3D printing at the macroscale has evolved from making plastic prototypes to the production of high-performance functional metal parts for industries such as medical and aerospace. By contrast, MEMS devices today are produced in large quantities using semiconductor manufacturing processes. However, the semiconductor manufacturing paradigm is not cost-effective for producing customized MEMS devices in small to medium volumes (tens to thousands of units per year), and related applications are difficult to address efficiently. 3D printing of functional MEMS devices could play an important role in filling this gap. Here, we discuss recent advances in 3D- printed functional MEMS, addressing the challenges of economical customization at smaller production volumes.

Interest in carbon dioxide (CO2) sensors is growing rapidly due to the increasing awareness of the link between air quality and health. Indoor, high CO2 levels signal poor ventilation, and outdoor the burning of fossil fuels and its associated pollution. CO2 gas sensors based on integrated optical waveguides are a promising solution due to their excellent gas sensing selectivity, compact size, and potential for mass manufacturing large volumes at low cost. However, previous demonstrations have not shown adequate performance for atmospheric-level sensing on a scalable platform. Here, we report the clearly resolved detection of 500 ppm CO2 gas at 1 s integration time and an extrapolated 1σ detection limit of 73 ppm at 61 s integration time using an integrated suspended silicon waveguide at a wavelength of 4.2 µm. Our waveguide design enables suspended strip waveguides with bottom anchors while maintaining a constant waveguide core cross-sectional geometry. This unique design results in a low propagation loss of 2.20 dB/cm. The waveguides were implemented in a 150 mm silicon on insulator (SOI) platform using standard optical lithography, providing a clear path to low-cost mass manufacturing. The low CO2 detection limit of our proposed waveguide, combined with its compatibility for high-volume production, creates substantial opportunities for waveguide sensing technology in CO2 sensing applications such as fossil fuel combustion monitoring and indoor air quality monitoring for ventilation and air conditioning systems.

Utilizing lanthanide upconversion nanoparticles to convert near-infrared to visible light presents a potential way for fabricating the next generation of low-cost near-infrared imaging sensors. Integrating microlens arrays with upconversion nanoparticles has been shown to be a promising approach for improving the efficiency of upconversion nanoparticles. However, approaches suitable for prototyping and producing microlens arrays to explore optimal device designs are lacking. In this work, we report an approach to fabricating flexible near-infrared-to-visible upconversion devices incorporating upconversion nanoparticles and microlens arrays, which enables easy adjustment of device structures and lens geometry. This is achieved by fabricating flexible films containing upconversion nanoparticles using molding in combination with femtosecond laser 3D printing of lenses, facilitating rapid prototyping for different application scenarios. By adding the microlens array, the intensities of the green (525 and 540 nm) and red (654 nm) upconversion emission bands were enhanced by a factor of 3 and 10, respectively, potentially leading to much reduced detectable near-infrared light intensity.

Integration of functional materials and structures on the tips of optical fibers has enabled various applications in micro-optics, such as sensing, imaging, and optical trapping. Direct laser writing is a 3D printing technology that holds promise for fabricating advanced micro-optical structures on fiber tips. To date, material selection has been limited to organic polymer-based photoresists because existing methods for 3D direct laser writing of inorganic materials involve high-temperature processing that is not compatible with optical fibers. However, organic polymers do not feature stability and transparency comparable to those of inorganic glasses. Herein, we demonstrate 3D direct laser writing of inorganic glass with a subwavelength resolution on optical fiber tips. We show two distinct printing modes that enable the printing of solid silica glass structures (“Uniform Mode”) and self-organized subwavelength gratings (“Nanograting Mode”), respectively. We illustrate the utility of our approach by printing two functional devices: (1) a refractive index sensor that can measure the indices of binary mixtures of acetone and methanol at near-infrared wavelengths and (2) a compact polarization beam splitter for polarization control and beam steering in an all-in-fiber system. By combining the superior material properties of glass with the plug-and-play nature of optical fibers, this approach enables promising applications in fields such as fiber sensing, optical microelectromechanical systems (MEMS), and quantum photonics.

