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Performance assessment of chemical mechanical planarization wastewater treatment in nano-electronics industries using membrane distillation
KTH, School of Industrial Engineering and Management (ITM), Energy Technology. Department of Bioproducts and Biosystems, Aalto University, Espoo, Finland.ORCID iD: 0000-0003-0923-9010
Interuniversity Microelectronics Center (imec), Leuven, Belgium.
KTH, School of Industrial Engineering and Management (ITM), Energy Technology.ORCID iD: 0000-0002-3661-7016
Department of Bioproducts and Biosystems, Aalto University, Espoo, Finland.
2020 (English)In: Separation and Purification Technology, ISSN 1383-5866, E-ISSN 1873-3794, Vol. 235, article id 116201Article in journal (Refereed) Published
Abstract [en]

Wastewater from chemical mechanical planarization (CMP) processes in nano-electronics industries must be treated properly in order to fulfil local and international environmental regulations. This study is focused on a performance assessment of membrane distillation (MD) technology for CMP wastewater treatment. A new prototype of air gap membrane distillation (AGMD) module was utilized, with feed water consisting of CMP wastewater collected from imec, Belgium. The module was tested at different operating conditions (temperatures, flow rates and filtration time) and responses in terms of separation efficiency, permeate water quality, transmembrane flux, specific heat demand and exergy efficiency were determined. High quality permeate was produced in all trials, i.e. conductivity ~2.11 µS/cm, pH ~5.4, TOC ~1.13 ppm, IC ~0.24 ppm, TDS ~1.18 ppm and COD ~ 1.9 ppm; for most of the contaminants the separation efficiency was >99%. These findings clearly show that the resulting MD permeate does not exceed environmental regulations for release to recipient, and the permeate can even be considered for reuse. Moreover, the determined specific heat demand at different operating conditions was varying between 1390 and 2170 kWh/m3 whereas; the achievable exergy efficiency was ~19%.

Place, publisher, year, edition, pages
Elsevier, 2020. Vol. 235, article id 116201
Keywords [en]
Chemical mechanical planarization, Separation efficiency, Membrane distillation, Nano-electronics, Energy analysis
National Category
Engineering and Technology
Research subject
Energy Technology; Chemical Engineering
Identifiers
URN: urn:nbn:se:kth:diva-264242DOI: 10.1016/j.seppur.2019.116201ISI: 000509611400056Scopus ID: 2-s2.0-85073547535OAI: oai:DiVA.org:kth-264242DiVA, id: diva2:1372635
Funder
StandUp
Note

QC 20191202

Available from: 2019-11-25 Created: 2019-11-25 Last updated: 2026-04-27Bibliographically approved
In thesis
1. Waste Heat Driven Membrane Distillation for Industrial Wastewater Treatment
Open this publication in new window or tab >>Waste Heat Driven Membrane Distillation for Industrial Wastewater Treatment
2021 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

The European Union has placed a high priority on reaching the goals described in the 2030 Agenda for Sustainable Development. This aim has provided added momentum to member-state environmental regulatory authorities to further tighten the discharge limits of industrial wastewater. These measures strongly influence existing industrial practices as many traditional wastewater treatment methods cannot achieve these strict release limits. Moreover, industrial sectors are encouraged to employ a zero liquid discharge strategy for advanced wastewater management, particularly for process water reuse. Emphasis is thus now placed on improved water treatment systems to recover, reuse and release water in a manner that protects natural resources, guarantees stringent regulatory constraints and ensures financial viability. In this context membrane distillation (MD) is a promising industrial wastewater treatment technology capable of meeting these requirements while utilizing low-grade heat sources.

This thesis focuses on experimental investigations and techno-economic analysis of waste heat driven MD systems for water purification in two water-intensive industries: nano-electronics facilities and cogeneration plants. Samples collected at relevant facilities were tested in an air gap MD bench unit and a semi-commercial pilot plant, with a focus on separation efficiency and potential for achieving high recovery ratios. For the techno-economic analysis of the industrial scale system, the performance of the chosen semi-commercial unit was considered to evaluate the full-scale system operation in terms of thermal energy demand and expected water purification cost. Various thermal integration approaches were investigated while considering locally available heat sources to realize the energy requirements of the specific MD system. The selected case studies include: removal of tetramethylammonium hydroxide (TMAH) from photolithography process wastewater in nano-electronics industries; treatment of chemical mechanical planarization (CMP) process wastewater in nano-electronics industries; and water recovery through advanced flue gas condensate treatment from municipal solid waste incineration and biofuel fired cogeneration plants.

