Micro manufacturing has developed into many areas over the past decade. Several manufacturing technologies are available but the precision and accuracy of the techniques are still difficult to get access to. Typically the capability information of micro milling equipment is based on specifications given by the machine deliverers. The specified high accuracy is likely to be altered in practice because of environmental conditions and operator skills. So in practice the absolute performances of micro milling/machining equipment may be far off from their listed specifications. When forming the EUMINAfab infrastructure consortium it was decided that independent high precision verification testsshould be made on different installations to help the micro-manufacturers to get the real capability information of their equipment and be able to improve performance to a higher EUMINAfab level. In this study a comprehensive verification test was designed and carried out by using an ultra-precision metrology method for 2D measurements in order to establish more knowledge about the capabilities of micro milling equipment. The measurement results show the machine’s X,Y positioning accuracy, pseudo-repeatability, reproducibility and axis straightness of two different micro milling installations.
QC 20140304
QC 20140612