carl Fredrik
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Kazmierczak, Andrzej
    Dortu, Fabian
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Vivien, Laurent
    Ronan, Gerry
    Barrios, Carlos A.
    Wijngaart, Wouter van der
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    A packaged optical slot-waveguide ring resonator sensor array for multiplex assays in Labs-on-Chip2010Conference paper (Refereed)
  • 23.
    Gylfason, Kristinn B.
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Carlborg, Carl Fredrik
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Kazmierczak, Andrzej
    Dortu, Fabian
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Vivien, Laurent
    Ronan, Gerry
    Barrios, Carlos A.
    Wijngaart, Wouter van der
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    A packaged optical slot-waveguide ring resonator sensor array for multiplex assays in Labs-on-Chip2010In: 8th Micronano System Workshop, 2010Conference paper (Other academic)
  • 24.
    Gylfason, Kristinn B.
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Carlborg, Carl Fredrik
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Kazmierczak, Andzej
    Dortu, Fabian
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Vivien, Laurent
    Ronan, Gerry
    Barrios, Carlos A.
    Wijngaart, Wouter van der
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    A packaged optical slot-waveguide ring resonator sensor array for multiplex assays in labs-on-chip2009In: Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences, Chemical and Biological Microsystems Society , 2009, p. 2004-2006Conference paper (Refereed)
    Abstract [en]

    We present the design, fabrication, and characterization of a packaged array of individually addressable slot-waveguide ring resonator sensors in a compact cartridge for sensitive, label-free, multiplex assays. The novel use of a dual surfaceenergy adhesive film enables simple generic packaging method for multiple sensors in a single cartridge. The use of optical slot-waveguides, and drift compensation by on-chip light splitting to reference sensors, gives the best refractive-index limit of detection reported for planar ring resonator sensors.

  • 25.
    Gylfason, Kristinn B.
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Mola Romero, Albert
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Reducing the temperature sensitivity of SOI waveguide-based biosensors2012In: Silicon Photonics and Photonic Integrated Circuits III / [ed] Vivien, L; Honkanen, SK; Pavesi, L; Pelli, S, SPIE - International Society for Optical Engineering, 2012, Vol. 8431, p. 84310-84310Conference paper (Refereed)
    Abstract [en]

    Label-free photonic biosensors fabricated on silicon-on-insulator (SOI) can provide compact size, high evanescent field strength at the silicon waveguide surface, and volume fabrication potential. However, due to the large thermo optic coefficient of water-based biosamples, the sensors are temperature-sensitive. Consequently, active temperature control is usually used. However, for low cost applications, active temperature control is often not feasible. Here, we use the opposite polarity of the thermo-optic coefficients of silicon and water to demonstrate a photonic slot waveguide with a distribution of power between sample and silicon that aims to give athermal operation in water. Based on simulations, we made three waveguide designs close to the athermal point, and asymmetric integrated Mach- Zehnder interferometers for their characterization. The devices were fabricated on SOI with a 220 nm device layer and 2 ï¿œm buried oxide, by electron beam lithography of hydrogen silsesquioxane (HSQ) resist, and etching in a Cl2/HBr/O2/He plasma. With Cargile 50350 fused silica matching oil as top cladding, the group index of the three guides varies from 1.9 to 2.8 at 1550 nm. The temperature sensitivity of the devices varied from -70 to -160 pm/K under the same conditions. A temperature sensitivity of -2 pm/K is projected with water as top cladding.

