We describe an experiment demonstrating the generation of three independent square-ladder continuous-variable cluster states with up to 94 qumodes of a microwave frequency comb. This entanglement structure at a large scale is realized by injecting vacuum fluctuations into a Josephson Parametric Amplifier pumped by three coherent signals around twice its resonance frequency, each having a particular well-defined phase relation. We reach up to 1.4 dB of squeezing of the nullifier that verifies the cluster state on the square ladder graph. Our results are consistent with a more familiar measure of two-mode squeezing, where we find up to 5.42 dB for one pump, and up to 1 dB for three pumps.

We demonstrate atomic force microscopy (AFM) imaging with a microcantilever force transducer where an integrated superconducting microwave resonant circuit detects cantilever deflection using the principles of cavity optomechanics. We discuss the detector responsivity and added noise, pointing to its crucial role in the context of force sensitivity. Through analysis of noise measurements we determine the effective temperature of the cantilever eigenmode and we determine the region of detector operation in which the sensor is thermal-noise-limited. Our analysis shows that the force-sensor design is a significant improvement over piezoelectric force sensors commonly used in low-temperature AFM. We discuss the potential for further improvement of the sensor design to achieve optimal detection at the standard quantum limit. We demonstrate AFM operation with surface-tracking feedback in both amplitude-modulation and frequency-modulation modes.

We investigate nonreciprocal scattering within the modes of a microwave frequency comb. Adjusting the pump frequencies, amplitudes, and phases of a Josephson parametric oscillator, we control constructive interference for the m--> pound scattering processes, while concurrently achieving destructive interference for the inverse process pound --> m. We outline the methodology for realizing nonreciprocity in the context of two-mode isolation and a three-mode circulation, which we extend to multiple modes. We find good agreement between the experiments and a linearized theoretical model. Nonreciprocal scattering expands the toolset for parametric control, with the potential to engineer alternative quantum correlations.

We describe a transducer for low-temperature atomic force microscopy based on electromechanical coupling due to a strain-dependent kinetic inductance of a superconducting nanowire. The force sensor is a bending triangular plate (cantilever) whose deflection is measured via a shift in the resonant frequency of a high-Q superconducting microwave resonator at 4.5 GHz. We present design simulations including mechanical finite-element modeling of surface strain and electromagnetic simulations of meandering nanowires with large kinetic inductance. We discuss a lumped-element model of the force sensor and describe the role of an additional shunt inductance for tuning the coupling to the transmission line used to measure the microwave resonance. A detailed description of our fabrication is presented, including information about the process parameters used for each layer. We also discuss the fabrication of sharp tips on the cantilever using focused electron beam-induced deposition of platinum. Finally, we present measurements that characterize the spread of mechanical resonant frequency, the temperature dependence of the microwave resonance, and the sensor's operation as an electromechanical transducer of force. 

We describe a transducer for low-temperature atomic force microscopy based on electromechanical coupling due to a strain-dependent kinetic inductance of a superconducting nanowire. The force sensor is a bending triangular plate (cantilever) whose deflection is measured via a shift in the resonant frequency of a high-Q superconducting microwave resonator at 4.5 GHz. We present design simulations including mechanical finite-element modeling of surface strain and electromagnetic simulations of meandering nanowires with large kinetic inductance. We discuss a lumped-element model of the force sensor and describe the role of an additional shunt inductance for tuning the coupling to the transmission line used to measure the microwave resonance. A detailed description of our fabrication is presented, including information about the process parameters used for each layer. We also discuss the fabrication of sharp tips on the cantilever using focused electron beam-induced deposition of platinum. Finally, we present measurements that characterize the spread of mechanical resonant frequency, the temperature dependence of the microwave resonance, and the sensor’s operation as an electromechanical transducer of force.

Two-level system (TLS) loss typically limits the coherence of superconducting quantum circuits. The loss induced by TLS defects is nonlinear, resulting in quality factors with a strong dependence on the circulating microwave power. We observe frequency mixing due to this nonlinearity by applying a two-tone drive to a coplanar waveguide resonator and measuring the intermodulation products using a multifrequency lock-in technique. This intermodulation spectroscopy method provides an efficient approach to characterizing TLS loss in superconducting circuits. Using harmonic balance reconstruction, we recover the nonlinear parameters of the device-TLS interaction, which are in good agreement with the standard tunneling model for TLSs.

Electromechanical transduction gain of 21 dB is realized in a micro-cantilever resonant force sensor operated in the unresolved-sideband regime. Strain-dependent kinetic inductance weakly couples cantilever motion to a superconducting nonlinear resonant circuit. A single pump generates motional sidebands and parametrically amplifies them via four-wave mixing. We study the gain and added noise, and we analyze potential benefits of this integrated amplification process in the context force sensitivity.

We study force-gradient sensing with a coherently driven mechanical resonator and phase-sensitive detection of motion through the two-Tone backaction evading measurement of cavity optomechanics. The response of the optomechanical system, solved by numerical integration of the classical equations of motion, shows an extended region which is monotonic to changes in force gradient. We use Floquet theory to model the fluctuations, which rise only slightly above that of the usual backaction evading measurement in the presence of the mechanical drive. The monotonic response and minimal backaction are advantageous for applications such as atomic force microscopy.

We study the response of several microwave resonators made from superconducting NbTiN thin-film meandering nanowires with large kinetic inductance, having different circuit topology and coupling to the transmission line. Reflection measurements reveal the parameters of the circuit and analysis of their temperature dependence in the range 1.7-6 K extract the superconducting energy gap and critical temperature. The lumped-element LC resonator, valid in our frequency range of interest, allows us to predict the quasiparticle contribution to internal loss, independent of circuit topology and characteristic impedance. Our analysis shows that the internal quality factor is limited not by thermal-equilibrium quasiparticles, but an additional temperature-dependent source of internal microwave loss.