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Multimodal electromechanics with niobium vacuum gap capacitor membranes
TU Wien, ISAS, Gusshausstrasse 27-29, Vienna, 1040, Austria.ORCID iD: 0000-0003-2462-6692
KTH, School of Engineering Sciences (SCI), Applied Physics, Quantum and Nano Physics.ORCID iD: 0000-0001-7469-9975
KTH, School of Engineering Sciences (SCI), Applied Physics, Quantum and Nano Physics.ORCID iD: 0000-0001-8180-1966
KTH, School of Engineering Sciences (SCI), Applied Physics, Quantum and Nano Physics.ORCID iD: 0000-0003-2552-6415
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2025 (English)In: Sensors and Actuators A-Physical, ISSN 0924-4247, E-ISSN 1873-3069, Vol. 393, article id 116667Article in journal (Refereed) Published
Abstract [en]

Electromechanics with micromachined vacuum gap capacitors have brought optomechanical techniques to the palm of our hand. Cooling these devices down to the millikelvin regime forms the basis for developing quantum memories and allows us to delve into basic science experiments. To date, only aluminium has been used as device material, and the design has not evolved significantly since it was introduced. Even more, the potential provided by the integration of sensing capabilities was not in the focus of any application driven developments so far. Here, we present several improvements comprising of niobium as base material, a double electrical cavity design and integrated piezoelectric actuators, creating a platform for sensing. We achieve a vacuum optomechanical coupling rate of g0/2π = 160 Hz, which can be employed for back-action evading techniques and mechanical noise squeezing of the first mechanical mode. We show coupling between the two electrical cavities and the first four mechanical eigenmodes. Furthermore, using the piezoelectric actuator for phononic pumping, we investigate coupling between the mechanical modes among each other. Based on these achievements, it is strongly believed that more research activities will be stimulated in the field of quantum sensing for up to now unexplored and unprecedented application scenarios.

Place, publisher, year, edition, pages
Elsevier BV , 2025. Vol. 393, article id 116667
Keywords [en]
Electromechanics, Micro-electromechanical systems, Multimodes, Niobium, Vacuum gap capacitors
National Category
Condensed Matter Physics Atom and Molecular Physics and Optics
Identifiers
URN: urn:nbn:se:kth:diva-368927DOI: 10.1016/j.sna.2025.116667ISI: 001535021400001Scopus ID: 2-s2.0-105009952964OAI: oai:DiVA.org:kth-368927DiVA, id: diva2:1993091
Note

QC 20250829

Available from: 2025-08-29 Created: 2025-08-29 Last updated: 2025-11-13Bibliographically approved

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Arvidsson, ElisabetRoos, August K.Scarano, Ermes

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Ignat, IoanArvidsson, ElisabetRoos, August K.Scarano, ErmesGruber, JakobPlatz, DanielSchmid, Ulrich
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