The results from nano-electronics wastewater treatment tests showed that high-quality permeate could be recovered while observing good to excellent separation efficiencies of analyzed contaminants. Moreover, the proposed advanced flue gas condensate treatment is also proved successful while removing the pollutants up to the concentration levels of parts per billion. The proposed pretreatment step, pH adjustment of MD feeds, enhanced ammonia removal efficiency in all cases. Compared to current practices, the separation efficiencies of the considered MD based processes are improved. The simulation results indicate that the required thermal energy for operating large scale MD systems is readily available via internal waste heat sources of nano-electronics facilities for handling typical volumes of the mentioned wastewaters. In cogeneration plants, district heating supply and return lines are well suited as the heat source and heat sink to manage industrial-scale MD systems effectively. The process economy shows that the unit water treatment cost is mainly constrained by thermal energy cost. In case when the price of heat is considered negligible, the unit water treatment cost is significantly lower than the competing technologies.

Abstract [sv]

Den Europeiska Unionen har lagt högt prioritet på uppfyllelsen av de målen som finns i 2030 Agenda för Hållbar Utveckling. Denna ambition har gett ytterligare fart till medlemsländernas miljöförvaltningar för att strama åt utsläppsnivåer av industriella avloppsvatten. Dessa åtgärder har stor betydelse för existerande förhållningssätt i industrin eftersom många traditionella metoder för rening av avloppsvatten når inte de åtstramade utsläppsnivåerna. Dessutom finns det en uppmaning hos industrin att implementera strategier för noll utsläpp, framför allt för återanvändning av processvatten. Betoningen ligger på förbättrad vattenreningsteknik för återhämtning, återanvändning och utsläpp av vatten på det sättet som skyddar naturresurser, garanterar tuffa miljölagstiftningar och säkerställer ekonomin. I detta sammanhang är membrandestillering (MD) en lovande teknik för rening av avloppsvatten och är kapabel att bemöta dessa krav genom utnyttjandet av låg-temperatur värmekällor.

Denna avhandling fokuserar på experimentella undersökningar och tekno-ekonomiska utvärderingar av spillvärmedrivna MD-system för vattenrening i två vattenintensiva industrier: nano-elektronisk tillverkning och kraftvärmeverk. Vattenprover hämtade från relevanta anläggningar testades i en luftspalt MD rigg i bänkskala och hos en halv-kommersiell pilotanläggning, med fokus på separationsverkningsgrad och möjligheten att nå en hög grad av uppkoncentrering. För den tekno-ekonomiska analysen av ett system i industriellt skal undersöktes prestandan hos den valda halv-kommersiell enhet för att utvärdera drift i fullt skal gällande termiskt energibehov och förväntad kostnad för renat vatten. Olika termiska integreringssätt utvärderades med hänsyn till lokala värmekällor för att tillgodose energibehoven hos det specifika MD-systemet. De valda fallstudierna omfattar: avskiljning av tetrametylammonium hydroxid (TMAH) från fotolitografiska avloppsvatten i nano-elektronisk tillverkning; behandling av kemisk-mekanisk utjämning (CMP) avloppsvatten i nano-elektronisk tillverkning; och uppkoncentrering genom avancerad rening av rökgaskondensat från kraftvärmeverk med hushållsavfall och biobränsle som energikällor.

Resultat från rening av avloppsvatten hos nano-elektronisk tillverkning visade att permeat med hög kvalité kunde åstadkommits med hög separationsverkningsgrad hos de analyserade föroreningarna. Det föreslagna systemet för rening av rökgaskondensat var också framgångsrikt med avskiljning av föroreningar upp till miljarddelar. Förbehandlingen genom pH-justering av råvattnet ledde till förbättrad ammoniak-avskiljning i alla fallstudier. I jämförelse med dagens tekniker fanns det en förbättring med MD-teknik gällande separationsverkningsgrad. Resultaten från simuleringar för nano-elektronisk tillverkning visade att den nödvändiga termiskenergin finns tillgänglig för MD-system i stort skal genom utnyttjandet av intern spillvärme. Hos kraftvärmeverk passar fjärrvärmeledning och –returlinjor bra som värmekällor respektive värmesänka. Processekonomin visar att kostnaden för renat vatten är mest beroende av kostnaden för värmen. I de fall där värmekostnaden är noll ligger reningskostnaden mycket lägre än konkurrerande teknik.

Place, publisher, year, edition, pages
Stockholm: Aalto University, 2021. p. 139
Series
TRITA-ITM-AVL ; 2021:2
Series
Aalto University publication series DOCTORAL DISSERTATIONS 184/2020, ISSN 1799-4934, E-ISSN 1799-4942
Keywords
Membrane Distillation, Experimental investigations, Techno-economic, Wastewater, Flue gas condensate, Waste heat, District heating, Nano-electronics, Cogeneration, Sustainable development
National Category
Energy Engineering
Research subject
Energy Technology; Chemical Engineering
Identifiers
urn:nbn:se:kth:diva-289435 (URN)978-91-7873-774-1 (ISBN)978-952-64-0132-4 (ISBN)978-952-64-0131-7 (ISBN)
Public defence
2021-03-01, https://kth-se.zoom.us/j/63118818082, 08:00 (English)
Opponent
Supervisors
Available from: 2021-01-29 Created: 2021-01-29 Last updated: 2022-06-25Bibliographically approved

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Noor, Imtisal-e-Martin, Andrew R.

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