  • 26.
    Gylfason, Kristinn B.
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Sanchez, Benito
    Griol, Amadeu
    Barrios, Carlos A.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Banuls, Maria José
    Gonzalez-Pedro, Victoria
    Maquieira, Angel
    Holgado, Miguel
    Casquel, Rafael
    Hill, Daniel
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Optical slot-waveguide micro-ring resonators for biosensing2008Conference paper (Other academic)
  • 27.
    Gylfason, Kristinn B.
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Sanchez, Benito
    Griol, Amadeu
    Barrios, Carlos A.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Banuls, Maria José
    Gonzalez-Pedro, Victoria
    Maquieira, Angel
    Holgado, Miguel
    Casquel, Rafael
    Hill, Daniel
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Robust hybridization of nanostructured buried integrated optical waveguide systems with on-chip fluid handling for chemical analysis2008In: Micro Total Analysis Systems (muTAS), 2008, p. 399-401Conference paper (Refereed)
  • 28.
    Gylfason, Kristinn B.
    et al.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Ottonello Briano, Floria
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    A Sensor Device and a Method of Detecting a Component in Gas2015Patent (Other (popular science, discussion, etc.))
  • 29.
    Gylfason, Kristinn
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Carlborg, Carl Fredrik
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Kazmierczak, Andrzej
    Dortu, Fabian
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Vivien, Laurent
    Barrios, Carlos Angulo
    van der Wijngaart, Wouter
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    On-chip temperature compensation in an integrated slot-waveguide ring resonator refractive index sensor array2010In: Optics Express, ISSN 1094-4087, E-ISSN 1094-4087, Vol. 18, no 4, p. 3226-3237Article in journal (Refereed)
    Abstract [en]

    We present an experimental study of an integrated slot-waveguide refractive index sensor array fabricated in silicon nitride on silica. We study the temperature dependence of the slot-waveguide ring resonator sensors and find that they show a low temperature dependence of -16.6 pm/K, while at the same time a large refractive index sensitivity of 240 nm per refractive index unit. Furthermore, by using on-chip temperature referencing, a differential temperature sensitivity of only 0.3 pm/K is obtained, without individual sensor calibration. This low value indicates good sensor-to-sensor repeatability, thus enabling use in highly parallel chemical assays. We demonstrate refractive index measurements during temperature drift and show a detection limit of 8.8 x 10(-6) refractive index units in a 7 K temperature operating window, without external temperature control. Finally, we suggest the possibility of athermal slot-waveguide sensor design.

  • 30.
    Haasl, Sjoerd
    et al.
    KTH, Superseded Departments, Signals, Sensors and Systems.
    Griss, Patrick
    KTH, Superseded Departments, Signals, Sensors and Systems.
    Ebefors, Thorbjörn
    KTH, Superseded Departments, Signals, Sensors and Systems.
    Sohlström, Hans
    KTH, Superseded Departments, Signals, Sensors and Systems.
    Kälvesten, Edvard
    KTH, Superseded Departments, Signals, Sensors and Systems.
    Stemme, Göran
    KTH, Superseded Departments, Signals, Sensors and Systems.
    Thermal polymer V-shaped actuators for optical alignment applications2004In: Fifth Micro Structure Workshop, 2004, p. 117-120Conference paper (Other academic)
  • 31.
    Haasl, Sjoerd
    et al.
    KTH, Superseded Departments, Signals, Sensors and Systems.
    Griss, Patrick
    KTH, Superseded Departments, Signals, Sensors and Systems.
    Sohlström, Hans
    KTH, Superseded Departments, Signals, Sensors and Systems.
    Kälvesten, Edvard
    KTH, Superseded Departments, Signals, Sensors and Systems.
    Stemme, Göran
    KTH, Superseded Departments, Signals, Sensors and Systems.
    Robust, large-deflection, in-plane thermal polymer V-shaped actuators2004In: MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, New York: IEEE , 2004, p. 510-513Conference paper (Refereed)
    Abstract [en]

    We present the design, fabrication and characteristics of the first in-plane V-shaped polymer actuator. Several different designs are evaluated and compared with each other. The intended application for this actuator is optical component alignment.

