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Integrated Microsystems for Fluorescence Sensing and Ultrasonic Energy Harvesting in Biomedical Applications
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0009-0007-6016-3708
2026 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

Advances in miniaturized biomedical microsystems, ranging from in vitro microphysiological systems (MPS) to implantable devices, are enabling new modes of continuous, autonomous preclinical studies. This thesis presents a set of interconnected research contributions on millimeter-scale fluorescence-sensing and ultrasonic energy-harvesting microsystems, collectively advancing the development of integrated and miniaturized biomedical instrumentation.

The first part introduces an integrated microoptical system for fluorescence sensing in MPS, incorporating custom micro-optics and miniaturized excitation and detection units with tailored optical filters. This platform enables real-time, continuous fluorescence monitoring of microtissues under physiologically relevant conditions, strengthening the analytical capabilities of MPS for long-duration studies of drug delivery and cellular behavior.

The second part translates these sensing concepts to fully implantable microsystems capable of autonomous, long-term in vivo fluorescence recording. A compact 5 × 5 × 5 mm³ implant integrates a miniaturized optical module and low-power electronics to track fluorescence dynamics within living tissue. Validated across phantom, in vitro, ex vivo, and in vivo studies, the system demonstrates two-week continuous tracking of tumor-associated fluorescence, establishing its suitability for preclinical studies.

The final part focuses on ultrasonic energy harvesting to enable the autonomous operation of implantable devices. A MEMS-based piezoelectric ultrasonic energy harvester (PUEH) fabricated using a low-temperature bonding process allows integration of high-performance bulk PZT-5H, demonstrating the potential of MEMS architectures for efficient ultrasonic power transfer. An integrated energy-harvesting node, also in a 5 × 5 × 5 mm³ form factor, combines the MEMS-based PUEH with power management and storage to support autonomous operation of millimetric implants.

Together, these contributions advance miniaturized fluorescence sensing and ultrasonic energy transfer, enabling versatile microsystems for biomedical applications.

Abstract [sv]

Framsteg inom miniatyriserade biomedicinska mikrosystem, allt från in vitro-mikrofysiologiska system (MPS) till implanterbara enheter, möjliggör nya former av kontinuerliga, autonoma prekliniska studier. Denna avhandling presenterar en uppsättning sammankopplade forskningsbidrag om millimeterskaliga fluorescensavkännande och ultraljudsenergiupptagnings-mikrosystem, som tillsammans främjar utvecklingen av integrerade och miniatyriserade biomedicinska instrument.

Den första delen introducerar ett integrerat mikrooptiskt system för fluorescensavkänning i MPS, som innehåller anpassad mikrooptik och miniatyriserade excitations- och detektionsenheter med skräddarsydda optiska filter. Denna plattform möjliggör kontinuerlig fluorescensövervakning i realtid av mikrovävnader under fysiologiskt relevanta förhållanden, vilket stärker MPS analytiska kapacitet för långvariga studier av läkemedelsleverans och cellulärt beteende. Den andra delen översätter dessa avkänningskoncept till helt implanterbara mikrosystem som kan utföra autonom, långsiktig in vivo-fluorescensregistrering. Ett kompakt 5 × 5 × 5 mm³-implantat integrerar en miniatyriserad optisk modul och lågeffektselektronik för att spåra fluorescensdynamik i levande vävnad. Systemet har validerats i fantom-, in vitro-, ex vivo- och in vivo-studier och demonstrerar två veckors kontinuerlig övervakning av tumörassocierad fluorescens, vilket fastställer dess lämplighet för prekliniska studier. Den sista delen fokuserar på ultraljudsenergiupp-samling för att möjliggöra autonom implantatdrift. En MEMS-baserad piezoelektrisk ultraljudsenergiuppsamlingsenhet (PUEH) tillverkad med en lågtemperaturbindningsprocess möjliggör integration av högpresterande bulk-PZT-5H, vilket demonstrerar potentialen hos MEMS-arkitekturer för effektiv ultraljudsenergiöverföring. En integrerad energiuppsamlingsnod, också i en formfaktor på 5 × 5 × 5 mm³, kombinerar MEMS PUEH med energihantering och lagring för att stödja autonom drift av millimetriska implantat.

Tillsammans främjar dessa bidrag miniatyriserad fluorescensavkänning och ultraljudsenergiöverföring, vilket möjliggör mångsidiga mikrosystem för biomedicinska tillämpningar.

