In this study, a novel industrial application of membrane distillation (MD) is presented for waste water treatment in the nano-electronics industries. Previously reported performance of a semi-commercial Air Gap Membrane Distillation (AGMD) module is employed to evaluate the system operation in the terms of thermal energy analysis. To comply with thermal power demand in the MD systems, different integration possibilities between the MD unit and waste heat sources namely condenser outlet water from heat recovery chiller, process cooling water exhaust from manufacturing tools and hot air from Volatile Organic Compounds (VOCs) abatement combustion system are identified. Along with the technical assessment, this feasibility study has also involved the economic evaluation of the industrial waste heat integrated MD systems including unit water treatment cost. Results show the techno-economic viability of the proposed MD system integrated with industrial waste heat sources.