  • 32.
    Haasl, Sjoerd
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Griss, Patrick
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Kälvesten, Edvard
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Robust, large-deflection, in-plane thermal polymer V-shaped actuatorsManuscript (preprint) (Other academic)
  • 33. Hill, Daniel
    et al.
    Sanchez, Benito
    Griol, Amadeu
    Maire, Guillaume
    Dortu, Fabian
    Vivien, Laurent
    Stragier, Anne-Sophie
    Marris-Morini, Delphine
    Cassan, Eric
    Kaźmierczak, Andrzej
    Giannone, Domenico
    Gylfason, Kristinn
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Bañuls, María José
    González-Pedro, Victoria
    Maquieira, A.
    Barrios, Carlos A.
    Holgado, M.
    Casquel, R.
    Ultrahigh Sensitivity Slot-Waveguide Biosensor on a Highly Integrated Chip for Simultaneous Diagnosis of Multiple Diseases2008In: 2008 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS, 2008, p. 52-53Conference paper (Refereed)
    Abstract [en]

    We review some recent photonic related developments from the FP6-IST-SABIO project (026554) such as a demonstration of label-free optical biosensing with slot-waveguides and tolerance analysis of high efficiency silicon nitride surface grating couplers.

  • 34.
    Hill, Daniel
    et al.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Sandström, Niklas
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Gylfason, Kristinn
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Carlborg, Fredrik
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Karlsson, J. Mikael
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Haraldsson, Tommy
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Sohlström, Hans B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Russom, Aman
    KTH, School of Engineering Sciences (SCI), Applied Physics, Cell Physics.
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Claes, T.
    Bienstman, P.
    Kazmierczak, A.
    Dortu, F.
    Banuls Polo, M. J.
    Maquieira, A.
    Kresbach, G. M.
    Vivien, L.
    Popplewell, J.
    Ronan, G.
    Barrios, C. A.
    van der Wijngaart, Wouter
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Microfluidic and Transducer Technologies for Lab on a Chip Applications2010In: 2010 ANNUAL INTERNATIONAL CONFERENCE OF THE IEEE ENGINEERING IN MEDICINE AND BIOLOGY SOCIETY (EMBC), IEEE conference proceedings, 2010, p. 305-307Conference paper (Refereed)
    Abstract [en]

    Point-of-care diagnostic devices typically require six distinct qualities: they must deliver at least the same sensitivity and selectivity, and for a cost per assay no greater than that of today's central lab technologies, deliver results in a short period of time (<15 min at GP; <2h in hospital), be portable or at least small in scale, and require no or extremely little sample preparation. State-of-the-art devices deliver information of several markers in the same measurement.

  • 35.
    Holm, Ulf
    et al.
    KTH, Superseded Departments, Signals, Sensors and Systems.
    Sohlström, Hans
    KTH, Superseded Departments, Electrical Systems.
    Amerikansk prognos – 1993 är var tionde givare fiberoptisk1984In: Elteknik med aktuell elektronik, no 20, p. 16-19Article in journal (Other (popular science, discussion, etc.))
  • 36.
    Holm, Ulf
    et al.
    KTH, Superseded Departments, Signals, Sensors and Systems.
    Sohlström, Hans
    KTH, Superseded Departments, Signals, Sensors and Systems.
    Brogårdh, Torgny
    KTH, Superseded Departments, Signals, Sensors and Systems.
    Measurement system for magneto-optic sensor materials1984In: Journal of Physics E: Scientific Instruments, ISSN 0022-3735, Vol. 17, no 10, p. 885-889Article in journal (Refereed)
    Abstract [en]

    A system for the measurements of magneto-optic properties of IR-transparent materials is described. The system is designed for the characterisation of fibre optic magnetic field sensor materials. Measurement results on YIG-crystals are prresented. The accuracy of Faraday rotation and light transmission measurements are ±2 mrad and ±2% respectively. Important features for the sensor characterisation are light beam scanning, temperature control and flexible magnetic field generation. A desktop computer is used for system control and data acquisition. The system is expected to be of great importance for future sensor developments.

  • 37.
    Holm, Ulf
    et al.
    Instrumentation Laboratory, KTH Royal Institute of Technology.
    Sohlström, Hans
    Instrumentation Laboratory, KTH Royal Institute of Technology.
    Brogårdh, Torgny
    Instrumentation Laboratory, KTH Royal Institute of Technology.
    YIG-SENSOR DESIGN FOR FIBER OPTICAL MAGNETIC-FIELD MEASUREMENTS1984In: PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, volume 0514 / [ed] Ralf T. Kersten; Rainer Kist, 1984, Vol. 514, p. 333-336Conference paper (Refereed)
    Abstract [en]

    Aiming at the design of a magnetic field sensor utilizing the Faraday effect, we give in this paper a description of measurements of magneto-optical properties of YIG. We also give sensor design rules based upon these measurements.

