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Operating modes and target erosion in high power impulse magnetron sputtering
Leibniz Inst Surface Engn IOM, Permoserstr 15, D-04318 Leipzig, Germany..
KTH, School of Electrical Engineering and Computer Science (EECS), Electrical Engineering, Space and Plasma Physics. Linköping Univ, Plasma & Coatings Phys Div, IFM Mat Phys, SE-58183 Linköping, Sweden..ORCID iD: 0000-0003-1308-9270
Univ Twente, MESA Inst Nanotechnol, Ind Focus Grp XUV Opt, Drienerlolaan 5, NL-7522 NB Enschede, Netherlands..
KTH, School of Electrical Engineering and Computer Science (EECS), Electrical Engineering, Space and Plasma Physics.ORCID iD: 0000-0002-1299-5039
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2022 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 40, no 4, p. 043005-, article id 043005Article in journal (Refereed) Published
Abstract [en]

Magnetron sputtering combines a glow discharge with sputtering from a target that simultaneously serves as a cathode for the discharge. The electrons of the discharge are confined between overarching magnetic field lines and the negatively biased cathode. As the target erodes during the sputter process, the magnetic field strengthens in the cathode vicinity, which can influence discharge parameters with the risk of impairing reproducibility of the deposition process over time. This is of particular concern for high-power impulse magnetron sputtering (HiPIMS) as the discharge current and voltage waveforms vary strongly with the magnetic field strength. We here discuss ways to limit the detrimental effect of target erosion on the film deposition process by choosing an appropriate mode of operation for the discharge. The goal is to limit variations of two principal flux parameters, the deposition rate and the ionized flux fraction. As an outcome of the discussion, we recommend operating HiPIMS discharges by maintaining the peak discharge current constant.

Place, publisher, year, edition, pages
American Vacuum Society , 2022. Vol. 40, no 4, p. 043005-, article id 043005
National Category
Fusion, Plasma and Space Physics
Identifiers
URN: urn:nbn:se:kth:diva-315528DOI: 10.1116/6.0001919ISI: 000814155600001Scopus ID: 2-s2.0-85133130195OAI: oai:DiVA.org:kth-315528DiVA, id: diva2:1681828
Note

QC 20220707

Available from: 2022-07-07 Created: 2022-07-07 Last updated: 2022-07-07Bibliographically approved

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Brenning, NilsRaadu, Michael A.Gudmundsson, Jon Tomas

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Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films
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