In nano-electronics industries, the waste water from photo-lithographic process is subjected to a special treatment due to the presence of TMAH (Tetramethylammonium hydroxide) which is corrosive to skin, eyes and respiratory tract and also has high acute systemic toxicity based on oral and dermal LD50s. Therefore, the challenge faced by IMEC (Belgium) is to treat the TMAH wastewater properly in an environomical (environmental-economical) way by reducing discharge volumes of TMAH wastewater, and recovering and reusing the clean water. In this regard, we proposed a novel TMAH waste water treatment method based on using membrane distillation water purification technology. Membrane distillation (MD) is a promising thermally driven technology which is capable to achieve extremely high environmental performance while using low grade heat sources. For this study, Xzero Air gap membrane distillation (AGMD) lab unit has been employed to treat the photo-lithographic waste water and specially to concentrate TMAH. The 0.24 sq. meter hydrophobic PTFE membrane of pore size ~ 0.2 µm and porosity ~ 80% is used in AGMD module for all the experiments. The wastewater samples are collected and analyzed in IMEC whereas tested at Xzero AB. These wastewater samples contain hydrogen peroxide (8000 ppm), ammonium hydroxide (1409 ppm), TMAH (646 ppm) and hydrogen fluoride (158 ppm). During the tests, concentration, pH, conductivity, total organic carbon (TOC) and chemical oxygen demand (COD) of feed, concentrate and permeate has been measured. The hydrogen peroxide was catalytically reduced (< 50 ppm) before performing a neutralization step with sulphuric acid as a pretreatment prior to MD separation process. The results show that high quality water was recovered having TMAH concentration ~ 1 ppm, ammonium hydroxide concentration ~ 3.5 ppm, pH ~ 2.3 – 3.6, conductivity ~ 174 – 210 µS/cm, TOC ~ 0.8 ppm and COD ~ 33 ppm. Based on the obtained results, it is clear that disposing the MD treated wastewater into water bodies is not only acceptable under environmental regulations but can also be reused further. The TMAH wastewater volumes are reduced up to 3 times, as well. In addition, the proposed technology is tolerant to many treatment conditions as compared to the conventional biological treatment. Furthermore, it is compact, easily operable, scalable and economical while using waste heat from nano-electronics industries. Since the results are quite interesting, therefore, the project will continue and the potential of the MD system will also be determined for CMP wastewater treatment to remove nano-particles.