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Inkjet printing, laser-based micromachining, and micro-3D printing technologies for MEMS
KTH, Skolan för elektroteknik och datavetenskap (EECS), Intelligenta system, Mikro- och nanosystemteknik.ORCID-id: 0000-0003-3452-6361
KTH, Skolan för elektroteknik och datavetenskap (EECS), Intelligenta system, Mikro- och nanosystemteknik.ORCID-id: 0000-0002-0525-8647
2020 (engelsk)Inngår i: Handbook of Silicon Based MEMS Materials and Technologies, Elsevier BV , 2020, s. 531-545Kapittel i bok, del av antologi (Annet vitenskapelig)
Abstract [en]

A number of unconventional micromachining technologies are emerging that are of potential interest for microelectromechanical systems (MEMS) manufacturing. Such micromachining processes include sequential processes in which devices on a substrate are formed one at a time, which is in contrast to conventional parallel semiconductor manufacturing processes. Nevertheless, many of the serial micromachining processes, including inkjet printing technologies and laser-based processes can be highly efficient and cost competitive, especially for low- and medium-sized manufacturing volumes as well as for prototyping purposes. The technologies presented in this chapter can be categorized as additive micromachining approaches (e.g., inkjet printing) and subtractive micromachining approaches (e.g., laser ablation). This chapter discusses the more mature technologies that are already being developed in a commercial context and a number of new and emerging micromachining approaches that are still in the early research and development stage. 

sted, utgiver, år, opplag, sider
Elsevier BV , 2020. s. 531-545
Emneord [en]
Etching, Focused ion beam milling and e-beam-assisted deposition, Inkjet printing, Laser ablation, Laser writing, Micro-laser sintering, Micromachining, Microstereolithography
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URN: urn:nbn:se:kth:diva-313887DOI: 10.1016/B978-0-12-817786-0.00021-9Scopus ID: 2-s2.0-85124857797OAI: oai:DiVA.org:kth-313887DiVA, id: diva2:1668467
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Part of proceedings: ISBN 9780128177860, QC 20220613

Tilgjengelig fra: 2022-06-13 Laget: 2022-06-13 Sist oppdatert: 2025-02-18bibliografisk kontrollert

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Fischer, Andreas C.Niklaus, Frank

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