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Modeling of high power impulse magnetron sputtering discharges with graphite target
Linköping Univ, Plasma & Coatings Phys Div, IFM Mat Phys, SE-58183 Linköping, Sweden..
Leibniz Inst Surface Engn IOM, Permoserstr 15, D-04318 Leipzig, Germany..
KTH, Skolan för elektroteknik och datavetenskap (EECS), Elektroteknik, Rymd- och plasmafysik. Linköping Univ, Plasma & Coatings Phys Div, IFM Mat Phys, SE-58183 Linköping, Sweden..ORCID-id: 0000-0003-1308-9270
Univ Twente, MESA Inst Nanotechnol, Ind Focus Grp XUV Opt, Drienerlolaan 5, NL-7522 NB Enschede, Netherlands..
Vise andre og tillknytning
2021 (engelsk)Inngår i: Plasma sources science & technology, ISSN 0963-0252, E-ISSN 1361-6595, Vol. 30, nr 11, artikkel-id 115017Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

The ionization region model (IRM) is applied to model a high power impulse magnetron sputtering discharge in argon with a graphite target. Using the IRM, the temporal variation of the various species and the average electron energy, as well as internal parameters such as the ionization probability, back-attraction probability, and the ionized flux fraction of the sputtered species, is determined. It is found that thedischarge develops into working gas recycling and most of the discharge current at the cathode target surface is composed of Ar+ ions, which constitute over 90% of the discharge current, while the contribution of the C+ ions is always small (<5%), even for peak current densities close to 3 A cm(-2). For the target species, the time-averaged ionization probability <alpha(t,pulse)> is low, or 13-27%, the ion back-attraction probability during the pulse <beta(t,pulse)> is high (>92%), and the ionized flux fraction is about 2%. It is concluded that in the operation range studied here it is a challenge to ionize carbon atoms, that are sputtered off of a graphite target in a magnetron sputtering discharge, when depositing amorphous carbon films.

sted, utgiver, år, opplag, sider
IOP Publishing Ltd , 2021. Vol. 30, nr 11, artikkel-id 115017
Emneord [en]
magnetron sputtering discharge, graphite, high power impulse magnetron sputtering, carbon
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Identifikatorer
URN: urn:nbn:se:kth:diva-306575DOI: 10.1088/1361-6595/ac352cISI: 000725856600001Scopus ID: 2-s2.0-85122424583OAI: oai:DiVA.org:kth-306575DiVA, id: diva2:1621705
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QC 20211220

Tilgjengelig fra: 2021-12-20 Laget: 2021-12-20 Sist oppdatert: 2022-09-15bibliografisk kontrollert

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Brenning, NilsRaadu, Michael A.Gudmundsson, Jon Tomas

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