Place, publisher, year, edition, pages
Stockholm, Sweden: KTH Royal Institute of Technology, 2026. , p. ix, 73
Series
TRITA-EECS-AVL ; 2026:11
Keywords [en]
Integrated Microsystems, Fluorescence Sensing, Ultrasonic Energy Harvesting
Keywords [sv]
Integrerade mikrosystem, fluorescensavkänning, ultraljudsenergiinsamling
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Electrical Engineering
Identifiers
URN: urn:nbn:se:kth:diva-375879ISBN: 978-91-8106-517-6 (print)OAI: oai:DiVA.org:kth-375879DiVA, id: diva2:2031623
Public defence
2026-02-20, https://kth-se.zoom.us/j/63767237845, Q2, Room B218, Malvinas väg 10, Stockholm, 13:00 (English)
Opponent
Supervisors
Note

QC 20260127

Available from: 2026-01-27 Created: 2026-01-23 Last updated: 2026-02-09Bibliographically approved
List of papers
1. Integrated microoptical system for continuous fluorescence monitoring of microtissues
Open this publication in new window or tab >>Integrated microoptical system for continuous fluorescence monitoring of microtissues
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2025 (English)In: Microsystems & Nanoengineering, E-ISSN 2055-7434, Vol. 11, no 1, article id 213Article in journal (Refereed) Published
Abstract [en]

Microphysiological systems (MPS) are advanced in vitro platforms engineered to replicate in vivo conditions for studying human biology, disease mechanisms, and drug responses with greater physiological relevance. Fluorescence sensing is widely used as a functional readout in MPS due to its high sensitivity, selectivity, and stability. However, conventional fluorescence sensing systems often rely on bulky instrumentation with limited integration, which restricts continuous in situ monitoring, scalable high-throughput analysis, and spatially resolved investigation in multi-organ-on-a-chip models. To address these limitations, we present a highly miniaturized, fully integrated optical system with a 1 mm² footprint, enabling continuous in situ fluorescence monitoring of three-dimensional microtissues in close proximity. The system integrates microscale illumination and sensing units for fluorescence excitation and selective detection, an optical element for guided light propagation, and a microcage for mechanical confinement of microtissues. To demonstrate its capabilities, we integrated the miniaturized optical system with an MPS-relevant platform to monitor fluorescence signals in transgenic mouse pancreatic islets expressing genetically encoded calcium indicators. The integrated platform enables real-time, continuous monitoring of islet responses to potassium chloride stimulation and tracking of calcium oscillations for over two hours, providing valuable information about the functional status of the pancreatic islets. Our work enhances the analytical capabilities of MPS through the integration of miniaturized on-chip quantitative assessment tools, enabling precise, in situ, and continuous monitoring of biological activities in close proximity.

Place, publisher, year, edition, pages
Springer Nature, 2025
National Category
Engineering and Technology Other Nanotechnology Atom and Molecular Physics and Optics
Identifiers
urn:nbn:se:kth:diva-373124 (URN)10.1038/s41378-025-01073-4 (DOI)41224775 (PubMedID)2-s2.0-105021471430 (Scopus ID)
Note

QC 20251121

Available from: 2025-11-20 Created: 2025-11-20 Last updated: 2026-01-23Bibliographically approved
2. Millimetric Implantable Device for Extended In Vivo Fluorescence Recording
Open this publication in new window or tab >>Millimetric Implantable Device for Extended In Vivo Fluorescence Recording
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2025 (English)In: 2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Institute of Electrical and Electronics Engineers (IEEE) , 2025, p. 566-569Conference paper, Published paper (Refereed)
Abstract [en]

In vivo fluorescence sensing devices have recently gained considerable attention owing to their capabilities and potential in advancing biomedical research, clinical diagnostics, and therapeutic applications. In this work, we present a highly miniaturized, fully implantable device capable of excitation, detection, and recording of fluorescence signals, enabling continuous measurements of biological processes in vivo. The device was engineered to be minimally invasive, with a compact 5×5×5mm3 form factor. It incorporates an optical system integrating micro illumination and sensing units with a sub-mm2 footprint, achieving selective detection of fluorescence signals in close proximity. Additionally, the device features low-power on-board electronics and a customized bi-stable magnetic switch for remote activation, resulting in a device lifetime of over a month once the device is powered on. The device successfully recorded the infusion of green fluorescence protein (GFP) solution at a low concentration of 100 μg/mL delivered at a rate of 4 μL/h for a 24-hour period, as well as the diffusion of a 150 μL GFP bolus with a concentration of 200 μg/mL over a 40-hour period, in a tissue-like phantom model made of gelatin. Further, the device was implanted into a living mouse for subcutaneous in vivo GFP recording as a proof of concept, and the fluorescence signal was successfully detected and recorded in the living animal.

Place, publisher, year, edition, pages
Institute of Electrical and Electronics Engineers (IEEE), 2025
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
urn:nbn:se:kth:diva-375875 (URN)10.1109/TRANSDUCERS61432.2025.11111316 (DOI)001600364100142 ()2-s2.0-105030286089 (Scopus ID)
Conference
The 23rd International Conference on Solid-State Sensors, Actuators and Microsystems, Orlando, FL, USA, June 29 - July 3, 2025
Note

QC 20260226

Available from: 2026-01-23 Created: 2026-01-23 Last updated: 2026-02-26Bibliographically approved
3. Millimeter-Scale Implantable Device for Continuous In Vivo Tracking of Tumor Growth via Fluorescence Sensing
Open this publication in new window or tab >>Millimeter-Scale Implantable Device for Continuous In Vivo Tracking of Tumor Growth via Fluorescence Sensing
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(English)Manuscript (preprint) (Other academic)
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
urn:nbn:se:kth:diva-375877 (URN)
Note

QC 20260217

Available from: 2026-01-23 Created: 2026-01-23 Last updated: 2026-02-17Bibliographically approved
4. Low-Temperature Fabrication of Millimeter-Scale MEMS-Based Piezoelectric Ultrasonic Energy Harvesters for Medical Implants
Open this publication in new window or tab >>Low-Temperature Fabrication of Millimeter-Scale MEMS-Based Piezoelectric Ultrasonic Energy Harvesters for Medical Implants
2024 (English)In: Journal of microelectromechanical systems, ISSN 1057-7157, E-ISSN 1941-0158, Vol. 33, no 5, p. 524-531Article in journal (Refereed) Published
Abstract [en]

MEMS-based piezoelectric ultrasonic energy harvesters (PUEH) have become one of the most promising options for replacing or transferring energy to batteries in medical implants, where device miniaturization and power optimization are needed. Among the most commonly used piezoelectric materials in PUEH, lead zirconate titanate (PZT) is widely acknowledged for its excellent piezoelectric properties, good stability, and low cost. However, the performance of PZT degrades when the processing temperature approaches and exceeds half of its Curie temperature Tc, limiting its application. Here, we demonstrate a highly miniaturized, low-temperature fabricated MEMS-based PUEH with an effective ultrasound harvesting area of 0.79 mm2 and an effective device volume of 0.35 mm3. The low-temperature adhesive epoxy bonding ensures the temperature throughout the entire fabrication process remains below 85°C, which preserves the properties of the integrated piezoelectric material to the greatest extent. This allows the use of bulk PZT-5H, a material that possesses superior piezoelectric properties, but has a relatively low Tc, to enhance device performance. Our device outputs a root-mean-square (RMS) voltage of 0.62 V and an RMS power of 0.19 mW on a 2 kΩ resistive load at an optimum operating frequency of 200 kHz, with a reception distance of 20 mm in water and input acoustic power intensity of 178 mW/cm2. The proposed design and fabrication technique enable our device to achieve the smallest effective size among the reported MEMS-based PUEH while still being capable of powering up numerous implantable medical devices and being compatible with various commercially available power management units. [2024-0081]

Place, publisher, year, edition, pages
Institute of Electrical and Electronics Engineers Inc., 2024
Keywords
Energy harvesting, medical implant, piezoelectricity, ultrasonic transducer
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
urn:nbn:se:kth:diva-355419 (URN)10.1109/JMEMS.2024.3418580 (DOI)001271968900001 ()2-s2.0-85206842684 (Scopus ID)
Note

QC 20241101

Available from: 2024-10-30 Created: 2024-10-30 Last updated: 2026-01-23Bibliographically approved
5. Millimeter-scale MEMS-based ultrasonic energy harvesting node for autonomous operation of implantable microdevices
Open this publication in new window or tab >>Millimeter-scale MEMS-based ultrasonic energy harvesting node for autonomous operation of implantable microdevices
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(English)Manuscript (preprint) (Other academic)
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
urn:nbn:se:kth:diva-375878 (URN)
Note

Submitted

QC 20260310

Available from: 2026-01-23 Created: 2026-01-23 Last updated: 2026-03-10Bibliographically approved

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