Towards High-Precision Optical Components Fabrication via Femtosecond Laser Micromachining Show others and affiliations
2025 (English) In: EOS Annual Meeting, EOSAM 2025, EDP Sciences , 2025, article id 04016Conference paper, Published paper (Refereed)
Abstract [en]
Femtosecond laser micromachining (FLM) has emerged as a powerful technique for the precise fabrication of optical components, enabling high-resolution structuring in transparent materials such as fused silica and borosilicate glass. The nonlinear absorption mechanisms involved allow for localized modifications at the microscale with minimal thermal effects. In this work, we demonstrate the application of FLM for the fabrication of integrated optical beam splitters and microlenses. By carefully controlling laser parameters and subsequent post-processing steps, we achieve structures with high optical quality and functional performance. The results demonstrate the potential of femtosecond laser technology in integrating complex optical components, opening new possibilities for the development of lab-on-chip systems.
Place, publisher, year, edition, pages EDP Sciences , 2025. article id 04016
National Category
Atom and Molecular Physics and Optics Manufacturing, Surface and Joining Technology
Identifiers URN: urn:nbn:se:kth:diva-372755 DOI: 10.1051/epjconf/202533504016 Scopus ID: 2-s2.0-105019059662 OAI: oai:DiVA.org:kth-372755 DiVA, id: diva2:2013485
Conference 2025 European Optical Society Annual Meeting, EOSAM 2025, Delft, Netherlands, Aug 24 2025 - Aug 28 2025
Note QC 20251113
2025-11-132025-11-132025-11-13 Bibliographically approved