  • 38.
    Holm, Ulf
    et al.
    KTH, Superseded Departments, Signals, Sensors and Systems.
    Sohlström, Hans
    KTH, Superseded Departments, Signals, Sensors and Systems.
    Svantesson, Kjell
    Transmission loss compensation for Faraday effect fibre optic sensors1994In: SENSORS AND ACTUATORS A-PHYSICAL / [ed] G. Blasquez and P. pons, Elsevier , 1994, p. 487-490Conference paper (Refereed)
    Abstract [en]

    We present a novel scheme for compensation of transmission loss variations in Faraday effect-based fibre optic magnetic field sensors. Light is sent through the sensing element in opposite directions to form the two signal channels needed for the compensation. Experiments have been made with a time-multiplexed multimode system in which IR emitting diodes are alternately used as emitters and detectors. With transmission loss variations of less than 25%, which is reasonable in a real system, the resulting error is well below 1%.

  • 39.
    Johnsson, Niklas
    et al.
    KTH, Superseded Departments, Signals, Sensors and Systems.
    Sohlström, Hans
    KTH, Superseded Departments, Signals, Sensors and Systems.
    Enoksson, Peter
    KTH, Superseded Departments, Signals, Sensors and Systems.
    Stemme, Göran
    KTH, Superseded Departments, Signals, Sensors and Systems.
    Optically excited microresonator for force measurements1998In: Micro Structure Workshop'98 (MSW), 1998, p. P3.1-P3.3Conference paper (Other academic)
  • 40. Kazmierczak, Andrzej
    et al.
    Dortu, Fabian
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Carlborg, Carl Fredrik
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Vivien, Laurent
    Giannone, Domenico
    Analyse de la tolérance de l’alignement d’un circuit de distribution optique intégré pour une application de capteur multiparamétrique jetable2009In: Journées Nationales d’Optique Guidée (JNOG), Lille, France, 2009, p. 289-291Conference paper (Refereed)
  • 41. Kazmierczak, Andrzej
    et al.
    Dortu, Fabian
    Schrevens, Olivier
    Giannone, Domenico
    Vivien, Laurent
    Marris-Morini, Delphine
    Bouville, David
    Cassan, Eric
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Sanchez, Benito
    Griol, Amadeu
    Hill, Daniel
    Light coupling and distribution for Si3N4/SiO2 integrated multichannel single-mode sensing system2009In: Optical Engineering: The Journal of SPIE, ISSN 0091-3286, E-ISSN 1560-2303, Vol. 48, no 1Article in journal (Refereed)
    Abstract [en]

    We present an efficient and highly alignment-tolerant light coupling and distribution system for a multichannel Si3N4/SiO2 single-mode photonics sensing chip. The design of the input and output couplers and the distribution splitters is discussed. Examples of multichannel data obtained with the system are given.

  • 42. Kazmierczak, Andrzej
    et al.
    Vivien, Laurent
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Sanchez, Benito
    Griol, Amadeu
    Marris-Morini, Delphine
    Cassan, Eric
    Dortu, Fabian
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Giannone, Domenico
    Hill, Daniel
    High quality optical microring resonators in Si3N 4/SiO22008In: Proceedings of the 14th European Conference on Integrated Optics - ECIO'08 Eindhoven, 2008, Vol. Contributed and Invited Papers, p. 313-316Conference paper (Refereed)
    Abstract [en]

    We have experimentally demonstrated high Q-factors strip waveguide resonators using the Si3N4/SiO2 material platform at the wavelength of 1.31μm. The analyzed filters demonstrate high quality factors reaching 133,000. The dependence on resonator radii and coupling gap is also discussed.

