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Superconducting single-photon detectors fabricated via a focused electron beam-induced deposition process
KTH, School of Engineering Sciences (SCI), Applied Physics, Quantum and Biophotonics.ORCID iD: 0000-0001-6875-6849
KTH, School of Engineering Sciences (SCI), Applied Physics.ORCID iD: 0000-0002-0367-687x
KTH, School of Engineering Sciences (SCI), Applied Physics, Quantum and Biophotonics.ORCID iD: 0000-0003-2080-9897
KTH, School of Engineering Sciences (SCI), Applied Physics, Quantum and Biophotonics.ORCID iD: 0000-0002-5726-1063
2023 (English)In: AIP Advances, E-ISSN 2158-3226, Vol. 13, no 4, article id 045219Article in journal (Refereed) Published
Abstract [en]

Superconducting detectors have become essential devices for high-performance single-photon counting over a wide wavelength range with excellent time resolution. Detector fabrication typically relies on resist-based lithography processes, which can limit possibilities for device integration, e.g., on unconventional substrates. Here, we demonstrate a resist-free fabrication route for realizing superconducting nanowire single-photon detectors based on focused electron beam-induced deposition. Utilizing direct writing of a Pt-C mask, we achieved nanowire meanders with linewidths below 100 nm, operated them as superconducting devices for the detection of visible and near-infrared photons, and showed detector integration on side-polished optical fibers. Being compatible with device fabrication on curved irregular surfaces, our approach could enable superconducting detector integration in complex configurations.

Place, publisher, year, edition, pages
AIP Publishing , 2023. Vol. 13, no 4, article id 045219
National Category
Condensed Matter Physics
Identifiers
URN: urn:nbn:se:kth:diva-326869DOI: 10.1063/5.0080674ISI: 000973660000002Scopus ID: 2-s2.0-85153800638OAI: oai:DiVA.org:kth-326869DiVA, id: diva2:1756891
Note

QC 20230515

Available from: 2023-05-15 Created: 2023-05-15 Last updated: 2023-12-22Bibliographically approved

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fulltext(5412 kB)141 downloads
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Steinhauer, StephanIovan, AdrianGyger, SamuelZwiller, Val

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CiteExportLink to record
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Citation style
  • apa
  • ieee
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