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Effects of ion channelling on 350 keV proton implantation of 4H-SiC measured by D-SIMS and DLTS defect profiling
University of Catania Department of Chemical Sciences and INSTM UdR Catania, 95125, Catania, Italy.
University of Oslo Centre for Materials Science and Nanotechnology, PO Box 1048 Blindern, 0316, Oslo, Norway, PO Box 1048 Blindern.
University of Oslo Centre for Materials Science and Nanotechnology, PO Box 1048 Blindern, 0316, Oslo, Norway, PO Box 1048 Blindern.
STMicroelectronics Catania, 95121, Catania, Italy.
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2025 (English)In: Materials Science in Semiconductor Processing, ISSN 1369-8001, E-ISSN 1873-4081, Vol. 190, article id 109320Article in journal (Refereed) Published
Abstract [en]

Channelling can have a profound effect on both the defect formation and the distribution of implanted atoms in crystalline materials. This holds particularly for SiC, where channelling effects are well known for conventional dopant impurities. In contrast, channelling effects for protons in SiC are much less studied, despite H is known to be a promising element for defect engineering in power device applications as well as quantum technologies. In this study, the effects of ion channelling on the depth distribution of medium energy proton implants in epitaxial 4H-SiC were investigated. N-type 4H-SiC epilayers, grown on the (0001) plane, were implanted with 350 keV protons to low (5e9 cm−2) and medium (6e14 cm−2) doses, with beam alignment ranging from 0° to 7° off the [0001] orientation towards the [112‾0] direction. The samples were measured by a combination of deep level transient spectroscopy (DLTS) and dynamic secondary ion mass spectrometry (D-SIMS), to reveal the role of ion channelling on the generation of defects and the distribution of implanted H. The experimental profiles were also compared to Monte Carlo binary collision approximation (MC-BCA) simulations. These measurements show that channelling implantation of protons in high quality epitaxial 4H-SiC can be used for discrete profile shape adjustments and peak depth control by playing with the beam alignment conditions, thus representing a valuable means for high precision localized in-depth control of electrically active defects.

Place, publisher, year, edition, pages
Elsevier BV , 2025. Vol. 190, article id 109320
Keywords [en]
4H-SiC, Channelling, D-SIMS, DLTS, Proton, RBS/C
National Category
Materials Engineering
Identifiers
URN: urn:nbn:se:kth:diva-359298DOI: 10.1016/j.mssp.2025.109320ISI: 001408352200001Scopus ID: 2-s2.0-85215384363OAI: oai:DiVA.org:kth-359298DiVA, id: diva2:1932625
Note

QC 20250217

Available from: 2025-01-29 Created: 2025-01-29 Last updated: 2025-02-17Bibliographically approved

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Hallén, Anders

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