  • 43.
    Lapisa, Martin
    et al.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Antelius, Mikael
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Tocchio, Alessandro
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Niklaus, Frank
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Wafer-Level capping and sealing of heat sensitive substances and liquids with gold gaskets2013In: Sensors and Actuators A-Physical, ISSN 0924-4247, E-ISSN 1873-3069, Vol. 201, p. 154-163Article in journal (Refereed)
    Abstract [en]

    This paper reports on a novel wafer-level packaging method employing gold gaskets and an epoxy underfill. The packaging is done at room-temperature and atmospheric pressure. The mild packaging conditions allow the encapsulation of sensitive devices. The method is demonstrated for two applications; the wafer-level encapsulation of a liquid and the wafer-level packaging of a photonic gas sensor containing heat sensitive dye-films.

  • 44. Maire, Guillaume
    et al.
    Vivien, Laurent
    Sattler, Guillaume
    Kazmierczak, Andrzej
    Sanchez, Benito
    Gylfason, Kristinn Björgvin
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Griol, Amadeu
    Marris-Morrini, Delphine
    Cassan, Eric
    Giannone, Domenico
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology.
    Hill, Daniel
    High efficiency silicon nitride surface grating couplers2008In: Optics Express, ISSN 1094-4087, E-ISSN 1094-4087, Vol. 16, no 1, p. 328-333Article in journal (Refereed)
    Abstract [en]

    High efficiency surface grating couplers for silicon nitride waveguides have been designed, fabricated, and characterized. Coupling efficiencies exceeding 60 % are reported at a wavelength of 1.31 mu m, as well as angular and wavelength -3 dB tolerances of 4 and 50 nm, respectively. When the wavelength is increased from 1310 nm to 1450 nm the coupling efficiency progressively decreases but remains above 20 % at 1450 nm. The influence of the duty ratio of the grating has also been investigated: maximum coupling efficiency was obtained at 50 % duty ratio.

  • 45. Maire, Guillaume
    et al.
    Vivien, Laurent
    Stragier, Anne-Sophie
    Kazmierczak, Andrzej
    Sanchez, Benito
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Griol, Amadeu
    Marris-Morini, Delphine
    Cassan, Eric
    Giannone, Domenico
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Microsystem Technology (Changed name 20121201).
    Hill, Daniel
    Tolerance analysis of high efficiency silicon nitride surface grating couplers2008Conference paper (Refereed)
  • 46.
    Ottonello Briano, Floria
    et al.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Colangelo, Marco
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Errando-Herranz, Carlos
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    A fast uncooled infrared nanobolometer featuring a hybrid-plasmonic cavity for enhanced optical responsivity2017In: 30th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, January 22-26, 2017, Institute of Electrical and Electronics Engineers (IEEE), 2017Conference paper (Refereed)
    Abstract [en]

    We demonstrate the first uncooled single-nanowire-based infrared bolometer to detect sub-mW optical signals up to MHz frequencies. The bolometer consists of a Pt nanowire on a suspended silicon hybrid-plasmonic cavity, and exhibits enhanced optical responsivity compared to nanowires on unstructured and non-suspended substrates. Low-cost monolithically integrated infrared detectors are needed for the rapidly growing field of silicon photonic sensors. The high speed of our nanobolometer enables advanced modulation schemes for noise reduction and avoidance of low-frequency thermal cross-talk, as well as power saving by pulsed operation. Furthermore, its simple integration and small footprint make it a cost effective detector for sensing applications.

  • 47.
    Ottonello Briano, Floria
    et al.
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    Errando-Herranz, Carlos
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    Rödjegård, Henrik
    Senseair AB, Stn Gatan 12, S-82471 Delsbo, Sweden..
    Martin, Hans
    Senseair AB, Stn Gatan 12, S-82471 Delsbo, Sweden..
    Sohlström, Hans
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    Gylfason, Kristinn
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    Carbon Dioxide Sensing with Low-confinement High-sensitivity Mid-IR Silicon Waveguides2019In: 2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), IEEE , 2019Conference paper (Refereed)
    Abstract [en]

    We present a low-confinement Si waveguide for 4.26 mu m wavelength and apply it to sense CO2 concentrations down to 0.1 %. We demonstrate the highest reported waveguide sensitivity to CO2. 44% of the free-space sensitivity.

