Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phaseShow others and affiliations
2023 (English)In: Optics Express, E-ISSN 1094-4087, Vol. 31, no 4, p. 6540-6551
Article in journal (Refereed) Published
Abstract [en]
Ring resonators are a vital element for filters, optical delay lines, or sensors in silicon photonics. However, reconfigurable ring resonators with low-power consumption are not available in foundries today. We demonstrate an add-drop ring resonator with the independent tuning of round-trip phase and coupling using low-power microelectromechanical (MEMS) actuation. At a wavelength of 1540 nm and for a maximum voltage of 40 V, the phase shifters provide a resonance wavelength tuning of 0.15 nm, while the tunable couplers can tune the optical resonance extinction ratio at the through port from 0 to 30 dB. The optical resonance displays a passive quality factor of 29 000, which can be increased to almost 50 000 with actuation. The MEMS rings are individually vacuum-sealed on wafer scale, enabling reliable and long-term protection from the environment. We cycled the mechanical actuators for more than 4 x 109 cycles at 100 kHz, and did not observe degradation in their response curves. On mechanical resonance, we demonstrate a modulation increase of up to 15 dB, with a voltage bias of 4 V and a peak drive amplitude as low as 20 mV.
Place, publisher, year, edition, pages
Optica Publishing Group , 2023. Vol. 31, no 4, p. 6540-6551
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:kth:diva-325257DOI: 10.1364/OE.480219ISI: 000942062500006PubMedID: 36823907Scopus ID: 2-s2.0-85147844696OAI: oai:DiVA.org:kth-325257DiVA, id: diva2:1748697
Note
QC 20230404
2023-04-042023-04-042023-04-04Bibliographically approved