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On the influence of electrode surfaces on the plasma chemistry of a capacitive chlorine discharge
Science Institute, University of Iceland, Dunhaga 3, IS-107 Reykjavik, Iceland, Dunhaga 3.
KTH, Skolan för elektroteknik och datavetenskap (EECS), Elektroteknik, Rymd- och plasmafysik. Science Institute, University of Iceland, Dunhaga 3, Reykjavik, IS-107, Iceland.ORCID-id: 0000-0002-8153-3209
2024 (engelsk)Inngår i: Plasma sources science & technology, ISSN 0963-0252, E-ISSN 1361-6595, Vol. 33, nr 6, artikkel-id 065006Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

One-dimensional particle-in-cell/Monte Carlo collisional simulations are performed on capacitive chlorine discharges with 2.54 cm gap rf driven by a sinusoidal with voltage amplitude of 222 V at driving frequency of 13.56 MHz. The properties of the discharge, the reaction rates for creation and loss of a few key species, the electron energy probability function, and the primary electron power absorption processes are explored as the gas pressure and the inclusion of secondary electron emission processes in the discharge model is varied. Five cases are investigated, including and neglecting electron, ion, and fast neutrals induced secondary electron emission. The negative ion Cl− is almost entirely created by dissociative attachment and lost through ion-ion recombination, and therefore the capacitive chlorine discharge is recombination dominated.

sted, utgiver, år, opplag, sider
IOP Publishing , 2024. Vol. 33, nr 6, artikkel-id 065006
Emneord [en]
capacitive discharge, chlorine, particle-in-cell Monte Carlo collision
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Identifikatorer
URN: urn:nbn:se:kth:diva-348759DOI: 10.1088/1361-6595/ad51a4ISI: 001250226200001Scopus ID: 2-s2.0-85196019022OAI: oai:DiVA.org:kth-348759DiVA, id: diva2:1878669
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QC 20240702

Tilgjengelig fra: 2024-06-27 Laget: 2024-06-27 Sist oppdatert: 2024-07-02bibliografisk kontrollert

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