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On the role of ion potential energy in low energy HiPIMS deposition: An atomistic simulation
Reykjavik Univ, Sch Technol, Dept Engn, Menntavegur 1, IS-102 Reykjavik, Iceland.;Univ Iceland, Sci Inst, Dunhaga 3, IS-107 Reykjavik, Iceland..
KTH, School of Electrical Engineering and Computer Science (EECS), Electrical Engineering, Space and Plasma Physics. Univ Iceland, Sci Inst, Dunhaga 3, IS-107 Reykjavik, Iceland..ORCID iD: 0000-0002-8153-3209
Univ Orleans, GREMI UMR7344 CNRS, BP6744, F-45067 Orleans 2, France..
Reykjavik Univ, Sch Technol, Dept Engn, Menntavegur 1, IS-102 Reykjavik, Iceland..
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2021 (English)In: Surface & Coatings Technology, ISSN 0257-8972, E-ISSN 1879-3347, Vol. 426, article id 127726Article in journal (Refereed) Published
Abstract [en]

We study the effect of the so-called ion potential or non-kinetic energies of bombarding ions during ionized physical vapor deposition of Cu using molecular dynamics simulations. In particular we focus on low energy high power impulse magnetron sputtering (HiPIMS) deposition, in which the potential energy of ions can be comparable to their kinetic energy. The ion potential, as a short-ranged repulsive force between the ions of the film-forming material and the surface atoms (substrate and later deposited film), is defined by the Ziegler-Biersack-Littmark potential. Analyzing the final structure indicates that, including the ion potential leads to a slightly lower interface mixing and fewer point defects (such as vacancies and interstitials), but resputtering and twinning have increased slightly. However, by including the ion potential the collision pattern changes. We also observed temporary formation of a ripple/pore with 5 nm height when the ion potential is included. The latter effect can explain the pores that have been observed experimentally in HiPIMS deposited Cu thin films by atomic force microscopy.

Place, publisher, year, edition, pages
Elsevier BV , 2021. Vol. 426, article id 127726
Keywords [en]
Ion potential, HiPIMS, Deposition, Molecular dynamics, ZBL potential
National Category
Materials Chemistry
Identifiers
URN: urn:nbn:se:kth:diva-303946DOI: 10.1016/j.surfcoat.2021.127726ISI: 000704245600002Scopus ID: 2-s2.0-85117105878OAI: oai:DiVA.org:kth-303946DiVA, id: diva2:1605651
Note

QC 20211025

Available from: 2021-10-25 Created: 2021-10-25 Last updated: 2022-06-25Bibliographically approved

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Gudmundsson, Jon Tomas

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