Silicon photonic MEMS phase shifter with mu s time constant built on a foundry platformVise andre og tillknytning
2021 (engelsk)Inngår i: 2021 Conference On Lasers And Electro-Optics (CLEO), IEEE , 2021, artikkel-id STu2Q.1Konferansepaper, Publicerat paper (Fagfellevurdert)
Abstract [en]
MEMS enable low power tuners in silicon photonics, but existing phase shifters lack in range, speed, and loss. We implement a 2 pi phase shifter with a 1.54 mu s time constant and 0.5 dB insertion loss in IMEC's iSiPP5OG platform.
sted, utgiver, år, opplag, sider
IEEE , 2021. artikkel-id STu2Q.1
Serie
Conference on Lasers and Electro-Optics, ISSN 2160-9020
HSV kategori
Identifikatorer
URN: urn:nbn:se:kth:diva-318235ISI: 000831479802308OAI: oai:DiVA.org:kth-318235DiVA, id: diva2:1697077
Konferanse
Conference on Lasers and Electro-Optics (CLEO), MAY 09-14, 2021, ELECTR NETWORK
Merknad
Part of proceedings: ISBN 978-1-943580-91-0, QC 20220920
2022-09-202022-09-202022-09-20bibliografisk kontrollert