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Continuously Tunable Silicon Photonic Mems 2 X 2 Power Coupler
Ecole Polytech Fed Lausanne EPFL, Lausanne, Switzerland..
Ecole Polytech Fed Lausanne EPFL, Lausanne, Switzerland..
KTH, Skolan för elektroteknik och datavetenskap (EECS), Intelligenta system, Mikro- och nanosystemteknik.ORCID-id: 0000-0002-7339-6662
Interuniv Microelect Ctr IMEC, Leuven, Belgium..
Vise andre og tillknytning
2021 (engelsk)Inngår i: 2021 21St International Conference On Solid-State Sensors, Actuators and Microsystems (Transducers), Institute of Electrical and Electronics Engineers (IEEE) , 2021, s. 447-450Konferansepaper, Publicerat paper (Fagfellevurdert)
Abstract [en]

The integration of MEMS transducers in photonic integrated circuits provides opportunities for high efficiency photonic modulation and dynamic routing on-chip. We here present an electrostatically actuated, silicon photonic MEMS 2 x 2 power coupler, fabricated in IMEC's iSiPP50G platform followed by a dedicated MEMS release sequence. The in-plane, mechanical tuning mechanism provides analog power coupling between waveguides in a small form factor. With our experimental demonstration of broad, > 30 nm optical bandwidth, high extinction ratio of > 27 dB, and a low actuation voltage of only 6 V, the coupler fulfills the requirements for large-scale integration in next generation reconfigurable PICs.

sted, utgiver, år, opplag, sider
Institute of Electrical and Electronics Engineers (IEEE) , 2021. s. 447-450
Serie
International Solid-State Sensors Actuators and Microsystems Conference, ISSN 2167-0013
Emneord [en]
Microelectromechanical systems, photonic integrated circuits, silicon photonics, photonics, optical switch
HSV kategori
Identifikatorer
URN: urn:nbn:se:kth:diva-304861DOI: 10.1109/TRANSDUCERS50396.2021.9495551ISI: 000707041600121Scopus ID: 2-s2.0-85114962414OAI: oai:DiVA.org:kth-304861DiVA, id: diva2:1611552
Konferanse
21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), JUN 20-25, 2021, ELECTR NETWORK
Merknad

Part of proceedings: 978-1-6654-1267-4, QC 20230117

Tilgjengelig fra: 2021-11-15 Laget: 2021-11-15 Sist oppdatert: 2023-01-17bibliografisk kontrollert

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Edinger, PierreGylfason, Kristinn

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Totalt: 133 treff
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