Endre søk
RefereraExporteraLink to record
Permanent link

Direct link
Referera
Referensformat
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Annet format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annet språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf
Vertical integration of microchips by magnetic assembly and edge wire bonding
KTH, Skolan för elektroteknik och datavetenskap (EECS), Intelligenta system, Mikro- och nanosystemteknik.ORCID-id: 0000-0002-3549-0228
KTH, Skolan för elektroteknik och datavetenskap (EECS), Intelligenta system, Mikro- och nanosystemteknik.ORCID-id: 0000-0002-3325-8273
KTH, Skolan för elektroteknik och datavetenskap (EECS), Intelligenta system, Mikro- och nanosystemteknik.ORCID-id: 0000-0003-1112-3308
KTH, Skolan för elektroteknik och datavetenskap (EECS), Intelligenta system, Mikro- och nanosystemteknik.ORCID-id: 0000-0003-1072-2691
Vise andre og tillknytning
2020 (engelsk)Inngår i: MICROSYSTEMS & NANOENGINEERING, ISSN 2055-7434, Vol. 6, nr 1, artikkel-id 12Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

The out-of-plane integration of microfabricated planar microchips into functional three-dimensional (3D) devices is a challenge in various emerging MEMS applications such as advanced biosensors and flow sensors. However, no conventional approach currently provides a versatile solution to vertically assemble sensitive or fragile microchips into a separate receiving substrate and to create electrical connections. In this study, we present a method to realize vertical magnetic-field-assisted assembly of discrete silicon microchips into a target receiving substrate and subsequent electrical contacting of the microchips by edge wire bonding, to create interconnections between the receiving substrate and the vertically oriented microchips. Vertical assembly is achieved by combining carefully designed microchip geometries for shape matching and striped patterns of the ferromagnetic material (nickel) on the backside of the microchips, enabling controlled vertical lifting directionality independently of the microchip's aspect ratio. To form electrical connections between the receiving substrate and a vertically assembled microchip, featuring standard metallic contact electrodes only on its frontside, an edge wire bonding process was developed to realize ball bonds on the top sidewall of the vertically placed microchip. The top sidewall features silicon trenches in correspondence to the frontside electrodes, which induce deformation of the free air balls and result in both mechanical ball bond fixation and around-the-edge metallic connections. The edge wire bonds are realized at room temperature and show minimal contact resistance (<0.2 Omega) and excellent mechanical robustness (>168mN in pull tests). In our approach, the microchips and the receiving substrate are independently manufactured using standard silicon micromachining processes and materials, with a subsequent heterogeneous integration of the components. Thus, this integration technology potentially enables emerging MEMS applications that require 3D out-of-plane assembly of microchips.

sted, utgiver, år, opplag, sider
NATURE PUBLISHING GROUP , 2020. Vol. 6, nr 1, artikkel-id 12
HSV kategori
Identifikatorer
URN: urn:nbn:se:kth:diva-271286DOI: 10.1038/s41378-019-0126-6ISI: 000517590500001PubMedID: 34567627Scopus ID: 2-s2.0-85079738557OAI: oai:DiVA.org:kth-271286DiVA, id: diva2:1420622
Merknad

QC 20200331

Tilgjengelig fra: 2020-03-31 Laget: 2020-03-31 Sist oppdatert: 2022-06-26bibliografisk kontrollert

Open Access i DiVA

Fulltekst mangler i DiVA

Andre lenker

Forlagets fulltekstPubMedScopus

Person

Ribet, FedericoWang, XiaojingLaakso, MikuPagliano, SimoneNiklaus, FrankRoxhed, NiclasStemme, Göran

Søk i DiVA

Av forfatter/redaktør
Ribet, FedericoWang, XiaojingLaakso, MikuPagliano, SimoneNiklaus, FrankRoxhed, NiclasStemme, Göran
Av organisasjonen

Søk utenfor DiVA

GoogleGoogle Scholar

doi
pubmed
urn-nbn

Altmetric

doi
pubmed
urn-nbn
Totalt: 353 treff
RefereraExporteraLink to record
Permanent link

Direct link
Referera
Referensformat
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Annet format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annet språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf