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Postprocessing free 3D printing of glasses for seamless integration in optical microsystems
Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan.ORCID iD: 0000-0002-7659-842X
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0000-0002-8822-5014
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0000-0002-7339-6662
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0000-0001-9552-4234
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2026 (English)In: MOEMS and Miniaturized Systems XXV, SPIE-Intl Soc Optical Eng , 2026, Vol. 13907, article id 139070AConference paper, Published paper (Refereed)
Abstract [en]

Integrated optical microsystems are key to next-generation communication, sensing, and quantum technologies, with the potential to exceed the capabilities of conventional microelectronics. Such systems rely on precise control of light, but creating optimal 3D micro-optics is challenging for conventional microfabrication technologies. Multiphoton lithography (MPL) offers nanoscale 3D printing capabilities, while efforts to extend MPL to high-performance glasses typically involve harsh high-temperature or chemical postprocessing that is incompatible with integrated optical microsystems. To address this, we explore the use of hydrogen silsesquioxane (HSQ), an inorganic precursor, for MPL. We demonstrate postprocessing-free 3D printing of solid silica glass and self-forming glass nanogratings with nanoscale resolution. These advances enable the direct integration of glass micro-optics on photonic chips and optical fibers. We present functional 3D-printed glass optical devices, including on-chip ring resonators and photoluminescent sources, and fiber-tip refractive index sensors and polarization beam splitters, opening new avenues for high-performance optical microsystem integration.

Place, publisher, year, edition, pages
SPIE-Intl Soc Optical Eng , 2026. Vol. 13907, article id 139070A
Keywords [en]
3D printing, Glass, Integrated micro-optics, Multiphoton lithography
National Category
Nanotechnology for Material Science
Identifiers
URN: urn:nbn:se:kth:diva-383000DOI: 10.1117/12.3084227Scopus ID: 2-s2.0-105039605212OAI: oai:DiVA.org:kth-383000DiVA, id: diva2:2066106
Conference
25th MOEMS and Miniaturized Systems, San Francisco, United States, Jan 19 2026 - Jan 20 2026
Note

Part of ISBN 9781510697317

QC 20260604

Available from: 2026-06-04 Created: 2026-06-04 Last updated: 2026-06-04Bibliographically approved

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Huang, Po-HanLai, Lee-LunEdinger, PierreStemme, GöranGylfason, KristinnNiklaus, Frank

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