Open this publication in new window or tab >>Show others...
2020 (English)In: Surface & Coatings Technology, ISSN 0257-8972, E-ISSN 1879-3347, Vol. 393, article id 125778Article in journal (Refereed) Published
Abstract [en]
The reactivity of a quaternary multi-principal element alloy (MPEA), CoCrFeNi, as a substrate in thermal halide chemical vapor deposition (CVD) processes for titanium nitride (TiN) coatings was studied. The coatings were deposited at 850 degrees C-950 degrees C using TiCl4, H-2 and N-2 precursors. The coating microstructures were characterized using X-ray diffraction (XRD), scanning and transmission electron microscopy (SEM/TEM) with energy dispersive X-ray spectroscopy (EDS). Thermodynamic calculations of substrate and coating stability for a gas phase environment of N-2 and H-2 within a temperature range relevant for the experiments showed that Cr is expected to form hexagonal Cr2N and cubic (Ti1-epsilon 1 Cr epsilon 1)N or (Cr1-epsilon 2 Ti epsilon 2)N phases. These phases could however not be discerned in the samples by XRD after the depositions. Cr was detected at the grain boundaries and the top surface by EDS for a sample synthesized at 950 degrees C. Grain boundary and surface diffusion, respectively, were the suggested mechanisms for Cr transport into the coating and onto the top surface. Although thermodynamic calculations indicated that Cr is the most easily etched component of the CoCrFeNi alloy to form gaseous chlorides in similar concentrations to that of the residual Ti-chlorides, no sign of etching were found according to the imaging of the sample cross-sections using SEM and TEM. Cross-section and top surface images further confirmed that the choice of substrate had no significant detrimental influence on the film growth or microstructure.
Place, publisher, year, edition, pages
Elsevier BV, 2020
Keywords
Chemical vapor deposition, Transmission electron microscopy, X-ray diffraction, Calphad, Titanium nitride, Multi-principal element alloy
National Category
Manufacturing, Surface and Joining Technology
Identifiers
urn:nbn:se:kth:diva-273872 (URN)10.1016/j.surfcoat.2020.125778 (DOI)000532676600005 ()2-s2.0-85084188290 (Scopus ID)
Note
QC 20200603
2020-06-032020-06-032024-03-18Bibliographically approved