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Role of sputtered atom and ion energy distribution in films deposited by physical vapor deposition: A molecular dynamics approach
GREMI, UMR7344 CNRS Université d’Orléans, Orléans F-45067, France.
GREMI, UMR7344 CNRS Université d’Orléans, Orléans F-45067, France.
GREMI, UMR7344 CNRS Université d’Orléans, Orléans F-45067, France.
GREMI, UMR7344 CNRS Université d’Orléans, Orléans F-45067, France.
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2024 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 42, no 6, article id 060401Article in journal (Refereed) Published
Abstract [en]

We present a comparative molecular dynamics simulation study of copper film growth between various physical vapor deposition (PVD) techniques: a constant energy neutral beam, thermal evaporation, dc magnetron sputtering, high-power impulse magnetron sputtering (HiPIMS), and bipolar HiPIMS. Experimentally determined energy distribution functions were utilized to model the deposition processes. Our results indicate significant differences in the film quality, growth rate, and substrate erosion. Bipolar HiPIMS shows the potential for an improved film structure under certain conditions, albeit with increased substrate erosion. Bipolar HiPIMS (+180 V and 10% Cu+ ions) exhibited the best film properties in terms of crystallinity and atomic stress among the PVD processes investigated.

Place, publisher, year, edition, pages
AVS Science and Technology Society , 2024. Vol. 42, no 6, article id 060401
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Physical Sciences
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URN: urn:nbn:se:kth:diva-356963DOI: 10.1116/6.0004134ISI: 001357976900001Scopus ID: 2-s2.0-85209697080OAI: oai:DiVA.org:kth-356963DiVA, id: diva2:1916670
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QC 20241128

Available from: 2024-11-28 Created: 2024-11-28 Last updated: 2024-12-05Bibliographically approved

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Gudmundsson, Jon Tomas

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