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Silicon photonic MEMS phase shifter with µs time constant built on a foundry platform
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0002-7339-6662
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0001-7249-7392
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2021 (English)In: 2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings, Institute of Electrical and Electronics Engineers Inc. , 2021Conference paper, Published paper (Refereed)
Abstract [en]

MEMS enable low power tuners in silicon photonics, but existing phase shifters lack in range, speed, and loss. We implement a 2p phase shifter with a 1.54 µs time constant and 0.5 dB insertion loss in IMEC's iSiPP50G platform. 
Place, publisher, year, edition, pages
Institute of Electrical and Electronics Engineers Inc. , 2021.
Keywords [en]
Optical fiber communication, Optical fibers, Photonic devices, Silicon photonics, Low Power, MEMS phase shifter, Phase-shifters, Silicon photonic MEMS, Time-constants, Phase shifters
National Category
Atom and Molecular Physics and Optics Communication Systems
Identifiers
URN: urn:nbn:se:kth:diva-313852Scopus ID: 2-s2.0-85120490136OAI: oai:DiVA.org:kth-313852DiVA, id: diva2:1668277
Conference
2021 Conference on Lasers and Electro-Optics, CLEO 2021, Virtual, Online, 9-14 May 2021
Note

Part of proceedings: ISBN 978-1-943580-91-0

QC 20220613

Available from: 2022-06-13 Created: 2022-06-13 Last updated: 2022-06-25Bibliographically approved

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Edinger, PierreKristinsson, KristóferErrando-Herranz, CarlosGylfason, Kristinn

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CiteExportLink to record
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Citation style
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  • de-DE
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