High-aspect ratio microchannels fabricated in fused silica hollow fibres using Tesla coil
2016 (English)In: Electronics Letters, ISSN 0013-5194, E-ISSN 1350-911X, Vol. 52, no 19Article in journal (Refereed) Published
Abstract [en]
A novel method to fabricate microchannels into fused silica capillaries and hollow fibres by a high-voltage high-frequency corona discharge induced by a Tesla coil is demonstrated. Channels as narrow as 2.2 m are successfully made in capillaries with 2 m inner and 125 mu m outer diameters.
Place, publisher, year, edition, pages
Institution of Engineering and Technology, 2016. Vol. 52, no 19
Keywords [en]
silicon compounds, micro-optomechanical devices, microchannel flow, microfabrication, optical fibre fabrication, capillarity, flow control, corona, high-aspect ratio microchannels, fused silica hollow fibres, Tesla coil, fused silica capillaries, high-voltage high-frequency corona discharge, SiO2
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-193992DOI: 10.1049/el.2016.2192ISI: 000384014300026Scopus ID: 2-s2.0-84986879733OAI: oai:DiVA.org:kth-193992DiVA, id: diva2:1038832
Funder
Swedish Research Council, 87308
Note
QC 20161020
2016-10-202016-10-142024-03-15Bibliographically approved