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Charge Carrier Capture by Prominent Defect Centers in 4H-SiC
Department of Chemical Sciences, University of Catania, 95125, Catania, Italy.
Centre for Material Science and Nanotechnologies, University of Oslo, 0373, Oslo, Norway.
KTH, School of Electrical Engineering and Computer Science (EECS), Electrical Engineering, Electronics and Embedded systems.ORCID iD: 0000-0002-8760-1137
Department of Chemical Sciences, University of Catania, 95125, Catania, Italy.
2024 (English)In: Diffusion and defect data, solid state data. Part A, Defect and diffusion forum, ISSN 1012-0386, E-ISSN 1662-9507, Vol. 434, p. 173-182Article in journal (Refereed) Published
Abstract [en]

The knowledge of capture properties of electrically active defects is of primary importance as it helps to understand which deep states are effective in controlling the excess free carriers’ lifetime. Combining DLTS capture experiments with thermal emission measurements enables an overall thermodynamic description of deep states, thus making it possible to characterize recombination centers in semiconductor-based devices. In the present study, junction DLTS capture rate measurements were employed to extract the true capture cross-sections (inversely proportional to the carrier lifetime) and capture energy barriers for the main lifetime limiting defects in 4H-SiC(silicon carbide). A peculiar forward bias dependence of the capture parameters was observed for the shallow boron (B) hole trap. Capture rate measurements on the deep boron (D-center) trap also evidenced the presence of two capture mechanisms, thus allowing discrimination of D<inf>1</inf> and D<inf>2</inf> deep states within the D-center DLTS peak. The results were combined with activation energies and apparent capture cross-sections to obtain the free energy (ΔG) of electronic activation for the analysed deep states.

Place, publisher, year, edition, pages
Trans Tech Publications, Ltd. , 2024. Vol. 434, p. 173-182
Keywords [en]
4H-SiC, capture cross-section, capture energy barrier, entropy factor, junction DLTS
National Category
Computational Mathematics
Identifiers
URN: urn:nbn:se:kth:diva-367167DOI: 10.4028/p-ls2bVEScopus ID: 2-s2.0-85204385165OAI: oai:DiVA.org:kth-367167DiVA, id: diva2:1984258
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QC 20250715

Available from: 2025-07-15 Created: 2025-07-15 Last updated: 2025-07-15Bibliographically approved

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Hallén, Anders

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