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Angular distribution of titanium ions and neutrals in high-power impulse magnetron sputtering discharges
Linköping Univ, Dept Phys Chem & Biol IFM, Plasma & Coatings Phys Div, SE-58183 Linköping, Sweden.;Rhein Westfal TH Aachen, DE-52062 Aachen, Germany..
Linköping Univ, Dept Phys Chem & Biol IFM, Plasma & Coatings Phys Div, SE-58183 Linköping, Sweden.;Evatec AG, Hauptstr 1a, CH-9477 Trubbach, Switzerland..
Univ Twente, MESA Inst Nanotechnol, Ind Focus Grp XUV Opt, NL-7522 Enschede, Netherlands..
KTH, School of Electrical Engineering and Computer Science (EECS), Electrical Engineering, Space and Plasma Physics. Univ Iceland, Sci Inst, IS-107 Reykjavik, Iceland..ORCID iD: 0000-0002-8153-3209
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2023 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 41, no 3, article id 033009Article in journal (Refereed) Published
Abstract [en]

The angular dependence of the deposition rates due to ions and neutrals in high-power impulse magnetron sputtering (HiPIMS) discharges with a titanium target were determined experimentally using a magnetically shielded and charge-selective quartz crystal microbalance (or ionmeter). These rates have been established as a function of the argon working gas pressure, the peak discharge current density, and the pulse length. For all explored cases, the total deposition rate exhibits a heart-shaped profile and the ionized flux fraction peaks on the discharge axis normal to the cathode target surface. This heart-shaped pattern is found to be amplified at increasing current densities and reduced at increased working gas pressures. Furthermore, it is confirmed that a low working gas pressure is beneficial for achieving high deposition rates and high ionized flux fractions in HiPIMS operation.

Place, publisher, year, edition, pages
American Vacuum Society , 2023. Vol. 41, no 3, article id 033009
National Category
Fusion, Plasma and Space Physics
Identifiers
URN: urn:nbn:se:kth:diva-328792DOI: 10.1116/6.0002555ISI: 000978718500001Scopus ID: 2-s2.0-85158094900OAI: oai:DiVA.org:kth-328792DiVA, id: diva2:1766408
Note

QC 20230613

Available from: 2023-06-13 Created: 2023-06-13 Last updated: 2023-06-13Bibliographically approved

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Gudmundsson, Jon Tomas

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