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Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0002-7339-6662
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0002-2752-7422
KTH.
Ecole Polytech Fed Lausanne, CM 1 364 Ctr Midi,Stn 10, CH-1015 Lausanne, Switzerland..
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2023 (English)In: Optics Express, E-ISSN 1094-4087, Vol. 31, no 4, p. 6540-6551Article in journal (Refereed) Published
Abstract [en]

Ring resonators are a vital element for filters, optical delay lines, or sensors in silicon photonics. However, reconfigurable ring resonators with low-power consumption are not available in foundries today. We demonstrate an add-drop ring resonator with the independent tuning of round-trip phase and coupling using low-power microelectromechanical (MEMS) actuation. At a wavelength of 1540 nm and for a maximum voltage of 40 V, the phase shifters provide a resonance wavelength tuning of 0.15 nm, while the tunable couplers can tune the optical resonance extinction ratio at the through port from 0 to 30 dB. The optical resonance displays a passive quality factor of 29 000, which can be increased to almost 50 000 with actuation. The MEMS rings are individually vacuum-sealed on wafer scale, enabling reliable and long-term protection from the environment. We cycled the mechanical actuators for more than 4 x 109 cycles at 100 kHz, and did not observe degradation in their response curves. On mechanical resonance, we demonstrate a modulation increase of up to 15 dB, with a voltage bias of 4 V and a peak drive amplitude as low as 20 mV.

Place, publisher, year, edition, pages
Optica Publishing Group , 2023. Vol. 31, no 4, p. 6540-6551
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:kth:diva-325257DOI: 10.1364/OE.480219ISI: 000942062500006PubMedID: 36823907Scopus ID: 2-s2.0-85147844696OAI: oai:DiVA.org:kth-325257DiVA, id: diva2:1748697
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QC 20230404

Available from: 2023-04-04 Created: 2023-04-04 Last updated: 2023-04-04Bibliographically approved

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Edinger, PierreJo, GaehunVan Nguyen, Chris PhongErrando-Herranz, CarlosBleiker, Simon J.Niklaus, FrankGylfason, Kristinn

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Edinger, PierreJo, GaehunVan Nguyen, Chris PhongErrando-Herranz, CarlosKhan, UmarBleiker, Simon J.Niklaus, FrankGylfason, Kristinn
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Micro and NanosystemsKTH
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