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Sensitivity-optimized waveguide-based methane gas sensor in the mid-IR
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0002-4949-166X
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0003-3936-818X
KTH, School of Electrical Engineering and Computer Science (EECS), Intelligent systems, Micro and Nanosystems.ORCID iD: 0000-0002-7659-842X
Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Str. 2, 52074 Aachen, Germany; AMO GmbH, Advanced Microelectronic Center Aachen, Otto-Blumenthal-Str. 25, 52074 Aachen, Germany.
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2024 (English)In: 2024 Conference on Lasers and Electro-Optics, CLEO 2024, Optica Publishing Group , 2024Conference paper, Published paper (Refereed)
Abstract [en]

We demonstrate methane gas sensing using suspended silicon waveguides and experimentally validate the sensitivity optimization of waveguide-based gas sensors by varying waveguide lengths. This method enables application-optimized integrated optical gas sensors.

Place, publisher, year, edition, pages
Optica Publishing Group , 2024.
Keywords [en]
Gas detectors, Integrated optics, Methane, Optical design, Optical sensors, Optical waveguides, Optimization, Sensitivity, Silicon, Waveguide lasers
National Category
Atom and Molecular Physics and Optics Other Electrical Engineering, Electronic Engineering, Information Engineering Other Physics Topics
Identifiers
URN: urn:nbn:se:kth:diva-367208DOI: 10.1364/cleo_si.2024.sf3a.2Scopus ID: 2-s2.0-85215120037OAI: oai:DiVA.org:kth-367208DiVA, id: diva2:1984374
Conference
2024 Conference on Lasers and Electro-Optics, CLEO 2024, Charlotte, United States of America, May 7-10, 2024
Note

Syskonpost

Part of ISBN 9781957171395

QC 20250715

Available from: 2025-07-15 Created: 2025-07-15 Last updated: 2025-10-31Bibliographically approved

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Lin, Pen-ShengQuellmalz, ArneHuang, Po-HanNiklaus, FrankGylfason, Kristinn B.

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Lin, Pen-ShengQuellmalz, ArneHuang, Po-HanNiklaus, FrankGylfason, Kristinn B.
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Micro and Nanosystems
Atom and Molecular Physics and OpticsOther Electrical Engineering, Electronic Engineering, Information EngineeringOther Physics Topics

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