  • 48.
    Ottonello Briano, Floria
    et al.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Renoux, Pauline
    University of Iceland, Science Institute.
    Forsberg, Fredrik
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Ingvarsson, Snorri
    University of Iceland, Science Institute.
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    High-frequency sub-wavelength IR thermal source2014In: Proceedings of SPIE, the International Society for Optical Engineering, ISSN 0277-786X, E-ISSN 1996-756X, Vol. 9133, p. 91331D-1-91331D-6Article in journal (Refereed)
    Abstract [en]

    We present a method to characterize the temperature dynamics of miniaturized thermal IR sources. The method circumvents the limitations of current IR photodetectors, by relying only on an electrical measurement rather than on optical detection. Thus, it enables the characterization of the light emission of IR sources over their full operation frequency range. Moreover, we develop a model of thermal IR sources allowing simulations of their thermal and electrical behavior. By combining measurements and modeling, we achieve a comprehensive characterization of a Pt nanowire IR source: the reference resistance R-0 = 17.7 Omega, the TCR alpha = 2.0 x 10(-3) K-1, the thermal mass C = 2.7 x 10(-14) J/K, and the thermal conductance G = 1.3 x 10(-6) W/K. The thermal time constant could not be measured, because of the frequency limitation of our setup. However, the operation of the source has been tested and proved to function up to 1 MHz, indicating that the thermal time constant of the source is smaller than 1 mu s.

  • 49.
    Ottonello Briano, Floria
    et al.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Sohlström, Hans
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Forsberg, Fredrik
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Renoux, Pauline
    University of Iceland, Science Institute.
    Ingvarsson, Snorri
    University of Iceland, Science Institute.
    Stemme, Göran
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Gylfason, Kristinn B.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    A sub-μs thermal time constant electrically driven Pt nanoheater: thermo-dynamic design and frequency characterization2016In: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Vol. 108, no 19, article id 193106Article in journal (Refereed)
    Abstract [en]

    Metal nanowires can emit coherent polarized thermal radiation, work as uncooled bolometers, and provide localized heating. In this paper, we engineer the temperature dynamics of electrically driven Pt nanoheaters on a silicon-on-insulator substrate. We present three designs and we electrically characterize and model their thermal impedance in the frequency range from 3 Hz to 3 MHz. Finally, we show a temperature modulation of 300 K while consuming less than 5 mW of power, up to a frequency of 1.3 MHz. This result can lead to significant advancements in thermography and absorption spectroscopy.

  • 50.
    Ottonello-Briano, Floria
    et al.
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Errando-Herranz, Carlos
    KTH, School of Electrical Engineering (EES), Micro and Nanosystems.
    Rödjegård, Henrik
    Martin, Hans
    Sohlström, Hans
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems. KTH, Superseded Departments (pre-2005), Signals, Sensors and Systems. KTH, Superseded Departments (pre-2005), Electrical Systems.
    Gylfason, Kristinn
    KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
    Carbon dioxide absorption spectroscopy with a mid-infrared silicon photonic waveguideManuscript (preprint) (Other academic)
    Abstract [en]

    Carbon dioxide is a vital gas for life on Earth, a waste product of human activities, and widely used in agriculture and industry. Its accurate sensing is therefore of great interest. Optical sensors exploiting the mid-infrared light absorption of CO2 provide high selectivity, but their large size and high cost limit their use. Here, we demonstrate CO2 gas sensing at 4.2 μm wavelength using an integrated silicon waveguide, featuring a sensitivity to CO2 of 44% that of free-space sensing. The suspended waveguide is fabricated on a silicon-on-insulator substrate by a single-lithography-step process, and we route it into a mid-infrared photonic circuit for on-chip-referenced gas measurements. Its demonstrated performance and its simple and scalable fabrication make our waveguide ideal for integration in miniaturized CO2 sensors for distributed environmental monitoring, personal safety, medical, and high-volume consumer applications.

12 1 - 50 of 72
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