Sensitivity-optimized waveguide-based methane gas sensor in the mid-IR 2024 (English)In: CLEO: Science and Innovations, CLEO: S and I 2024 in Proceedings CLEO 2024, Part of Conference on Lasers and Electro-Optics, Optical Society of America , 2024Conference paper, Published paper (Refereed)

Abstract [en]

We demonstrate methane gas sensing using suspended silicon waveguides and experimentally validate the sensitivity optimization of waveguide-based gas sensors by varying waveguide lengths. This method enables application-optimized integrated optical gas sensors.

Place, publisher, year, edition, pages

Optical Society of America , 2024.

National Category

Atom and Molecular Physics and Optics Other Electrical Engineering, Electronic Engineering, Information Engineering Other Physics Topics

Identifiers

URN: urn:nbn:se:kth:diva-354673Scopus ID: 2-s2.0-85205133645OAI: oai:DiVA.org:kth-354673DiVA, id: diva2:1904569

Conference

CLEO: Science and Innovations in CLEO 2024, CLEO: S and I 2024 - Part of Conference on Lasers and Electro-Optics, Charlotte, United States of America, May 5 2024 - May 10 2024

Note

QC 20241010

Available from: 2024-10-09 Created: 2024-10-09 Last updated: 2025-03-28Bibliographically approved

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Lin, Pen-ShengQuellmalz, ArneHuang, Po-HanNiklaus, FrankGylfason, Kristinn

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Lin, Pen-ShengQuellmalz, ArneHuang, Po-HanNiklaus, FrankGylfason, Kristinn

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Micro and Nanosystems

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Atom and Molecular Physics and OpticsOther Electrical Engineering, Electronic Engineering, Information EngineeringOther Physics Topics

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