Semi-insulating InP:Fe growth by hydride vapor phase epitaxy for advanced buried heterostructure quantum cascade lasersShow others and affiliations
2023 (English)In: Novel In-Plane Semiconductor Lasers XXII, SPIE-Intl Soc Optical Eng , 2023, article id 1244009Conference paper, Published paper (Refereed)
Abstract [en]
Buried heterostructure quantum cascade lasers (BH-QCLs) operating at high temperature in mid-infrared (MIR) to THz spectral range are desired for chemical sensing and free-space optical communication (FOC). In this work, Fe doped semi-insulating InP (SI-InP) regrowth is demonstrated in a hydride vapor phase epitaxy (HVPE) reactor for advanced MIR and THz BH-QCLs grown by MBE and MOCVD. SI-InP regrowth is implemented in THz QCL pillar arrays and narrow width and reverse-taper MIR BH-QCLs for efficient heat dissipation. By exploiting SI-InP regrowth, the parasitic capacitance in MIR distributed feedback BH-QCL can be suppressed, which is exploited for high speed FOC application.
Place, publisher, year, edition, pages
SPIE-Intl Soc Optical Eng , 2023. article id 1244009
Keywords [en]
buried heterostructure quantum cascade laser, Hydride vapor phase epitaxy, mid-infrared free space optical communication, semi-insulating InP, terahertz quantum cascade laser
National Category
Condensed Matter Physics
Identifiers
URN: urn:nbn:se:kth:diva-338637DOI: 10.1117/12.2645959Scopus ID: 2-s2.0-85160701219OAI: oai:DiVA.org:kth-338637DiVA, id: diva2:1808264
Conference
Novel In-Plane Semiconductor Lasers XXII 2023, San Francisco, United States of America, Jan 31 2023 - Feb 2 2023
Note
Part of ISBN 9781510659858
QC 20231030
2023-10-302023-10-302023-10-30Bibliographically approved