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Lithographic patterning of conformal thin films on 3D structures using Scaffold-architected Lift-off masks
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0000-0001-9803-6076
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0009-0006-6337-4650
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.
KTH, School of Electrical Engineering and Computer Science (EECS), Micro and Nanosystems.ORCID iD: 0000-0002-8822-5014
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2026 (English)In: Nature Communications, E-ISSN 2041-1723, Vol. 17, no 1, article id 6201Article in journal (Refereed) Published
Abstract [en]

Micro- and nanoscale patterning of conformal thin-film coatings on the exterior surfaces of complex three-dimensional (3D) structures is essential for emerging applications such as soft robotics, photonics, and functional 3D-printed MEMS devices. However, existing methods struggle to deliver high-resolution patterning on complex 3D structures and often suffer from poor thickness control, and inadequate surface conformity of the thin-film coatings. Here we present a robust approach for patterning of conformal thin-film coatings on complex 3D structures, including on sloped surfaces with angles up to 90°, with multiscale dimensions from 100 μm to 100 nm, and even down to the sub-30 nm scale when mask shrinkage techniques are used. This patterning approach utilizes a lithographically defined 3D Scaffold-Architected Lift-Off (SALO) mask in the lift-off process. It is agnostic to the used thin-film deposition process and enables even lift-off patterning of atomic layer deposited (ALD) conformal coatings, a task infeasible for conventional shadowing-based lift-off processes. Our approach opens opportunities for manufacturing complex 3D structures at the micro- and nanoscale by enabling lithographic patterning on the exterior surfaces of arbitrary 3D structures.

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Springer Nature , 2026. Vol. 17, no 1, article id 6201
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Other Materials Engineering
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URN: urn:nbn:se:kth:diva-386088DOI: 10.1038/s41467-026-75538-zPubMedID: 42448711Scopus ID: 2-s2.0-105044534369OAI: oai:DiVA.org:kth-386088DiVA, id: diva2:2088148
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QC 20260724

Available from: 2026-07-24 Created: 2026-07-24 Last updated: 2026-07-24Bibliographically approved

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Liu, XinxinChe, ZifanMaj, ZofiaLai, Lee-LunGylfason, Kristinn B.Dubois, ValentinN. Raja, ShyamprasadStemme, GöranNiklaus, Frank

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Liu, XinxinChe, ZifanMaj, ZofiaLai, Lee-LunGylfason, Kristinn B.Dubois, ValentinN. Raja, ShyamprasadStemme, GöranNiklaus, Frank
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