Role of sputtered atom and ion energy distribution in films deposited by physical vapor deposition: A molecular dynamics approachShow others and affiliations
2024 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 42, no 6, article id 060401Article in journal (Refereed) Published
Abstract [en]
We present a comparative molecular dynamics simulation study of copper film growth between various physical vapor deposition (PVD) techniques: a constant energy neutral beam, thermal evaporation, dc magnetron sputtering, high-power impulse magnetron sputtering (HiPIMS), and bipolar HiPIMS. Experimentally determined energy distribution functions were utilized to model the deposition processes. Our results indicate significant differences in the film quality, growth rate, and substrate erosion. Bipolar HiPIMS shows the potential for an improved film structure under certain conditions, albeit with increased substrate erosion. Bipolar HiPIMS (+180 V and 10% Cu+ ions) exhibited the best film properties in terms of crystallinity and atomic stress among the PVD processes investigated.
Place, publisher, year, edition, pages
AVS Science and Technology Society , 2024. Vol. 42, no 6, article id 060401
National Category
Physical Sciences
Identifiers
URN: urn:nbn:se:kth:diva-356963DOI: 10.1116/6.0004134ISI: 001357976900001Scopus ID: 2-s2.0-85209697080OAI: oai:DiVA.org:kth-356963DiVA, id: diva2:1916670
Note
QC 20241128
2024-11-282024-11-282024-12-05Bibliographically approved