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Two-step etch in n-on-p type-II superlattices for surface leakage reduction in mid-wave infrared megapixel detectors
KTH, School of Electrical Engineering and Computer Science (EECS), Electrical Engineering, Electronics and Embedded systems, Electronic and embedded systems. IRnova AB, Isafjordsgatan 22, S-16440 Kista, Sweden..
IRnova AB, Isafjordsgatan 22, S-16440 Kista, Sweden..
IRnova AB, Isafjordsgatan 22, S-16440 Kista, Sweden..
IRnova AB, Isafjordsgatan 22, S-16440 Kista, Sweden..
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2023 (English)In: Opto-Electronics Review, ISSN 1230-3402, E-ISSN 1896-3757, Vol. 31, no 1, article id e144556Article in journal (Refereed) Published
Abstract [en]

This work investigates the potential of p-type InAs/GaSb superlattice for the fabrication of full mid-wave megapixel detectors with n-on-p polarity. A significantly higher surface leakage is observed in deep-etched n-on-p photodiodes compared to p-on-n diodes. Shallow-etch and two-etch-step pixel geometry are demonstrated to mitigate the surface leakage on devices down to 10 mu m with n-on-p polarity. A lateral diffusion length of 16 mu m is extracted from the shallow etched pixels, which indicates that cross talk could be a major problem in small pitch arrays. Therefore, the two-etch-step process is used in the fabrication of 1280 x 1024 arrays with a 7.5 mu m pitch, and a potential operating temperature up to 100 K is demonstrated.

Place, publisher, year, edition, pages
Polish Academy of Sciences Chancellery , 2023. Vol. 31, no 1, article id e144556
Keywords [en]
Infrared detector, surface leakage, type-II superlattice, megapixel, n-on-p
National Category
Physical Sciences
Identifiers
URN: urn:nbn:se:kth:diva-328320DOI: 10.24425/opelre.2023.144556ISI: 000978772100012Scopus ID: 2-s2.0-85162113404OAI: oai:DiVA.org:kth-328320DiVA, id: diva2:1763359
Note

QC 20230607

Available from: 2023-06-07 Created: 2023-06-07 Last updated: 2024-02-21Bibliographically approved
In thesis
1. Process development of III-V-based infrared detectors
Open this publication in new window or tab >>Process development of III-V-based infrared detectors
2024 (English)Doctoral thesis, comprehensive summary (Other academic)
Alternative title[sv]
Processutveckling av III-V-baserade infraröda detektorer
Abstract [en]

Type-II Superlattice (T2SL) detectors have revolutionized the field of infraredimaging, establishing themselves as the forefront technology in defense, space,and industrial applications. These detectors enable larger formats and higheroperating temperatures (HOT) that minimize the need for bulky and energyconsumingcryogenic cooling, paving the way for imaging systems with reducedSize, Weight, and Power (SWaP).Their versatility across various IR wavebands—long-wavelength, midwavelength,and extended short-wavelength—combined with the intrinsicscalability characteristic of III-V detectors, positions T2SL technology as the idealchoice for next-generation HOT and high-resolution (HD) detectors.This thesis focuses on improving the manufacturing process for T2SL arrays toreduce surface leakage currents induced during pixel etching. This challengebecomes more pronounced with smaller pixels and directly affects the maximumoperating temperature.The investigation into T2SL detector performance provides comprehensiveinsights into the detectors' electrical characteristics. This includes 1/f noiseanalysis and a detailed experimental and quantitative modeling of surface leakagecurrents, proposing strategies for their reduction. Furthermore, the study delvesinto light-matter interactions within focal plane arrays (FPAs) to describe opticalconcentration effects to increase the sensitivity and provides Modulation transferfunction measurements and simulations to discuss the resolution of T2SL arrays.Employing diverse Sb-based T2SL detector photodiode structures, this thesisreports significant progress in the fabrication process, leading to remarkableachievements. These include the demonstration and industrial production of a640 × 512 – 15 μm format FPA operating at 150 K; the production of 10, 7.5,and 5 μm pitch arrays, all capable of functioning at 150 K; and the demonstrationof small-pitch HD FPAs, with the capability of operating at 150K.

Abstract [sv]

Typ-II Supergitter (T2SL) detektorer har revolutionerat fältet för infraröd (IR)avbildning och etablerat sig som spetsteknologi inom försvar, rymd ochindustriella tillämpningar. Dessa detektorer möjliggör större format och högrearbetstemperaturer (HOT) som minskar behovet av plats- och energikrävandekryogen kylning, vilket banar väg för IR-kameror med minskad Storlek, Vikt ochEnergiåtgång (SWaP).Deras mångsidighet över olika IR-våglängdsband—långvåg, mellanvåg ochkortvåg—kombinerat med den inneboende skalbarheten som är karakteristisk förIII-V material, positionerar T2SL-teknologin som det ideala valet för nästagenerations HOT och högupplösta (HD) detektorer.Denna avhandling fokuserar på att förbättra tillverkningsprocessen för T2SLdetektormatriserför att minska ytströmmar som uppstår vid pixeletsning. Dennautmaning växer med minskad pixelstorlek och påverkar direkt en detektorsmaximala arbetstemperatur.Genom att betrakta T2SL-detektorernas prestanda ges omfattande insikter idetektorernas elektriska egenskaper. Detta inkluderar analys av 1/f-brus och endetaljerad experimentell och kvantitativ modellering av ytströmmar, samt förslagpå strategier för att reducera dessa. Vidare går studien in på fenomenet av optiskkoncentration som uppstår i fokalplansmatriser (FPAer) och resulterar i ett ökatsignal-brusförhållande. Slutligen analyseras graden av optiska och elektriskaläckage mellan närliggande pixlar genom mätning och simulering avmoduleringsöverföringsfunktionen.Denna avhandling presenterar betydande framsteg i tillverkningsprocessen hosflera olika T2SL-detektorstrukturer vilket resulterat i anmärkningsvärda stegframåt för IR-detektorteknologin. Dessa inkluderar industriell produktion avFPAer med 640 × 512 pixlar med 15 μm:s pixelstorlek och med enarbetstemperatur på 150 K; produktionen av detektormatriser med 10, 7.5, och 5μm pixel-till-pixelavstånd, alla kapabla att fungera vid 150 K; och demonstrationav HD FPAer, med förmåga att fungera vid 150 K.

Place, publisher, year, edition, pages
Stockholm, Sweden: KTH Royal Institute of Technology, 2024. p. 191
Series
TRITA-EECS-AVL ; 2024:18
Keywords
infrared detectors, Type-II superlattice, surface leakage, high operating temperature, passivation, optical concentration, modulation transfer function, noise., infraröda detektorer, Typ-II supergitter, ytströmmar, hög arbetstemperatur, passivering, optisk koncentration, moduleringsöverföringsfunktion, brus
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Information and Communication Technology
Identifiers
urn:nbn:se:kth:diva-343591 (URN)978-91-8040-847-9 (ISBN)
Public defence
2024-03-13, Electrum, Sal C, Kistagången 16, Stockholm, 13:00 (English)
Opponent
Supervisors
Note

QC 20240221

Available from: 2024-02-21 Created: 2024-02-21 Last updated: 2025-12-03Bibliographically approved

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Ramos Santesmases, DavidHellström, Per-Erik

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