Hierarchical structures are abundant in nature, such as in the superhydrophobic surfaces of lotus leaves and the structural coloration of butterfly wings. They consist of ordered features across multiple size scales, and their advantageous properties have attracted enormous interest in wide-ranging fields including energy storage, nanofluidics, and nanophotonics. Femtosecond lasers, which are capable of inducing various material modifications, have shown promise for manufacturing tailored hierarchical structures. However, existing methods, such as multiphoton lithography and three-dimensional (3D) printing using nanoparticle-filled inks, typically involve polymers and suffer from high process complexity. Here, we demonstrate the 3D printing of hierarchical structures in inorganic silicon-rich glass featuring self-forming nanogratings. This approach takes advantage of our finding that femtosecond laser pulses can induce simultaneous multiphoton cross-linking and self-formation of nanogratings in hydrogen silsesquioxane. The 3D printing process combines the 3D patterning capability of multiphoton lithography and the efficient generation of periodic structures by the self-formation of nanogratings. We 3D-printed micro-supercapacitors with large surface areas and a high areal capacitance of 1 mF/cm² at an ultrahigh scan rate of 50 V/s, thereby demonstrating the utility of our 3D printing approach for device applications in emerging fields such as energy storage.

Cost-efficient and easily integrable broadband mid-infrared (mid-IR) sources would significantly enhance the application space of photonic integrated circuits (PICs). Thermal incandescent sources are superior to other common mid-IR emitters based on semiconductor materials in terms of PIC compatibility, manufacturing costs, and bandwidth. Ideal thermal emitters would radiate directly into the desired modes of the PIC waveguides via near-field coupling and would be stable at very high temperatures. Graphene is a semimetallic two-dimensional material with comparable emissivity to thin metallic thermal emitters. It allows maximum coupling into waveguides by placing it directly into their evanescent fields. Here, we demonstrate graphene mid-IR emitters integrated with photonic waveguides that couple directly into the fundamental mode of silicon waveguides designed to work in the so-called “fingerprint region” relevant for gas sensing. High broadband emission intensity is observed at the waveguide-integrated graphene emitter. The emission at the output grating couplers confirms successful coupling into the waveguide mode. Thermal simulations predict emitter temperatures up to 1000 °C, where the blackbody radiation covers the mid-IR region. A coupling efficiency η, defined as the light emitted into the waveguide divided by the total emission, of up to 68% is estimated, superior to data published for other waveguide-integrated emitters.

MXene is a promising energy storage material for miniaturized microbatteries and microsupercapacitors (MSCs). Despite its superior electrochemical performance, only a few studies have reported MXene-based ultrahigh-rate (>1000 mV s−1) on-paper MSCs, mainly due to the reduced electrical conductance of MXene films deposited on paper. Herein, ultrahigh-rate metal-free on-paper MSCs based on heterogeneous MXene/poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonate) (PEDOT:PSS)-stack electrodes are fabricated through the combination of direct ink writing and femtosecond laser scribing. With a footprint area of only 20 mm2, the on-paper MSCs exhibit excellent high-rate capacitive behavior with an areal capacitance of 5.7 mF cm−2 and long cycle life (>95% capacitance retention after 10,000 cycles) at a high scan rate of 1000 mV s−1, outperforming most of the present on-paper MSCs. Furthermore, the heterogeneous MXene/PEDOT:PSS electrodes can interconnect individual MSCs into metal-free on-paper MSC arrays, which can also be simultaneously charged/discharged at 1000 mV s−1, showing scalable capacitive performance. The heterogeneous MXene/PEDOT:PSS stacks are a promising electrode structure for on-paper MSCs to serve as ultrafast miniaturized energy storage components for emerging paper electronics. 

We demonstrate methane gas sensing using suspended silicon waveguides and experimentally validate the sensitivity optimization of waveguide-based gas sensors by varying waveguide lengths. This method enables application-optimized integrated optical gas sensors.

We demonstrate methane gas sensing using suspended silicon waveguides and experimentally validate the sensitivity optimization of waveguide-based gas sensors by varying waveguide lengths. This method enables application-optimized integrated optical gas sensors.

We demonstrate methane gas sensing using suspended silicon waveguides and experimentally validate the sensitivity optimization of waveguide-based gas sensors by varying waveguide lengths. This method enables application-optimized integrated optical gas sensors.